Patents Examined by Nicole Blan
  • Patent number: 11926891
    Abstract: A cleaning method for removing a silicon-containing film deposited in a temperature-adjustable process container by a heater and a cooler includes: stabilizing a temperature in the process container to a cleaning temperature; and removing the silicon-containing film by supplying a cleaning gas into the process container stabilized at the cleaning temperature; wherein in the removing the silicon-containing film, a heating capability of the heater and a cooling capability of the cooler are controlled based on the temperature in the process container.
    Type: Grant
    Filed: December 17, 2021
    Date of Patent: March 12, 2024
    Assignee: Tokyo Electron Limited
    Inventor: Masami Oikawa
  • Patent number: 11878329
    Abstract: A method for cleaning a silicon wafer includes the steps of: supplying hydrofluoric acid onto a surface of the silicon wafer to treat the silicon wafer while rotating at a first rotational rate, stopping the supply of the hydrofluoric acid and shaking off hydrofluoric acid on the surface of the silicon wafer without supplying pure water onto the surface of the silicon wafer while rotating the silicon wafer at a second rotational rate which is the same as or faster than the first rotational rate, and supplying ozone water onto the surface of the silicon wafer to treat the silicon wafer after shaking the hydrofluoric acid off the surface while rotating at a third rotational rate which is faster than the second rotational rate. This method for cleaning a silicon wafer is capable of suppressing adhesion of water marks and particles and enhancing the wafer quality.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: January 23, 2024
    Assignee: SHIN-ETSU HANDOTAI CO., LTD.
    Inventors: Kensaku Igarashi, Tatsuo Abe
  • Patent number: 11858014
    Abstract: The method and system uses ultrasound (US) transducers in contact with an inboard surface underwater portions of marine vessels or structures. By first digitally generating disruptive, multi-frequency, interfering US waveform signals (complex waveforms, typically replicating a Bessel function) and then converting the signals into analog, the transducers generate disruptive, multi-frequency, interfering US waveforms through the underwater portions of the marine vessels and structures which waveforms disrupt unwanted marine growth on the water-side of the vessel or structure. The digital signals, and also the analog signals, are complex waveform signals, typically produced with a Bessel function. The US transducers are either circular membrane transducers or surface transducers. A computer processor coupled to a memory, generates the complex waveform signals fed to the US transducers.
    Type: Grant
    Filed: February 1, 2023
    Date of Patent: January 2, 2024
    Inventor: Isabela V. Perdomo
  • Patent number: 11833554
    Abstract: Systems and methods for the ultrasonic disruption of biofilm and algae growth on underwater structures utilize an ultrasonic actuator that produces a natural frequency in the ultrasonic range. In some embodiments, the ultrasonic actuator includes one or more piezoelectric transducers.
    Type: Grant
    Filed: November 3, 2022
    Date of Patent: December 5, 2023
    Assignee: UNIVERSITY OF HOUSTON SYSTEM
    Inventors: Gangbing Song, Siu Chun Michael Ho, Devendra Patil
  • Patent number: 11814983
    Abstract: A method for stripping a coating off of a blade includes discharging liquid nitrogen through a nozzle onto the blade at a coating to cause lifting of the coating from a substrate of the blade and traversing the nozzle along the blade to cause peeling of the coating off of the substrate of the blade as the nozzle traverses the blade.
    Type: Grant
    Filed: May 27, 2022
    Date of Patent: November 14, 2023
    Assignee: RTX Corporation
    Inventors: Anthony G. Ruglio, George H. Reynolds, Gerard V. Cadieux, George Kenneth Spencer
  • Patent number: 11817311
    Abstract: According to one embodiment of the present disclosure, provided is a substrate cleaning method that performs an operation, in a state where a cleaning member is in contact with a rotating substrate, the cleaning member is moved between a first position on the substrate and a second position close to an edge of the substrate, n times (n is an integer of 2 or more), wherein a controller, which controls a driver that moves the cleaning member, controls the driver to perform an edge cleaning step to perform cleaning of the substrate in a state where the cleaning member is in contact with the second position on the substrate for a predetermined period of time after the cleaning member reaches the second position at least in one operation of the first to the (n-1)th operations.
    Type: Grant
    Filed: February 6, 2020
    Date of Patent: November 14, 2023
    Assignee: EBARA CORPORATION
    Inventors: Tomoatsu Ishibashi, Hiroshi Ishikawa, Masumi Nishijima
  • Patent number: 11788034
    Abstract: The subject invention provides yeast-based products, as well as their use to improve industrial production and performance by, for example, efficiently cleaning contaminating and/or fouling substances such as FOG, biofilm, paraffin, and/or asphaltenes from industrial equipment.
    Type: Grant
    Filed: April 9, 2018
    Date of Patent: October 17, 2023
    Assignee: LOCUS SOLUTIONS IPCO, LLC
    Inventors: Sean Farmer, Ken Alibek
  • Patent number: 11767788
    Abstract: This invention relates to the field of induction cleaning, more particularly to chemically cleaning the induction system of the internal combustion engine. The carbon that accumulates within the induction tract of the internal combustion engine is very difficult to remove. Chemically these carbon deposits are very close to that of asphalt or bitumen. It has been found that if the induction cleaning chemicals are delivered in timed layered intervals the removal of such induction carbon can be accomplished. The Dual Solenoid Induction Cleaner uses electronically controlled solenoids to deliver at least two different chemistries in alternating layers to the engine's induction system. These electric solenoids are connected to a single induction cleaner nozzle. The induction cleaner nozzle is slipped through the vacuum port opening into the inside of the induction system where it will spray an aerosol of the chemistry directly into the moving air column entering the engine.
    Type: Grant
    Filed: June 26, 2020
    Date of Patent: September 26, 2023
    Assignee: ATS Chemical, LLC
    Inventors: Bernie C. Thompson, Neal R. Pederson
  • Patent number: 11756811
    Abstract: A device, mechanism, and methodology for regular and consistent cleaning of the vacuum aperture, nozzle, and contacting surfaces of a pick-and-place apparatus and the pick-up tools of automated or manual semiconductor device and die handling machines are disclosed. The cleaning material may include a cleaning pad layer with one or more intermediate layers that have predetermined characteristics, regular geometrical features, and/or an irregular surface morphology.
    Type: Grant
    Filed: July 2, 2019
    Date of Patent: September 12, 2023
    Assignee: International Test Solutions, LLC
    Inventors: Alan E. Humphrey, Bret A. Humphrey, Jerry J. Broz, Wayne C. Smith
  • Patent number: 11747742
    Abstract: An apparatus for removing a photoresist layer from at least one alignment mark of a wafer is provided. The apparatus includes a holder, a solvent dispenser, and a suction unit. The holder is used to support the wafer, wherein the alignment mark is formed in a peripheral region of the wafer. The solvent dispenser is used to spray a solvent onto the photoresist layer on the alignment mark of the wafer to generate a dissolved photoresist layer. The suction unit is used to remove the dissolved photoresist layer and the solvent from the wafer through exhausting.
    Type: Grant
    Filed: April 11, 2017
    Date of Patent: September 5, 2023
    Assignee: VISERA TECHNOLOGIES COMPANY LIMITED
    Inventors: Yuan-Chun Chao, Tian-Wen Liao, Wei-Chuan Chen, Yi-Chang Chang, Yu-Ming Tseng
  • Patent number: 11685487
    Abstract: An ultrasonic system for treating a submerged surface of a target structure, the system including: an ultrasonic generator for generating electrical energy to drive first and second ultrasonic transducers, the electrical energy including at least two different frequencies including a first and second operation frequency; first ultrasonic transducers configured to be mounted as a first array to the target structure, and connectable to the ultrasonic generator and operable to generate a first ultrasound signal from the first operation frequency; and second ultrasonic transducers configured to be mounted as a second array to the target structure, and connectable to the ultrasonic generator and operable to generate a second ultrasound signal from the second operation frequency, wherein the first and second ultrasonic transducers are spaceable from one another to produce guided ultrasonic waveforms through the target structure including heterodyned frequencies from the first ultrasound signal and the second ultras
    Type: Grant
    Filed: November 30, 2021
    Date of Patent: June 27, 2023
    Assignees: FLUID IMPACT TECHNOLOGIES CORPORATION, SOFCHEM
    Inventors: Hans Juerg Krause, Pierre-Olivier Jost
  • Patent number: 11679344
    Abstract: A cleaning system for cleaning a lamella plate settler includes at least one mechanical cleaning device; a suspension device adapted to suspend the mechanical cleaning device; wherein the suspension device includes a displacement device for lowering and raising the at least one mechanical cleaning device for mechanical cleaning of a lamella plate positioned below the cleaning system. By providing a frame supporting the at least one cleaning device; wheels attached to the frame and adapted to move on rails, the wheels including driving wheels and non-driving wheel, and a sensor, preferably an inductive sensor, adapted to sense the rotational position of the driving wheels, the lamella plate settler can be automatically be cleaned without emptying the basin of water, thus allowing cleaning during operation. A lamella plate settler and a method of cleaning a lamella plate are also provided.
    Type: Grant
    Filed: May 8, 2019
    Date of Patent: June 20, 2023
    Assignee: NORDIC WATER PRODUCTS AB
    Inventors: Lars Apelqvist, Daniel Jansson
  • Patent number: 11651953
    Abstract: According to one embodiment, a method including supplying a liquid onto a substrate, solidifying the liquid on the substrate to form a solidified body, and melting the solidified body of the liquid on the substrate is provided. When solidifying the liquid, an internal pressure of the liquid on the substrate is varied.
    Type: Grant
    Filed: June 17, 2020
    Date of Patent: May 16, 2023
    Assignee: Kioxia Corporation
    Inventors: Minako Inukai, Hideaki Sakurai, Kyo Otsubo, Tetsuo Takemoto
  • Patent number: 11633788
    Abstract: The present disclosure relates to a method and apparatus for cleaning a 3D printed article, in particular a 3D printed heat exchanger. After 3D printing, an article may have internal passages formed from bonded powder and said passages may contain unbonded powder that needs to be removed before further use of/processing of the article. To remove this unbonded powder, the article is filled with a cleaning fluid and vibrated. The cleaning fluid is then pumped out of the article and past a sensor that generates a magnetic field. The sensor detects the presence of powder particles in the fluid by detecting a perturbation of the magnetic field caused by said particles. The fluid is then filtered and returned to a reservoir for use. The sensor may indicate the article is sufficiently clean when a detected concentration of particles in the fluid drops below a threshold.
    Type: Grant
    Filed: March 20, 2020
    Date of Patent: April 25, 2023
    Assignee: HS MARSTON AEROSPACE LIMITED
    Inventor: Paul Phillips
  • Patent number: 11621175
    Abstract: A method for removing particles from a semiconductor wafer surface is disclosed. A wafer is being spun on a spin coater contained within a condensing environment. Liquid vapor is then infused into the condensing environment to allow some of the liquid vapor to be condensed onto a surface of the wafer on which particles may adhere while the wafer is being spun. Next, a set of light pulses is applied to the surface of the spinning wafer. Finally, an electric grid is utilized to remove the particles off the surface of the wafer.
    Type: Grant
    Filed: December 3, 2021
    Date of Patent: April 4, 2023
    Assignee: PulseForge Inc.
    Inventors: David Alex Rose, Kurt A. Schroder
  • Patent number: 11612173
    Abstract: A system for automatically cleaning and washing an ice cream machines includes a liquid container for storing raw materials; a freezing cylinder connected with the liquid container through a cleaning pathway; a water tank for storing rinse water to rinse the freezing cylinder and the cleaning pathway; a detergent tank for storing detergents to clean and wash the freezing cylinder and the cleaning pathway; a pump arranged on the cleaning pathway to selectively pump the raw material, the rinse water or the detergent; and a control panel adapted to control an on/off and cleaning.
    Type: Grant
    Filed: May 10, 2021
    Date of Patent: March 28, 2023
    Inventor: Lingyu Dong
  • Patent number: 11607856
    Abstract: A microporous membrane wipe and a method of using such microporous membrane wipe are disclosed. The microporous membrane wipe may be uniaxially or biaxially oriented microporous membrane. The uniaxially or biaxially oriented microporous membrane may be made from one or more block and/or impact copolymers of polyethylene and/or polypropylene. A method of using such a microporous membrane wipe for skin oil blotting is also disclosed. Further disclosed is a method of using such a microporous membrane wipe for cleaning a surface for the removal of fingerprints, smudges and the like, where such surfaces may include, for example, eyeglasses, electronics, cell phones, displays, optical devices, camera lenses, microscope lenses and other precision optics, and/or the like.
    Type: Grant
    Filed: October 16, 2014
    Date of Patent: March 21, 2023
    Assignee: Celgard, LLC
    Inventors: Kristoffer K. Stokes, Karl F. Humiston, Changqing Wang Adams, William John Mason
  • Patent number: 11583900
    Abstract: The method and system uses ultrasound (US) transducers in contact with an inboard surface underwater portions of marine vessels or structures. By first digitally generating disruptive, multi-frequency, interfering US waveform signals (complex waveforms, typically replicating a Bessel function) and then converting the signals into analog, the transducers generate disruptive, multi-frequency, interfering US waveforms through the underwater portions of the marine vessels and structures which waveforms disrupt unwanted marine growth on the water-side of the vessel or structure. The digital signals, and also the analog signals, are complex waveform signals, typically produced with a Bessel function. The US transducers are either circular membrane transducers or surface transducers. A computer processor coupled to a memory, generates the complex waveform signals fed to the US transducers.
    Type: Grant
    Filed: January 22, 2020
    Date of Patent: February 21, 2023
    Inventor: Isabela V. Perdomo
  • Patent number: 11549060
    Abstract: An apparatus for raising and lowering a cutting tool within a decoking drum, a decoking system and a method of raising and lowering a decoking system cutting tool. Instead of using metallic ropes, chains, or a self-propelled gear-based approach, non-metallic belts are secured at respective ends to a crosshead and one or more counterweights to enable vertical movement of the crosshead that in turn permits vertical movement of the cutting tool throughout the height of the drum. A motorized pulley system controls the movement of the belt, and preferably avoids having the motor be carried by the crosshead. The belts on each pulley are preferably arranged as cooperative sets so that within each set, both primary load belts and secondary load belts are present.
    Type: Grant
    Filed: May 7, 2021
    Date of Patent: January 10, 2023
    Assignee: Flowserve Management Company
    Inventors: Daniel O. Arzuaga, Hrishikesh Raghunath Gadre
  • Patent number: 11547267
    Abstract: A condition warning system for an apparatus such as a pot and pan washing machine, a control system and control methods for a pot and pan washing machine are provided. The condition warning system includes a control system that monitors operational, safety or compliance parameters of an apparatus, and a light that illuminates a location below (or above) an operator's direct line of sight, and which is outside of the operator's direct line of sight. The control system and control methods include a punitive wash action lockout, an extended wash cycle time, and a deep clean wash cycle.
    Type: Grant
    Filed: November 5, 2018
    Date of Patent: January 10, 2023
    Assignee: UNIFIED BRANDS, INC.
    Inventors: John Cantrell, Mark Churchill