Abstract: Inspection method, apparatus, and system for a circuit pattern, in which when various conditions which are necessary in case of inspecting a fine circuit pattern by using an image formed by irradiating white light, a laser beam, or a charged particle beam are set, its operating efficiency can be improved. An inspection target region of an inspection-subject substrate is displayed, and a designated map picture plane and an image of an optical microscope or an electron beam microscope of a designated region are displayed in parallel, thereby enabling a defect distribution and a defect image to be simultaneously seen. Item names of inspecting conditions and a picture plane to display, input, or instruct the contents of the inspecting conditions are integrated, those contents are overlapped to the picture plane and layer-displayed, and all of the item names are displayed in parallel in a tab format in the upper portion of the picture plane of the contents.

Abstract: In an optical connector structured having an optical connector ferrule accommodated in a housing urged towards the butt connection direction by an urging means, a technology is developed wherein the application of an external sideways force to the optical connector ferrule in a connected state is prevented, and the connected state is stably maintained. An optical connector 20 is provided wherein a positioning support part 24 which accommodates and supports a freely detachably a stop guard 26, which projects from the optical fiber ferrule 2, is provided in a housing 21; when this optical connector ferrule 2 is moved towards the butt connection direction, the stop guard is accommodated in the positioning support part 24 and positioned and supported; and when this stop guard 26 is released from the positioning support part 24, floating of the optical connector ferrule 2 in the housing 2 is permitted.