Abstract: A structure and method of fabricating the structure. The structure includes a first region of a semiconductor substrate separated from a second region of the semiconductor substrate by trench isolation formed in the substrate; a first stressed layer over the first region; a second stressed layer over second region; the first stressed layer and second stressed layer separated by a gap; and a passivation layer on the first and second stressed layers, the passivation layer extending over and sealing the gap.
Type:
Grant
Filed:
November 5, 2010
Date of Patent:
May 21, 2013
Assignee:
International Business Machines Corporation
Inventors:
Brent A. Anderson, Edward J. Nowak, Jed H. Rankin