Patents Examined by Keneth J. Whittington
  • Patent number: 7129702
    Abstract: An XY stage includes a movable frame having a rectangular space inside thereof and movable on a reference base along one of X and Y axes, a first drive source provided in the reference base for moving the movable frame, a rectangular movable base mounted in the rectangular space of the movable frame, which is movable on the reference base along the other of the X and Y axes and stopped on the reference base, and a second drive source provided in the movable frame, for moving the movable base.
    Type: Grant
    Filed: March 19, 2004
    Date of Patent: October 31, 2006
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Kyoichi Mori, Fujio Yamasaki, Toshinori Sugiyama