Abstract: A memory cell configuration includes first memory cells with planar MOS transistors and second memory cells with vertical MOS transistors. The planar MOS transistors are disposed on the bottom of and on the crown of parallel, strip-like trenches. The vertical MOS transistors are disposed on the side walls of the trenches. The memory cell configuration can be produced with a mean area requirement for each memory cell of 1 F2, where F is the minimum structure size.
Type:
Grant
Filed:
June 10, 1998
Date of Patent:
January 30, 2001
Assignee:
Infineon Technologies AG
Inventors:
Wolfgang Krautschneider, Franz Hofmann, Wolfgang Roesner