Abstract: An extreme ultra violet (EUV) radiation source apparatus includes a collector mirror, a target droplet generator for generating a tin (Sn) droplet, a rotatable debris collection device, one or more coils for generating an inductively coupled plasma (ICP), a gas inlet for providing a source gas for the ICP, and a chamber enclosing at least the collector mirror and the rotatable debris collection device. The gas inlet and the one or more coils are configured such that the ICP is spaced apart from the collector mirror.

Abstract: Systems and methods for preparing a nanofluidic LCTEM cell are provided. An exemplary method includes coating a photoresist layer onto a top surface of a silicon nitride substrate; etching channels into the photoresist layer; depositing calcite into the etched channels; removing the photoresist; placing the cell on a holder; connecting a first end of an inlet line to the cell; connecting a second end of the inlet line to an ultrasound transducer configured to generate nanobubbles; and connecting an outlet line to the cell.

Abstract: In some examples, a multi-device removal and installation tool may include a device removal tool including catch members engageable with an engagement face of a device to attach, upon engagement of the catch members with the engagement face, the device removal tool to the device. The catch members may engage the engagement face with a removal force that is sufficient to remove, upon engagement of the catch members with the engagement face, the device from an instrument. The multi-device removal and installation tool may further include a torque limit tool including a retainer having at least one protrusion, and a drive member having an inside surface and an outside surface. The torque limit tool may further include at least one detent positioned on the inside surface.

Abstract: Devices and methods for mass spectroscopic analysis of particles are disclosed herein. An example device includes: a first irradiation unit configured to irradiate a particle with electromagnetic radiation to cause components of the particle to detach from the particle. The example device further includes a second irradiation unit configured to irradiate substantially simultaneously i) at least a part of the detached components, and optionally a residual core of the particle, with a first beam of electromagnetic radiation the first beam of electromagnetic radiation exhibiting a first intensity, and ii) at least a part of the residual core, of the particle with a second beam of electromagnetic radiation. The second beam of electromagnetic radiation exhibiting a second intensity, which is preferably larger than the first intensity. The example device further includes a mass spectrometer comprising an ion source region, a first detection channel, and optionally a second detection channel.

Abstract: A method for implanting high charge state ions into a workpiece while mitigating trace metal contamination includes generating desired ions at a first charge state from a desired species in an ion source, as well as generating trace metal ions of a contaminant species in a first ion beam. A charge-to-mass ratio of the desired ions and the trace metal ions is equal. The desired ions and trace metal ions are extracted from the ion source. At least one electron stripped from the desired ions to define a second ion beam of the desired ions at a second charge state and the trace metal ions. Only the desired ions from the second ion beam are selectively passed only through a charge selector to define a final ion beam of the desired ions at the second charge state and no trace metal ions, and the desired ions of the second charge state are implanted into a workpiece.

Abstract: The following invention is used for determining the relative permeability of a fluid in a rock for three different phases: water, oil, and gas, in both conventional and unconventional formations. The permeability of a phase describes how much it can flow in porous media given a pressure gradient and is useful in evaluating reservoir quality and productivity. The following invention is a method to determine the three-phase relative permeabilities in both conventional and unconventional formations using NMR restricted diffusion measurements on core with NMR-active nuclei, combined with centrifugation of the core. In addition, the tortuosity, pore size (surface-to-volume ratio), fluid-filled porosity, and permeability is determined for each of the three phases in a rock.

Abstract: The invention provides an electron beam apparatus that reduces a time required for an electron gun chamber to which a sputter ion pump and a non-evaporable getter pump are connected to reach an extreme high vacuum state. The electron beam apparatus includes an electron gun configured to emit an electron beam and the electron gun chamber to which the sputter ion pump and the non-evaporable getter pump are connected. The electron beam apparatus further includes a gas supply unit configured to supply at least one of hydrogen, oxygen, carbon monoxide, and carbon dioxide to the electron gun chamber.

Abstract: An ionization device including: a laser light source; a light collection optical system configured to irradiate a sample with the laser light; a first intensity changing unit configured to continuously change an intensity of laser light; a second intensity changing unit configured to stepwisely change an intensity of laser light; an irradiation diameter setting reception unit configured to receive setting of an irradiation diameter of laser light; an irradiation intensity setting reception unit configured to receive setting of an irradiation intensity of laser light; and a laser light intensity controller configured to set an intensity of the laser light by changing an irradiation diameter of the laser light by the light collection optical system and controlling the second intensity changing unit according to the irradiation diameter, and by controlling the first intensity changing unit according to the irradiation intensity.

Abstract: An extreme ultra violet (EUV) radiation source apparatus includes a collector, a target droplet generator for generating a tin (Sn) droplet, a rotatable debris collection device and a chamber enclosing at least the collector and the rotatable debris collection device. The rotatable debris collection device includes a first end support, a second end support and a plurality of vanes, ends of which are supported by the first end support and the second end support, respectively. A surface of at least one of the plurality of vanes is coated by a catalytic layer, which reduces a SnH4 to Sn.

Abstract: Improved pulsed ion sources and pulsed converters are proposed for multi-pass time-of-flight mass spectrometer, either multi-reflecting (MR) or multi-turn (MT) TOF. A wedge electrostatic field (45) is arranged within a region of small ion energy for electronically controlled tilting of ion packets (54) time front. Tilt angle ? of time front (54) is strongly amplified by a post-acceleration in a flat field (48). Electrostatic deflector (30) downstream of the post-acceleration (48) allows denser folding of ion trajectories, whereas the injection mechanism allows for electronically adjustable mutual compensation of the time front tilt angle, i.e. ?=0 for ion packet in location (55), for curvature of ion packets, and for the angular energy dispersion. The arrangement helps bypassing accelerator (40) rims, adjusting ion packets inclination angles ?2 and what is most important, compensating for mechanical misalignments of the optical components.

Abstract: Systems and methods for sample analysis include applying, using a first laser source, a first beam to a sample to desorb organic material from a location of the sample and ionizing the desorbed organic material using a second laser source to generate ionized organic material. The ionized organic material is then analyzed using a mass spectrometer. A second beam from the first laser is then applied to the sample to ablate inorganic material from the location of the sample. The ablated inorganic material is then ionized using the second laser source to generate ionized inorganic material. The mass spectrometer is then used to analyze the ionized inorganic material. During analysis, one or more images of the sample may also be captured and linked to the collected analysis data.

Abstract: A droplet generator for an extreme ultraviolet imaging tool includes a reservoir for a molten metal, and a nozzle having a first end connected to the reservoir and a second opposing end where molten metal droplets emerge from the nozzle. A gas inlet is connected to the nozzle, and an isolation valve is at the second end of the nozzle configured to seal the nozzle droplet generator from the ambient.

Abstract: A radiation shielding material that is lighter and has lower installation restrictions than conventional methods, and that exhibits excellent shielding efficiency against radiation in the high energy region. The radiation shielding material comprises a complex containing a fibrous nanocarbon material, a primary radiation shielding particle, and a binder, wherein the fibrous nanocarbon material and the primary radiation shielding particle are dispersed in the binder.

Abstract: Mass spectrometry cartridge including a base in mechanical communication with a spray substrate holder, an absorbent pad between the base and the spray substrate holder, a translatable sample well holder interposed between the spray substrate holder and a top cover, the top cover configured to house a conductive element, wherein when the translatable sample well holder is in a first position, the translatable well holder is vertically above the absorbent pad, when the translatable sample well holder is in a second position, the translatable well holder is vertically above a spray substrate are disclosed. Methods of analyzing a sample are also disclosed.

Abstract: The present invention provides a method for analyzing a sample containing metal fine particles with an inductive coupling plasma mass spectrometer. The method enables analysis of the sample without the need of standard metal fine particles. Specifically, the present invention relates to a method for analyzing metal fine particles in liquid by use of an inductive coupling plasma mass spectrometer. In the method, the analysis apparatus is provided with a standard solution introduction apparatus including a standard solution storage unit for storing a standard solution containing a specific element in a known concentration, a syringe pump for suctioning and discharging the standard solution, and a solution introduction unit having a standard solution nebulizer and a standard solution spray chamber that are supplied with the standard solution, the standard solution is directly supplied to the standard solution nebulizer at a flow rate of 3 ?L/min or less.

Abstract: A mass spectrometer provided with an ionization chamber (10) in which ionization is performed on a sample by laser ionization, includes an opening part (12) that is provided on a side wall of the ionization chamber (10), and includes a door (13); a ventilation port (14) provided in a wall of the ionization chamber (10), which is opposite to the opening port (12); and a gas supplier (64), (67) for supplying high-pressure cleaning gas to the ionization chamber (10) through the ventilation port (14). In this configuration, the high-pressure cleaning gas flows into the ionization chamber (10) from the gas supplier (64), (67) while the door (13) is opened, thereby blowing up particles including fragments of bacterial cells, which are piled up on a floor of the ionization chamber (10), and/or sweeping particles floating near the floor, so as to discharge the particles to the outside.

Abstract: The disclosure features mass spectrometry systems and methods that include an ion source, an ion trap, a detector subsystem featuring first and second detector elements, and a controller electrically connected to the ion source, the ion trap, and the detector subsystem and configured so that during operation of the system, the controller: applies an electrical signal to the ion source to generate positively and negatively charged particles from sample particles in the system; applies an electrical signal to the ion trap to eject a plurality of particles from the ion trap through a common aperture of the ion trap, and determines information about the sample particles based on first and second electrical signals generated by the ejected particles.

Abstract: A method for improving the beam current for certain ion beams, and particularly germanium and argon, is disclosed. The use of argon as a second gas has been shown to improve the ionization of germane, allowing the formation of a germanium ion beam of sufficient beam current without the use of a halogen. Additionally, the use of germane as a second gas has been shown to improve the beam current of an argon ion beam.

Abstract: An ionization method for use with mass spectrometry or ion mobility spectrometry is a small molecule compound(s) as a matrix into which is incorporated analyte. The matrix has attributes of sublimation or evaporation when placed in vacuum at or near room temperature and produces both positive and negative charges. Placing the sample into a region of sub-atmospheric pressure, the region being in fluid communication with the vacuum of the mass spectrometer or ion mobility spectrometer, produces gas-phase ions of the analyte for mass-to-charge or drift-time analysis without use of a laser, high voltage, particle bombardment, or a heated ion transfer region. This matrix and vacuum assisted ionization process can operate from atmosphere or vacuum and produces ions from large (e.g. proteins) and small molecules (e.g. drugs) with charge states similar to those observed in electrospray ionization.

Abstract: An ion trap device is disclosed with a method of manufacturing thereof including a substrate, first and second RF electrode rails, first and second DC electrodes on either upper or lower side of substrate, and a laser penetration passage connected to ion trapping zone from outer side of the first or second side of substrate. The substrate includes ion trapping zone in space defined by first and second sides of substrate separated by a distance with reference to width direction of ion trap device. The first and second RF electrode rails are arranged in parallel longitudinally of ion trap device. The first RF electrode is arranged on upper side of first side, the second DC electrode is arranged on lower side of first side, the first DC electrode is arranged on upper side of second side, and the second RF electrode rail is arranged on lower side of second side.