Abstract: An integrated visual defect detection and classification system. The invention includes adaptive defect detection and image labeling, defect feature measures, and a knowledge based inference shell/engine for classification based on fuzzy logic. The combination of these elements comprises a method and system for providing detection and analysis of product defects in many application domains, such as semiconductor and electronic packaging manufacturing.
Type:
Grant
Filed:
October 22, 1993
Date of Patent:
August 6, 1996
Assignee:
International Business Machines Corporation
Inventors:
Virginia H. Brecher, Paul B.-L, Chou, Robert W. Hall, Debra M. Parisi, Ravishankar Rao, Stuart L. Riley, Martin C. Sturzenbecker