Abstract: In a plasma enhanced chemical vapor processing apparatus first and second sets of electrodes are electrically insulated one from the other via the intermediary of a plurality of insulator bodies. Each of the insulator bodies includes a recessed portion for extending the electrical path length over the surface of the insulator to minimize shorting of the insulators in use. The recess in the insulator body is of generally L-shaped cross section including a radially inwardly directed recessed portion intersecting with an axially directed recess portion. The axially directed portion of the recess is shielded from the plasma discharge, thereby reducing the probability of deposition of conductive material thereon which could otherwise result in shorting of the insulator member. The axial recesses extend into the insulator body from opposite ends thereof.

Abstract: One fast cool-down furnace embodiment discloses a double wall in the interspace of which a cooling air stream is flowable to provide fast cool-down of a load of wafers. The double wall embodiment is retrofittable on existing diffusion furnace, and includes a cylindrical member aligned in concentric relation with the diffusion tube by combination plenum defining and supporting manifolds. In a second embodiment, the fast cool-down furnace includes a reaction vessel and a heating core relatively movable relative to each other in such a way that in a fast cool-down condition the core and reaction vessel are spaced apart. Cooling tubes are embedded in the movable core. Fans or other aids to cooling are provided. Operation is either in a controlled cool-down mode or in a quick quench mode.

Abstract: A method of processing an interlevel dielectric layer in a VLSI device having a plurality of leads which includes depositing a layer of photoresist over the dielectric layer. The photoresist is then patterned to open areas where interlevel contacts are to be formed and then heated to a sufficiently high temperature and for a sufficient time to remove solvents and obtain a desired slope surrounding the open areas. The photoresist and dielectric is etched to planarize the dielectric surface, to expose the underlying leads and to remove all of the photoresist.

Abstract: A process for the continuous production of a plastic sheet of high optical quality capable of being used in laminated glasses, having at least a thin layer resistant to scoring and abrasion which entails high-speed centrifugal spraying of a mixture of reaction components, onto a plane horizontal support carried in a uniform movement of advancement relative to the spraying.

Abstract: A vapor source for a vacuum-coating installation comprises a rotatably mounted vaporizing crucible, a drive motor and a device, preferably an electron beam gun, for heating the material to be vaporized, all arranged in one structural unit, movable as a whole in the coating installation. With this, the site of the vaporization for a given layer-thickness distribution can be selected optimally to correspond to the respective applications.

Abstract: Said device comprises among other things, a metallizing apparatus through which is made to pass the plastic film (15) whereon the metallizing layer is to be deposited, and a new oil-delivery unit (21) which deposits a layer of oil onto the areas of the film which are to remain non-metallized. The oil delivery unit (21) evaporator is positioned so that the thin layer of oil only adheres to the film in a clearly defined area. The oil has been selected with great care from those available for sale.

Abstract: Apparatus for producing a constant flow, constant pressure chemical vapor deposition includes a manifold having inlet valves for simultaneously switching equal flows of reactive and nonreactive gas between a process chamber and a vent chamber. A constant flow through the process chamber during a deposition is maintained by replacing each reactive gas flow with the equal nonreactive gas flow. Substantially equal pressures within each chamber are maintained by the substantially equal flows of gases. Any "dead space" within the manifold downstream of the inlet valves is minimized by use of a radial manifold. The nonreactive gas flows also purge the "dead space" of reactive gas that may linger after its flow is switched to the vent chamber.

Abstract: The present invention discloses multi-layered resist structures and methods of producing them which can be used in electronic device lithography to produce micrometer and submicrometer geometries.The resist structure comprises two or more layers at least one of which is a metallic material and at least one of which is a radiation-sensitive material. The metallic layer exhibits both a high atomic number and a high density. The metallic material is positioned relative to the radiation-sensitive polymeric material so that it can be used to control reflection and backscatter of radiation used to create a latent image within the radiation-sensitive polymeric material. The thickness of the metallic layer is determined by the amount of reflection desired and the amount of backscatter permitted into the layer of radiation-sensitive polymeric material.

Abstract: Apparatus, a method for extruding and expanding tubular products of polytetrafluoroethylene (PTFE) and the products produced thereby are provided. In the apparatus, at least one helical groove is placed in the wall of the extruder tip or die. Preferably, at least one groove is machined in the tip having a pitch angle of 45 degrees and at least one groove is machined in the die having a pitch opposite that (135 degrees) of the tip groove. In the expanded products produced according to the invention, at at least one radial position within the wall of a tube substantially all of the longitudinal axes of the nodes are oriented at an angle between about 85 degrees and about 15 degrees with respect to the longitudinal axis of the tube.

Abstract: A device for sealing a space between two adjacent surfaces comprises a seal holder, a flexible thin sheet-like member folded back on itself forming a deformed cylinder having a generally tear-drop shaped cross section, the two ends of the folded back sheet-like member being held and retained in close proximity by the seal holder to maintain the tear-drop shaped cross section with the seal holder being mounted on one surface relative to the other surface such that a portion of the deformed cylinder forms at least a line contact seal engagement with that surface.

Abstract: A process for the production of a multi-layer pipe to be used for formation of a bottle by draw-blow-forming, comprising forming by co-extrusion a pipe having inner and outer layers of a polyester composed mainly of ethylene terephthalate units and an intermediate layer of an oxygen-barrier resin interposed between the inner and outer layers, an adhesive resin layer is preferably interposed between every two adjacent layers. The co-extruded multi-layer pipe in the molten state so that the diameter of the pipe is sized is uniform. The process continues by cooling the outer portion of the molten multi-layer pipe by contact with water and simultaneously introducing an inert gas or an inert gas containing a water mist into the interior of the pipe to thereby cool the inner portion of the pipe and prevent oxidation in the pipe A.Multi-layer pipe prepared according to this process is excellent in the transparency and the draw-formability into a multi-layer drawn bottle.

Abstract: Color printing characterized by high color density and color contrast is provided by jetting an ink composition composed of an optically clear, phase change base material and a primary subtractive color dye which is soluble in the base material onto the surface of a printing medium to form a multiplicity of closely spaced color dots or spots arranged to define a line or character on the medium. Each dot consists of one or more well defined, optically clear, semitransparent color layers each of which has a different color so that the observed color of each dot is a true subtractive mixture of the colors in the layers. Specific ink compositions are also disclosed.

Abstract: The invention relates to a process and an apparatus for applying two or more colors of paint by applying a first paint to at least part of a substrate, followed by a second and, if desired, further different-colored paints to different parts of the substrate and hardening the applied coats of paint by baking, which comprises applying the second and if desired the further different-colored paints without interim baking of the first paint to the preselected different parts of the substrate using electrostatic atomization at stationary atomizer edges involving transport of the paint particles in an electric field and, after the first and subsequent paints have been applied, hardening all coats of paint together by baking.

Abstract: A photoresist process which comprises a process for spin-coating a substrate with a resist, a process for transferring a mask pattern onto the coated resist film followed by exposure, and a developing process for forming a pattern on the substrate after the pattern has been exposed. When the developed pattern of the resist pulsates with the increase or decrease of parameters in the process for applying resist, the value of the parameter is set to a value that corresponds to an extreme value of the pulsation.

Abstract: A coating system is disclosed comprising apparatus for coating webs comprising a rigid, elongated trough, a cylindrical applicator mounted for rotation about its axis within the trough, the trough having an arcuate upstream liquid retaining surface and an arcuate downstream liquid retaining surface substantially parallel to and closely spaced from the lower surface of the cylindrical applicator to define an arcuate coating zone, a manifold between the upstream liquid retaining surface and the downstream liquid retaining surface, the manifold extending substantially parallel to the axis of the cylindrical applicator, the arcuate downstream liquid retaining surface and the arcuate upstream liquid retaining surface extending from the manifold upwardly a sufficient distance along the periphery of the cylindrical applicator to retain most of any liquid in the coating zone, a wall at each end of the trough to retain the liquid in the coating zone, each of the walls being closely spaced from the adjacent end of the

Abstract: A coating apparatus comprising a composition feeder for delivering an unadjusted coating composition from a composition source 1 via a composition supply pipe 4, a solvent feeder unit for delivering a solvent from a solvent source 2, 3 via a solvent supply pipe 5, 6, a mixer 18 connected to the composition supply pipe 4 and to the solvent supply pipe 5, 6 for adjusting the viscosity of the coating composition, an applicator 19 for spraying the adjusted coating composition supplied from the mixer 18 and a temperature sensor 14 disposed in a coating booth 13, the solvent feeder unit being provided with a regulator 15 for controlling the supply of the solvent to a predetermined rate in response to a signal from the temperature sensor 14, the solvent feeder unit preferably comprising the two feeders for the high- and low-temperature solvent sources, the apparatus having the advantage that the amount of solvent to be admixed with an unadjusted coating composition can be automatically adjusted to a specified value

Abstract: A method for making a carbon-graphite component suited for use in an electrochemical cell, said component having a desired controlled pore structure having a desired mean pore size within a predetermined pore size range and a maximum pore size.

Abstract: A metal organic chemical vapor deposition reactor 10 which includes a flat plate flow channel gas delivery system 18. The gas delivery system comprises slotted rods 40, 42 which pass through an assembly 46 of seal plates 52 and gas directing plates 50. Gas directing plates 52 provide separate flow channels for reactant gases in rods 40 and 42. Reactants are directly jetted from the gas directing plates onto a substrate 20 prior to mixing.

Abstract: The present apparatus has a movable table with apertures therein. In each aperture there is loaded a carrier device and each carrier holds a substrate to be coated. The carriers are advanced in a step-like fashion to a loading position under a vertical hollow cylinder. When a carrier is in the loading position, a piston is moved upward, passing through the aperture, pushing the carrier into the hollow cylinder. Each carrier has an O-ring on its periphery and the O-ring is squeezed against the cylinder wall to form a seal. Each carrier pushes against the one above it to advance a column of carriers upward in the hollow cylinder. In this way, the carriers, and the substrates they hold, pass through the hollow cylinder. Along the cylinder there are vacuum stations which act to pump down and degas the substrates. The degassed substrates eventually emerge from the upper end of the cylinder into a vacuum chamber, whereat they are coated by sputtering, or the like.

Abstract: A method of producing paperboard and a paperboard structure wherein the grain lines of upper and lower chipboard panels are aligned at right angles in relation to the undulations formed in a midstratum layer to yield an overall panel assembly having a high degree of bending resistance.The invention also relates generally to a panel assembly having a particular novel layered construction. In place of a conventional solid chipboard laminated construction, an undulated midstratum layer is utilized in such manner that air cells or pockets are formed within the structure. An overlayer and an underlayer are adhesively applied to the undulated midstratum layer. The invention results in a panel assembly which may be much more economically manufactured while yielding superior end product strength and durability. The invention has widespread utility as a superior substitute for the currently used solid laminated chipboard design.