Patents Examined by Nam X Ngueyn
  • Encapsulated and water cooled electromagnet array
    Patent number: 7846310
    Abstract: A electromagnet array structure including multiple electromagnetic coils captured in a rigid encapsulant, for example, of cured epoxy resin, to form a unitary free-standing structure which can be placed around the walls of a plasma processing chamber. A liquid cooling coil may also be captured in the encapsulant between the electromagnetic coils. The structure may additionally include water fittings, locating pins, through tubes for chamber bolts, and lifting brackets.
    Type: Grant
    Filed: December 13, 2006
    Date of Patent: December 7, 2010
    Assignee: Applied Materials, Inc.
    Inventors: Andrew Gillard, Anthony Vesci, Keith A. Miller