Abstract: An ultraviolet light generating target 20 includes a substrate 21 made of sapphire, quartz or rock crystal; and a Pr:LuAG polycrystalline film 22, provided on the substrate 21, that generates ultraviolet light upon receiving an electron beam. By using a Pr:LuAG polycrystal as the target, the ultraviolet light generating efficiency can be increased more remarkably than when a Pr:LuAG single crystal film is used.

Abstract: A scan head assembled to a scan arm for an ion implanter and a scan arm using the same are provided, wherein the scan head is capable of micro tilting a work piece and comprises a case, a shaft assembly, an electrostatic chuck, a first driving mechanism and a micro-tilt mechanism. The shaft assembly passes through a first side of the case and has a twist axis. The electrostatic chuck is fastened on a first end of the shaft assembly outside the case for holding the work piece. The first driving mechanism is disposed within the case and capable of driving the shaft assembly and the ESC to rotate about the twist axis. The micro-tilt mechanism is disposed within the case and capable of driving the shaft assembly and the ESC to tilt relative to the case.

Abstract: In one aspect, methods of nanopore formation in solid state membranes are described herein, In some embodiments, a method of forming an aperture comprises providing at least one solid state membrane in a chamber, selecting a first dose of ions sufficient to provide a first aperture of predetermined diameter through the membrane and exposing a surface of the membrane at a first location to the first dose of ions in a focused ion beam having a focal point of diameter less than or equal to about 1 nm to remove material from the membrane at the first location thereby providing the first aperture having the predetermined diameter or substantially the predetermined diameter.

Abstract: The present invention relates to mass spectrometry and infrared spectrometry and in particular, to a method of providing highly resolved infrared spectra of mass-selected, complex (e.g., biopolymer, polypeptide, organic chemical, an organometallic compound, a carbohydrate, a polynucleotide or oligonucleotide compound) ions to be obtained in a general fashion.

Abstract: A focused ion beam apparatus includes a lens interferometer configured to detect a relative position of an ion beam column and a sample. An image forming section includes an irradiation position specifying section configured to specify an irradiation position of an ion beam based on the detected relative position of the ion beam column and the sample, and a luminance setting section configured to set luminance of a pixel of an observation image based on the specified irradiation position of the ion beam and a detected amount of secondary particles.

Abstract: A method for detecting defects includes irradiating at least one electron beam into a first region of a substrate, irradiating at least one electron beam into a second region electrically connected to the first region, and detecting secondary electrons emitted from the second region. The electron beam irradiated into the first region may be the same or different from the electron beam irradiated into the second region. Alternatively, different beams may be simultaneously irradiated into the first and second regions. An image generated based on the secondary electrons shows a defect in the substrate as a region having a grayscale difference with other regions in the image.

Abstract: The present disclosure relates to a method and a system for generating low-energy electrons in a biological material. The biological material is held in position by a support. Laser beam pulses are directed by a focusing mechanism toward a region of interest within the biological material. This generates filaments of low-energy electrons within the region of interest. The method and system may be used for radiotherapy, radiochemistry, sterilization, nanoparticle coating, nanoparticle generation, and like uses.

Abstract: An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.

Abstract: A high-accuracy and high-speed lithographic pattern is acquired by forming a square lattice matrix beam group with an interval which is an integral multiple of a beam size in a two-dimensional plane, switching on and off the mesh of a device to be drawn by a bitmap signal, forming a desired beam shape, deflecting the beam to a necessary position, and radiating a beam with a whole blanker being opened after the beam state is stabilized. On and off signals and a vector scan signal of each beam are provided, and the whole blanker is released after the beam is stabilized, and thus high-accuracy and high-speed lithography is performed with a small amount of data. When the total number of shots exceeds a constant value, the pattern data are modified and high-speed lithography is achieved. A semiconductor reversed bias p-n junction technique is preferably used for an individual blanker electrode.

Abstract: Some aspects of the invention may be related to an ultraviolet (UV) water disinfection system and a method of assembling such system. The system may be designed to treat, inactivate, disintegrate and/or remove at least two predetermined different types of contaminations. The system may include a chamber to carry the water containing the predetermined types of contaminations. The system may further include one or more first-type UV lamps having a first UV emission spectrum and one or more second-type UV lamps having a second UV emission spectrum different than the first spectrum. A location of the one or more first-type UV lamps and the one or more second-type UV lamps may be determined such that a combined UV impact function matches with a combined sensitivity response function of the two or more predetermined different types of contaminations in the water each having a different response function.

Abstract: A settling time acquisition method includes writing at least one reference pattern formed by at least one shot of a charged particle beam, writing an evaluation pattern, which has been formed by combination of the first and second shots of a charged particle beam shaped to first and second patterns of different sizes and whose width size is the same as that of the reference pattern, while changing, concerning beam shaping of the second shot, a settling time of a DAC amplifier, wherein writing is performed for each settling time, measuring the width size of the reference pattern, measuring the width size of the evaluation pattern for each settling time, calculating, for each settling time, a difference between the width sizes of the reference and evaluation patterns, and acquiring a settling time from each settling time of the DAC amplifier when the difference is not exceeding a threshold value.

Abstract: Mass spectrometers ionize samples by matrix-assisted laser desorption (MALDI). The samples are located on a moveable support plate, and irradiated by a pulsed laser. A fast positional control of laser spots is provided via a system of rotatable mirrors to relieve strain on a support plate motion drive. If the spot position is finely adjusted by the mirror system and follows the movement of the sample support plate, the intermittent movement of the sample support can be replaced with a continuous uniform motion. The fast positional control allows more uniform ablation of a sample area. Galvo mirrors with low inertia may be used between the beam generation and a Kepler telescope in the housing of the laser. The positional control can also provide a fully automatic adjustment of MALDI time-of-flight mass spectrometers, at least if the ion-optical elements are equipped with movement devices.

Abstract: A radiation source for generating EUV from a stream of molten fuel droplets by LPP (Laser Produced Plasma) or (Dual Laser Plasma) has a fuel droplet generator arranged to provide a stream of droplets of fuel and at least one laser configured to vaporize at least some of the droplets of fuel, whereby radiation is generated. The fuel droplet generator has a nozzle, a feed chamber, and a reservoir, with a pumping device arranged to supply a flow of fuel in molten state from the reservoir through the feed chamber and out of the nozzle as a stream of droplets. The feed chamber has an outer face in contact with a drive cavity filled with a liquid, and the liquid is driven to oscillate by a vibrator with the oscillation transmissible to the molten fuel in the feed chamber from the outer face of the feed chamber through the liquid.

Abstract: The invention relates to a method for realizing a vacuum in at least one vacuum chamber. The method comprises providing an arrangement comprising a plurality of vacuum chambers, wherein each vacuum chamber is connected to a shared vacuum system. The shared vacuum system comprises a plurality of turbo molecular pumps, at least one common fore pump, and a piping system comprising one or more pipes for connecting the at least one common fore pump to each of the plurality of turbo molecular pumps. Each turbo molecular pump is separately connected to a corresponding vacuum chamber. The piping system further comprises flow regulators for controlling a flow within the piping system. The method further comprises selecting at least one vacuum chamber for pump-down, and separately pumping down the at least one selected vacuum chamber by means of the shared vacuum system.

Abstract: A method for transmitting ions entrained in a flowing carrier gas into and through a gap defined by a pair of mutually facing curved electrodes comprises: inputting the ions and flowing gas into the gap through an ion inlet orifice of a first one of the pair of electrodes, the ion inlet orifice comprising an orifice wall, an orifice inlet end and an orifice outlet end, the orifice wall being smoothly convexly curved between the inlet end and the outlet end, wherein a width of the gap and a flow rate of the carrier gas through the ion inlet orifice and gap are such that the gas flow is laminar within the ion inlet orifice and gap.

Abstract: The invention relates to a method for the detection of incorrect deposition on a MALDI sample support with several separate sample sites, where after the preparation on the sample support, an area located between two sample sites is sampled with a desorption laser, and a signal of an ion detector in a mass spectrometer is acquired in temporal relation to the sampling. The signal is examined for the presence of a signal which indicates incorrect deposition. An advantage of the method is particularly that it can be carried out using a MALDI ion source and a connected mass analyzer, and that it requires little procedural effort.

Abstract: Electromagnetic radiation barriers and waveguides, including barriers and waveguides for light, are disclosed. The barriers and waveguides are fabricated by directing charged particles, for example, ions, into crystalline substrates, for example, single-crystal sapphire substrates, to modify the crystal structure and produce a region of varying refractive index. These substrates are then heated to temperatures greater than 200 degrees C. to stabilize the modified crystal structure and provide the barrier to electromagnetic radiation. Since the treatment stabilizes the crystal structure at elevated temperature, for example, above 500 degrees C. or above 1000 degrees C., the barriers and waveguides disclosed are uniquely adapted for use in detecting conditions in harsh environments, for example, at greater than 200 degrees C. Sensors, systems for using sensors, and methods for fabricating barriers and waveguides are also disclosed.

Abstract: A regenerative ring resonator in the path of a light beam includes a discharge chamber having electrodes and a gain medium between the electrodes; an optical coupler that is partially reflective so that at least a portion of a light beam impinging on the optical coupler from the discharge chamber is reflected back through the discharge chamber and at least a portion of the light beam impinging on the optical coupler from the discharge chamber is transmitted through the optical coupler; and an attenuation optical system in the path of the light beam within the resonator, the attenuation optical system having a plurality of distinct attenuation states, with each attenuation state defining a distinct attenuation factor applied to the light beam to provide adjustment of an energy of the light beam.

Abstract: An EMI shielding composite film for use in printed circuit boards has at least two layers, a top layer electrically conductive in all directions (isotropic), and a bottom layer electrically conductive only in the Z (thickness) direction (anisotropic) after thermo-compression. The bottom layer is in contact with the grounding pads of the circuitry of the electronic device to be shielded. The conductive top layer functions similarly to metallic boxes to prevent the electromagnetic radiation from both entering the boxes and escaping into the environment. The bottom layer interconnects the top conductive layer to the grounding pads on the PCB after thermo-compression so that electromagnetic waves collected by the top layer are directed and released to PCB grounding pads through the bottom layer.

Abstract: An ion transfer tube for a mass spectrometer comprises a core member and a first jacket tube member at least partially enclosing the core member and providing one or more channels therethrough. A method of forming an ion transfer tube, comprises: providing a first jacket tube member having a length and an internal bore, the internal bore passing along the length and defining an interior surface of circular cross section; removing at least one portion of the first jacket tube member adjacent to the interior surface so as to form at least one groove, channel, slot, recess or embayment of or in the interior surface; and providing a core member within the bore of the jacket tube member such that remnant portions of the interior surface of circular cross section mate against portions of an exterior surface of the core member.