Patents Examined by Nguyen Nam
  • Patent number: 5259942
    Abstract: A device for transferring a workpiece into and out from a vacuum chamber including a first device for receiving and holding the workpiece in a disk-shaped conveyor within the chamber and a second device for lifting and supporting the first device during the transfer process.
    Type: Grant
    Filed: June 5, 1992
    Date of Patent: November 9, 1993
    Assignee: Leybold Aktiengesellschaft
    Inventor: Stefan Kempf