Abstract: Provided is a multiplexer for a biometric apparatus. The multiplexer includes a plurality of first conductors coupled to the first ends of piezo ceramic elements in corresponding rows and a plurality of first switches each of which is coupled to a respective one of the first conductors and a plurality of second conductors coupled to the second ends of piezo ceramic elements in corresponding columns. The multiplexer also includes a plurality of second switches each of which is coupled to a respective one of the second conductors. The first conductors are approximately orthogonal to the second conductors, and the first switches are controlled to couple a signal output from an output port of the signal generator to a particular piezo ceramic element of the at least twenty five thousand piezo ceramic elements. The second switches are controlled to couple a signal associated with the particular piezo ceramic element of the at least twenty five thousand piezo ceramic elements to an input port of the processor.

Abstract: An ultrasonic motor comprises a piezoelectric vibrating member having a detecting polarized portion for detecting a drive signal having a drive frequency of the detecting polarized portion and a driving polarized portion for receiving the drive signal to oscillate the piezoelectric vibrating member in self-excited oscillation to produce a drive force. The detecting polarized portion is disposed at a portion of the piezoelectric vibrating member for undergoing maximum deformation in at least one vibration mode of oscillation of the piezoelectric vibrating member. An amplifying circuit amplifies the drive signal detected by the detecting polarized portion and inputs the amplified signal to the driving polarized portion to oscillate the piezoelectric vibrating member.

Abstract: The present invention provides a method of packaging surface microfabricated transducers such that electrical connections, protection, and relevant environmental exposure are realized prior to their separation into discrete components. The packaging method also isolates elements of array transducers. Post processing of wafers consisting of transducers only on the top few microns of the wafer surface can be used to create a wafer scale packaging solution. By spinning or otherwise depositing polymeric and metallic thin and thick films, and by lithographically defining apertures and patterns on such films, transducers can be fully packaged prior to the final dicing steps that would separate the packaged transducers from each other. In the case of microfabricated ultrasonic transducers, such packaging layers can also enable flexible transducers and eliminate or curtail the acoustic cross-coupling that can occur between array elements.

Abstract: A piezoelectric actuator having a plurality of plates of a piezoelectric material whose polarization direction runs perpendicularly to the plate plane, and which are stacked one over another in their polarization direction. The piezoelectric actuator includes a control voltage source having two contacts, two groups of at least two outer electrodes, respectively, and a plurality of internal electrodes which, in each case, are arranged between the piezoelectric plates. In this context, the outer electrodes of the first group are electrically connected to a first contact of control voltage source, and the outer electrodes of the second group to the second contact of control voltage source. Internal electrodes alternately contact outer electrodes in such a way that, in each case, an internal electrode is electrically connected to one contact of control voltage source, and the internal electrode that is next in the stacking direction is electrically connected to the other contact of control voltage source.

Abstract: A piezoelectric type acceleration sensor which is small in size and has a high charge sensitivity and large static capacitance includes a piezoelectric element having a laminate of more than three piezoelectric layers. Electrodes are provided between the piezoelectric layers and the top and bottom surfaces of the laminate. The piezoelectric element is supported at opposed ends. Adjacent ones of the piezoelectric layers are polarized so that charge having the same polarity is accumulated at the electrode interposed the adjacent ones.

Abstract: The active/passive absorber for extended vibration and sound radiation control includes principally two layers. The first layer has a low stiffness per unit area which allows motion in the direction perpendicular to its main plane. The second layer is principally a mass layer. These two combined layers have a frequency of resonance close to one of the main structure. The dynamic behavior of the coupled system makes the active/passive absorber a passive absorbe; however, the first layer can be electrically actuated to induce motion in the direction perpendicular to its main plane. This addition property induces and/or changes the motion of the mass layer and therefore improves the dynamic properties of the active/passive absorber system.

Abstract: A piezoelectric actuator is formed in a manner which enhances the identifying function of markings provided thereon, and minimizes the influence on the markings when an electrode pattern on the piezoelectric actuator is shifted. The piezoelectric actuator has a piezoelectric element, an electrode pattern formed thereon, and at least one identifying marking formed on the electrode pattern, each identifying marking having a shape comprising multiple sides and being formed at a specific location of the electrode pattern for use in identifying a characteristic of the electrode pattern.

Abstract: A surface acoustic wave component for high power capability has an aluminum electrode structure on a pyro-electric substrate. A surface of the substrate with the electrode structure thereon is a crystal cut surface which is positively electrically charged when the pyro-electric crystal material is heated. A hard layer is also provided on the electrode structures, preferably with a corresponding crystal cut orientation.

Abstract: An ultrasonic transducer is disclosed that operates efficiently and at low impedance at high frequencies at or near a third harmonic frequency of its piezoelectric crystal. The ultrasonic transducer includes a resonator composed of ceramic material and positioned between a head mass and the piezoelectric crystal.

Abstract: In a method of producing a micro-actuator, a first adhesive is applied to a movable plate, and a movable electrode is placed on the first adhesive. The movable plate and the movable electrode are clamped between a first stage and a first head, followed by heating for a first predetermined period of time while exerting a first predetermined press load onto the first head to semi-cure the first adhesive. A second adhesive is applied to the movable electrode, and a piezoelectric element is placed on the second adhesive. The movable plate, the movable electrode and the piezoelectric element are clamped between the first stage and a second head, followed by heating for a second predetermined period of time while exerting a second predetermined press load onto the second head to semi-cure the second adhesive. Next, a third adhesive is applied to an actuator base, a base electrode is placed on the third adhesive, and the third adhesive is semi-cured in the same manner as above.

Abstract: A microactuator device is disclosed that includes a plurality of generally parallel thin flexible sheets bonded together in a predetermined pattern to form an array of unit cells. Preferably, each of the sheets has only a single electrode layer located on one side of the sheet. Pairs of such sheets are then bonded together at spaced bonding locations with the electrode layers facing one another. Several sets of such sheet pairs can then be bonded together to form a microactuator device.

Abstract: A micro-electro-mechanical-system (MEMS) mirror device includes a mirror component that is capable of moving upon electrostatic actuation. The MEMS mirror device also includes and one or more electrostatic actuators providing electrostatic actuation. The electrostatic actuators having plates disposed approximately perpendicular to the mirror component. The plates are disposed to define a gap between the plates that decreases along a direction perpendicular to a surface of the mirror component.

Abstract: An electronic device and a fabricating method for fabricating the electronic device, the electronic device comprising; a surface acoustic wave device 3 having a main surface thereon having a transducer portion 4 and wiring patterns 5 connected electrically to the transducer portion; a printed circuit board 1 having wiring patterns 2 formed at least on one main surface thereof; a plurality of conductive bumps 6 which connect electrically both of the mutually opposed wiring patterns and form a space portion 10 between the surface acoustic wave device 3 and a printed circuit board 1; and resin portion 11 which, by heating/melting and hardening, makes an intimate contact with other main surface of the device and coats the device 3 and seals the device 3 together with the printed circuit board 1, wherein, by employing a highly thixotropic and viscous thermo-setting resin compared with a conventional one, an electronic device having a simple structure can be provided and fabricating process for fabricating the elec

Abstract: The present invention provides a ZnO based tunable surface acoustic wave (SAW), preferably monolithically integrated tunable SAW (MITSAW) device. The MITSAW comprises a ZnO/Mgx Zn1−xO quantum well structure and piezoelectric ZnO thin film epitaxially grown on R-plane sapphire ((01{overscore (1)}2)Al2O3) substrate using MOCVD. R-plane sapphire provides in-plane anisotropy in the ZnO layer as the c-axis of ZnO lies in the growth plane. A two-dimensional electron gas (2DEG) is placed in the delay path of the SAW device and interacts with the lateral electric field resulting in ohmic loss which attenuates and slows the surface acoustic wave. This mechanism is used to tune the acoustic velocity. The high coupling coefficients offered by the ZnO/R-(Al2O3) system allows large velocity tuning. ZnO based MITSAW is used for chemical and biochemical sensors, offers excellent manufacturability, high yield and low cost. Such SAW sensors have a “resettable” sensing mechanism.

Abstract: A thickness extensional vibration mode piezoelectric resonator includes a piezoelectric body having piezoelectric layers and N internal electrodes disposed therein, where N is an integer equal to 3 to 5. Electric fields of opposite polarity are applied alternately in the direction of thickness to the piezoelectric layers located between the internal electrodes. When the thickness of a piezoelectric layer between adjacent internal electrodes in the direction of thickness is denoted by D and the thicknesses of a first and second piezoelectric layer outside the outermost internal electrodes in the direction of thickness are denoted by D1 and D2, the following relationships are satisfied: 0.50≦(D1+D2)/2D≦1.00 at N=3, 0.50≦(D1+D2)/2D≦0.90 at N=4, and 0.50≦(D1+D2)/2D≦0.80 at N=5.

Abstract: A scanning unit for moving an object to be moved along at least one axis, which comprises a first actuator for moving the object along a first axis, the first actuator having a pair of end portions, and the object being attached to one of the end portions, the first actuator being held at a position in the vicinity of the center in dimension or the center of gravity thereof.

Abstract: A linear piezoelectric motor which includes a piezoelectric actuator; an actuator container which contains the piezoelectric actuator; an actuator slope which is supported by and slidably connected to an actuator slope support, the actuator slope is able to correspond with a surface portion of the actuator container; an output bar which shares a common axis with the actuator and the actuator container and comes in contact with at least one of the actuator and the actuator container on one end of the output bar and an axial load is applied on an opposite end of the output bar; and at least one output slope which is slidably connected to at least one output support.

Abstract: A vibrating gyroscope includes a piezoelectric vibrator and a plurality of detection load-impedance elements. The resistance of one of the detection load-impedance elements is changed by a switch so that the resistance is different from that of the other one of the detection load-impedance elements, thereby making difference between the amplitude of signals input from two detection electrodes to a differential circuit and detecting the variation in a Coriolis signal. Accordingly, a self-diagnosis for the vibrating gyroscope, for example, a diagnosis of a short circuit in the detection electrodes of the vibrator can be performed.

Abstract: An innovative piezoelectric transducer apparatus having a piezoelectric workpiece with a modal-shaped actuator electrode for converting an input energy of one form into an output energy of another form. The piezoelectric workpiece comprises an actuator section and a sensor section. The actuator section is formed in the piezoelectric workpiece and has a modal-shaped electrode for exciting the piezoelectric workpiece into mechanical vibration upon driven by the input energy. The sensor section is also formed in the piezoelectric workpiece and has a sensor electrode for delivering the output energy to an external load of the apparatus by picking up the energy generated by the excitation. The modal-shaped actuator electrode has a shape function defined by the mathematical solution function of the governing equation of the piezoelectric workpiece under the condition that the piezoelectric workpiece being vibrating in a selected resonant mode.

Abstract: This invention relates to a surface acoustic wave device and a production process thereof. An electrode is formed by alternately laminating a film of an aluminum alloy containing at least copper added thereto and a copper film on a piezoelectric substrate. While the particle size of the multi-layered electrode materials in kept small, the occurrence of voids in the film is prevented and life time of the surface acoustic wave device is elongated.