Abstract: An electrostatic chuck assembly includes a ceramic body having a wafer placement surface that is a circular surface, and an F/R placement surface that is formed around the wafer placement surface and is positioned at a lower level than the wafer placement surface, a wafer attraction electrode embedded inside the ceramic body and positioned in a facing relation to the wafer placement surface, an F/R attraction electrode embedded inside the ceramic body and positioned in a facing relation to the F/R placement surface, a concave-convex region formed in the F/R placement surface to hold gas, a focus ring placed on the F/R placement surface, and a pair of elastic annular sealing members arranged between the F/R placement surface and the focus ring on the inner peripheral side and the outer peripheral side of the F/R placement surface, and surrounding the concave-convex region in a sandwiching relation.

Abstract: Systems and methods for plasma processing are disclosed. A method includes applying pulsed power to a plasma processing chamber with an excitation source during a first processing step with a first duty cycle and applying, during the first processing step, an asymmetric periodic voltage waveform to a substrate support to produce a first plasma sheath voltage between a substrate and a plasma. Pulsed power is applied to the plasma processing chamber with the excitation source during a second processing step with a second duty cycle and during the second processing step, a different asymmetric periodic voltage waveform is applied to the substrate support to produce a different plasma sheath voltage between the substrate and the plasma.

Abstract: A lighting circuit turns on multiple semiconductor light sources. Multiple current sources are each coupled in series with a corresponding one from among the semiconductor light sources. A switching converter supplies a driving voltage VOUT across each of multiple series connection circuits formed of the multiple semiconductor light sources and the multiple current sources. A converter controller controls a switching transistor of the switching converter based on a relation between a voltage across one from among the multiple current sources and a reference voltage having a positive correlation with the temperature Tj.

Abstract: In various embodiments, a switched-mode power supply is provided. The switched-mode power supply includes at least two output stages. Each output stage has a converter. A frequency of at least one of the output stages is modulated by way of a modulation unit configured to provide a modulation signal that is combined with a switching signal for driving a switching element of the converter of the at least one output stage.

Abstract: The present disclosure relates to a brightness adjustment method and device, and a storage medium. The method can include detecting a brightness of an environment where a mobile terminal is located to acquire a brightness value. When a decrease of the brightness value acquired at a present moment relative to the brightness value acquired at a previous moment reaches a first preset value, a radar wave is transmitted, and an echo of the radar wave is detected. The method determines whether there is an occlusion causing the decrease of the acquired brightness value according to a transmitting parameter of the radar wave and an echo parameter of the echo. When there is no occlusion, display brightness of the mobile terminal is adjusted according to the brightness value acquired at the present moment. When the occlusion is present, the display brightness of the mobile terminal at the present moment is maintained.

Abstract: A light-emitting device includes an emission array including a plurality of light-emitting elements and a partition wall. The emission array includes a first region and a second region adjacent to each other. The partition wall is configured to isolate the first region and the second region from each other, such that the partition wall at least partially defines the first region in the emission array. The first region is associated with a first emission factor and the second region is associated with a second emission factor, the second emission factor different from the first emission factor.

Abstract: An antenna assembly includes a plurality of antenna elements, a microstrip feed network that is configured to supply power to the plurality of antenna elements, and one or more resistors disposed within the microstrip feed network proximate to one or more of the plurality of antenna elements. The resistors are configured to control sidelobes of the antenna assembly.

Abstract: A visible light sensor may be configured to sense environmental characteristics of a space using an image of the space. The visible light sensor may be controlled in one or more modes, including a daylight glare sensor mode, a daylighting sensor mode, a color sensor mode, and/or an occupancy/vacancy sensor mode. In the daylight glare sensor mode, the visible light sensor may be configured to decrease or eliminate glare within a space. In the daylighting sensor mode and the color sensor mode, the visible light sensor may be configured to provide a preferred amount of light and color temperature, respectively, within the space. In the occupancy/vacancy sensor mode, the visible light sensor may be configured to detect an occupancy/vacancy condition within the space and adjust one or more control devices according to the occupation or vacancy of the space. The visible light sensor may be configured to protect the privacy of users within the space via software, a removable module, and/or a special sensor.

Abstract: One embodiment of the present disclosure provides an external detection see-through door of a cabinet that stores objects.

Abstract: A vehicle in-cabin lighting system includes: an outward gaze guiding section that is provided inside a vehicle cabin at a vehicle front side and at a vehicle width direction outer side of a vehicle seat, and that becomes brighter than its surroundings on activation of an outer side lighting device; and a control section that is configured to determine whether or not an occupant sifting on the vehicle seat has an interest in interacting with another occupant inside the vehicle cabin based on detection of operation of an operation section by the occupant or based on detection of a state of the occupant, and to activate the outer side lighting device so as to make the outward gaze guiding section brighter in a case in which determination is made that there is no interest in interacting.

Abstract: Embodiments of a plug for use in an electrostatic chuck are provided herein. In some embodiments, a plug for use in an electrostatic chuck includes a polymer sleeve having a central opening; and a core disposed in the central opening of the polymer sleeve, the core having a central protrusion and a peripheral ledge, wherein an outer surface of the core includes a helical channel extending from a lower surface of the core towards the peripheral ledge to at least partially define a gas flow path through the plug, and wherein the peripheral ledge is disposed between an upper surface of the polymer sleeve and the lower surface of the core.

Abstract: A plasma etching method and a semiconductor device fabrication method, the plasma etching method including providing a source power having a first single pulse to an electrostatic chuck in order to generate a plasma on a substrate; providing a first bias power having a burst pulse different from the first single pulse to concentrate the plasma on the substrate; and providing a second bias power having a second single pulse the same as the first single pulse to accelerate the plasma toward the substrate.

Abstract: A power converter is capable to convert an electrical input power into a bipolar output power and to deliver the bipolar output power to at least two independent plasma processing chambers. The power converter includes: a power input port for connection to an electrical power delivering grid, at least two, preferably more than two, power output ports each for connection to one of the plasma process chambers, and a controller configured to control the power converter to deliver the bipolar output power to the power output ports, using one or more control parameters selected from a list comprising: power, voltage, current, excitation frequency, and threshold for protective measures, such that at least one of the control parameters at a first power output port is different from the corresponding control parameter at a different power output port.

Abstract: In a disclosed inspection method, a substrate and an edge ring are placed on first and second regions, respectively. A first inspection circuit is connected to the substrate. The first inspection circuit has impedance. A second inspection circuit is connected to the edge ring. The second inspection circuit has impedance. A first electrical bias and a second electrical bias having a common bias frequency are applied to a first electrode in the first region and a second electrode in the second region, respectively. A voltage waveform of the substrate and a voltage waveform of the edge ring is acquired by using a waveform monitor.

Abstract: A luminous device includes a luminous module. The luminous module includes a plurality of LED chips, a driving chip and a package body. The driving chip is configured to selectively drive the LED chips to emit light. The driving chip includes a power pad, a plurality of LED pads corresponding to the plurality of LED chips respectively and a ground pad. The driving chip receives a power signal having a selecting signal and a luminous signal by the power pin, and determines the LED chips to emit light according to the luminous signal or not based on the selecting signal. The luminous device uses the power signal of selecting the LED chip as the driving power for driving the LED chips to emit light in the same time. The luminous device not only reduces the volume, but also saves the cost.

Abstract: A power management system for a lighting circuit may include a grid shifting controller that includes a processor and a connection to an external power source. The power management system may also include a communication interface associated with the grid shifting controller. The grid shifting controller may be configured to provide control information to a processor of at least one grid shifting electrical fixture over the communication interface, the control information being configured to direct the at least one grid shifting electrical fixture on the use of power from the external power source and an energy storage device associated with the at least one grid shifting electrical fixture.

Abstract: A controller circuit for a set of light emitting diodes (LEDs) includes a linear current source, channel circuitry, and supervisor circuitry. The linear current source is configured to regulate a first current from a supply along a first series path to the set of LEDs. The channel circuitry is configured to control a second current from the supply along a second series path to the set of LEDs, the second series path being in parallel with the first series path and the second series path comprising a drop element coupled in series with the supply and the set of LEDs. The supervisor circuitry is configured to regulate a total current supplied to the set of LEDs using the linear current source and the channel circuitry, the total current comprising the first current and the second current.

Abstract: There is provision of a stage including a base; a substrate mount section provided above an upper surface of the base; an annular member mount section provided above the upper surface of the base, so as to surround a periphery of the substrate mount section; a first bonding layer bonding the base and the substrate mount section; a second bonding layer bonding the base and the annular member mount section; an annular member disposed on the annular member mount section; and a sealing member configured to protect the first bonding layer and the second bonding layer.

Abstract: In one embodiment, the present disclosure is directed to a method for impedance matching. A matching network includes a first reactance element and a second reactance element. A sensor detects a value related to the plasma chamber or the matching network, and a system parameter is determined based on the detected value. For the determined system parameter, an error-related value is calculated for each of a plurality of potential first reactance element positions or for each of a plurality of potential second reactance element positions. A new first reactance element position and a new second reactance element position are calculated based on the error-related values calculated in the prior step. The first reactance element and the second reactance element are then altered to their new positions to reduce a reflected power.

Abstract: A power controller configured to fit in a circuit breaker panel powering one or more loads. The power controller is further configured to dynamically manage critical loads of the one or more loads each controlled by a component that is capable of being actuated by the power controller and operated from a smartphone via the power controller, wherein the critical loads need not be wired to a dedicated circuit breaker panel.