Abstract: A robotic arm is for holding a molding item. The robotic arm includes a mount; a lifting mechanism mounted to the mount; a horizontal driving device; a rotating assembly mounted between the lifting mechanism and the horizontal driving device to rotate the horizontal driving device relative to the lifting mechanism; a holder for holding the molding item, the holder mounted on the horizontal driving device. The lifting mechanism cause the holder to move relative to the mount in a first direction, the horizontal driving device moves the holder relative to the mount and the lifting mechanism in a second direction perpendicular to the first direction.

Abstract: An apparatus for arranging disks in a processing cassette includes a first conveyor configured to transfer a shipping cassette containing a plurality of disks to a first position and a comb assembly configured to displace one or more of the plurality of disks from the shipping cassette in the first position. A mandrel assembly is configured to remove the one or more displaced disks from the comb assembly and a turntable assembly is configured to rotate the comb assembly and the shipping cassette from the first position to a second position. The mandrel assembly is further configured to return the one or more displaced disks to the comb assembly and the comb assembly is further configured to replace the one or more displaced disks in the shipping cassette in the second position.

Abstract: Processing chambers (3A-3F) for applying a process to a substrate W housed therein are provided at a periphery of a conveying chamber 2. A conveying case (4) houses the substrate (W) in a state isolated from an outside atmosphere. The conveyance case (4) has a gate valve (30) and a transfer mechanism (22). A conveying mechanism (5) supports the conveyance case 4, and carries the conveyance case (4) to a position for conveying in/conveying out a substrate. The number of processing chambers connectable to a conveying chamber is not limited, and conveyance to the processing chamber can be executed while maintaining a predetermined ambience for an atmosphere of a substrate that is to be processed.