Abstract: A planar micro-motor has a stator supported by a substrate and comprising a planar array of radially extending circumferentially spaced bifilar micro-coils. The micro-motor also has a rotor comprising a rotor body supporting a plurality of elongate, radially extending members or regions circumferentially spaced in a second plane parallel to the plane of the bifilar micro-coils. The radial members are magnetic or otherwise responsive to electromagnetic fields generated by the stator to rotate the rotor. Energizing means selectively energizes subsets of the bifilar micro-coils to generate the electromagnetic fields acting on the magnetic regions of the rotor such that the amount and direction of rotation of the rotor can be controlled. The planar micro-motor can be employed as a gearless stepper motor and can be fabricated using generally known microfabrication techniques.