Abstract: A compact inverter system includes a bus bar. The bus bar includes a terminal for connection to a positive terminal of a DC voltage supply. The compact inverter also includes a heat sink, a first transistor, and a second transistor. The first transistor has first and second terminals between which current is transmitted when the first transistor is activated, and a first gate terminal controlling the first transistor. The first terminal of the first transistor is thermally and electrically connected to the bus bar. The second transistor has first and second terminals between which current is transmitted when the second transistor is activated, and a second gate terminal controlling the second transistor. The first terminal of the second transistor is thermally and electrically connected to the heat sink. The first and second transistors are positioned between the bus bar and the heat sink. The first transistor is positioned between the second transistor and the bus bar.

Abstract: A Johnsen-Rahbek force type electrostatic chuck including: a metal substrate; an electrode for electrostatic attraction provided on the metal substrate with an insulating layer interposed between the metal substrate and the electrode for electrostatic attraction; and a dielectric layer constituting an electrostatic attraction surface in contact with a workpiece. The dielectric layer includes a ceramic spray coating and a sealing component with which pores of the ceramic spray coating are filled, and the sealing component contains a metal organic salt containing a rare earth element.

Abstract: Electrostatic chucks (ESCs) for plasma processing chambers, and methods of fabricating ESCs, are described. In an example, a substrate support assembly includes a ceramic top plate having a top surface with a processing region. One or more electrodes is within the ceramic top plate. A plurality of mesas is within the processing region and on the top surface of the ceramic plate or vertically over an edge of one of the one or more electrodes.

Abstract: An electrostatic discharge (ESD) protection circuit is provided. The protection circuit includes a MOS transistor and a resistor. The MOS transistor is electrically coupled to a core circuit. The resistor is electrically coupling to a gate of the MOS transistor for creating a bias on the gate to directing an ESD current to a ground when an ESD event occurs on the core circuit. A layout of the MOS transistor is spaced apart from a layout of the core circuit by a layout of a dummy structure. The resistor is formed by utilizing a portion of the dummy structure.

Abstract: A nanomagnetic inductor core that includes: a porous, electrically-insulating template having high-permeability material in the pores thereof to constitute elongated nanowires, and wherein the elongated nanowires are segmented along their axial direction; and a segment of dielectric material interposed between adjacent segments of the high-permeability material along the axial direction of the nanowire; wherein each segment of the high-permeability material has a length, in the axial direction of the nanowire, no greater than a size of a single magnetic domain, and wherein a maximal cross-sectional dimension of the nanowire is no greater than the size of the single magnetic domain. Inductors and LC interposers using such nanomagnetic inductor cores, as well as associated fabrication methods.

Abstract: One example includes a power supply system. The system includes a voltage-limit power regulator to generate an output voltage and an instantaneous overvoltage sensor configured to detect an overvoltage condition associated with the output voltage. The system further includes an overvoltage latch-off timer system configured to initiate a latch-off timer in response to detecting the overvoltage condition. The latch-off timer can be uninterrupted by an amplitude of the output voltage. The overvoltage latch-off timer system can further be configured to detect a persistent overvoltage fault in response to detecting the overvoltage condition after expiration of the latch-off timer. The overvoltage latch-off timer system can be configured to generate a fault signal to disable the voltage-limit power regulator in response to detecting the persistent overvoltage fault.

Abstract: Passive monitoring the integrity of current sensing devices and associated circuitry in GFCI and AFCI protective devices is provided. A protection circuit interrupter employs a capacitively coupled noise signal obtained by an arrangement of one or both of line side arms relative to a Rogowski coil. The noise signal is monitored while the line and load sides of a protective circuit interrupter are disconnected, and the connection of the line and load sides disabled if the noise signal fails to correlate sufficiently to a reference noise cycle. When the line and load sides are connected, the RMS value of the observed current signal is monitored such that the line and load sides are disconnected if the observed current signal fails to meet an RMS threshold. The observed current signal is compensated by subtracting the reference noise cycle prior to monitoring for the fault condition applicable to the protective device.

Abstract: An electrostatic chuck for a substrate processing system is provided and includes a baseplate, an intermediate layer disposed on the baseplate, and a top plate. The top plate is bonded to the baseplate via the intermediate layer and is configured to electrostatically clamp to a substrate. The top plate includes a monopolar clamping electrode and seals. The monopolar clamping electrode includes a groove opening pattern with coolant gas groove opening sets. The seals separate coolant gas zones. The coolant gas zones include four or more coolant gas zones. Each of the coolant gas zones includes distinct coolant gas groove sets. The top plate includes the distinct coolant gas groove sets. Each of the distinct coolant gas groove sets has one or more coolant gas supply holes and corresponds to a respective one of the coolant gas groove opening sets.

Abstract: Bias supplies and plasma processing systems are disclosed. One bias supply comprises an output node, a return node, and a power section coupled to the output node and the return node. A resonant switch section is coupled to the power section at a first node, a second node, and a third node wherein the resonant switch section is configured to connect and disconnect a current pathway between the first node and the second node to apply an asymmetric periodic voltage waveform at the output node relative to the return node. The asymmetric periodic voltage waveform includes a first portion that begins with a first negative voltage and changes to a positive peak voltage, a second portion that changes from the positive peak voltage level to a third voltage level and a fourth portion that includes a negative voltage ramp from the third voltage level to a fourth voltage level.

Abstract: A vacuum interrupter has a cover base formed with an insertion opening for an axially movable moving contact rod carrying a moving contact. The moving contact rod is routed out of the vacuum interrupter in a vacuum-tight manner by way of a bellows. The bellows has a centering appendage which is formed by a tubular end piece of the bellows that runs parallel to the longitudinal axis of the bellows and is inserted into the insertion opening. The bellows moreover has a bellows base which is disposed on the centering appendage, runs substantially transversely to the longitudinal axis of the bellows, and is formed with a through-opening for the moving contact rod.

Abstract: An electrostatic chuck includes a base having a surface on which an object is to be placed, and a through hole extending through the base, wherein a porous material containing angular ceramic particles is disposed in the through hole.

Abstract: A transformer assembly for electric grids including: an electric transformer including a magnetic core, a first side including one or more first windings enchained with said magnetic core and adapted to be electrically connected to a first grid section and a second side including one or more second windings enchained with said magnetic core and adapted to be electrically connected to a second grid section; a tap changer operatively associated with said electric transformer to vary the number of turns enchained with said magnetic core for said first windings; a control unit to: acquire input data indicative of an electrical connectivity condition of said second grid section with said second windings; determine whether said transformer is in a load condition or in a no-load condition; and, in a no-load condition, command said tap changer to set a maximum available number of turns for said first windings.

Abstract: An output stage circuit including a current source circuit, a bias circuit, and an output circuit is provided. The bias circuit is coupled between the current source circuit and a ground terminal voltage. The output circuit includes a first transistor, a second transistor, a third transistor, and a load circuit. A control terminal of the first transistor is coupled to the bias circuit. The load circuit is coupled to a second terminal of the first transistor. A second terminal of the second transistor is coupled to a first terminal of the first transistor. A first terminal of the third transistor is coupled to the second terminal of the first transistor.

Abstract: A discharge unit is connected to a power pad, a ground pad, and an I/O pad, and can discharge an electrostatic charge when an electrostatic pulse appears on any of the power pad, the ground pad, and the I/O pad. The discharge unit includes a first discharge unit and a second discharge unit, the first discharge unit is connected to the second discharge unit, the power pad, and the I/O pad, and the second discharge unit is connected to the ground pad and the I/O pad. The first discharge unit and/or the second discharge unit can discharge electrostatic charges on different pads, respectively.

Abstract: An electrostatic discharge (ESD) protection circuit is provided. The protection circuit includes a MOS transistor and a resistor. The MOS transistor is electrically coupled to a core circuit. The resistor is electrically coupling to a gate of the MOS transistor for creating a bias on the gate to directing an ESD current to a ground when an ESD event occurs on the core circuit. A layout of the MOS transistor is spaced apart from a layout of the core circuit by a layout of a dummy structure. The resistor is formed by utilizing a portion of the dummy structure.

Abstract: A magnetic drive includes a base plate, an energy source mounted to the base plate, a control unit, a first magnetic field generator, and a switching circuit. The energy source and the first magnetic field generator are interconnected by the switching circuit. The control unit is configured to control the switching circuit to provide energy to the first magnetic field generator. The first magnetic field generator is configured to generate a magnetic field when being supplied with energy. The control unit is configured to control the switching unit to achieve a desired polarity of the generated magnetic field to interact with the external magnetic field so that a rotational force selectively in clockwise or counterclockwise direction is generated to rotate the first magnetic field generator within the external magnetic field in a desired direction of rotation.

Abstract: First and second output transistors are connected in series between a power supply terminal and a ground terminal through an output node connected to an output terminal. An output transistor control circuit is arranged corresponding to at least one of the first and second output transistors and is configured to input a voltage at the output terminal to the gate of the first output transistor at a time of occurrence of disconnection of the power supply terminal and input the same to the gate of the second output transistor at a time of occurrence of disconnection of the ground terminal. The first output transistor has a conductivity type to turn off when a power supply voltage is input to the gate, and the second output transistor has a conductivity type to turn off when a ground voltage is input to the gate.

Abstract: A composite sintered body includes a base material that includes ceramic as a main component, and an electrode arranged inside the base material or on a surface of the base material. The electrode contains W and ZrO2.

Abstract: A method for controlling a solid state circuit breaker includes detecting a direction of a current flowing through the solid state circuit breaker, obtaining a breaking current value of the solid state circuit breaker according to the detected direction of the current, obtaining a value of a maximum threshold current to flow through the solid state circuit breaker, obtaining a predicted current value within a next sampling period of a present sampling period of the solid state circuit breaker, comparing the predicted current value with the breaking current value, and upon the predicted current value being greater than the breaking current value, delaying the solid state circuit breaker, and upon the predicted current value being greater than the maximum threshold current value, controlling the solid state circuit breaker to disconnect a circuit in which the solid state circuit breaker resides.

Abstract: A plasma processing method includes supplying a voltage to an electrode provided in an electrostatic chuck, thereby adsorbing a substrate onto an upper surface of the electrostatic chuck; after the voltage supplied to the electrode of the electrostatic chuck is stabilized, cutting off the supply of the voltage to the electrode, thereby bringing the electrode into a floating state; and after the voltage supplied to the electrode of the electrostatic chuck is stabilized, performing a predetermined processing with plasma on a surface of the substrate adsorbed onto the electrostatic chuck.