Abstract: Pressure swing adsorption separation of a feed gas mixture, to obtain a purified product gas of the less strongly adsorbed fraction of the feed gas mixture, is performed in a plurality of preferably an even number of adsorbent beds, with each adsorbent bed communicating at its product end directly to a variable volume expansion chamber, and at its feed end by directional valves to a feed compressor and an exhaust vacuum pump. For high frequency operation of the pressure swing adsorption cycle, a high surface area layered support is used for the adsorbent. The compressor and vacuum pump pistons may be integrated with the cycle, reciprocating at twice the cycle frequency. Alternative configurations of the layered adsorbent beds are disclosed.

Abstract: Disclosed is an apparatus for effectively treating waste gases which are discharged during a processing of manufacturing semiconductors. The apparatus for treating waste gases according to an embodiment of the present invention comprises a waste gases heating chamber, a waste gases collecting chamber, a waste gases collecting chamber cover, a scraping device for the waste gases collecting chamber cover, a scraping device for the waste gases collecting chamber, and a driving source for driving the scraping device for the waste gases collecting chamber cover, and the scraping device for the waste gases collecting chamber. The apparatus for treating waste gases further includes a cooling tube which is disposed on an outer surface of the waste gases collecting chamber, for cooling waste gases.

Abstract: A sorbent-based gas storage and dispensing system, including a storage and dispensing vessel containing a solid-phase physical sorbent medium having a sorbate gas physically adsorbed thereon. A chemisorbent material is provided in the vessel to chemisorb the impurities for gas phase removal thereof in the storage and dispensing vessel. Desorbed sorbate gas is discharged from the storage and dispensing vessel by a dispensing assembly coupled to the vessel. The chemisorbent may be provided in a capsule including an impurity-permeable, but sorbate gas-impermeable membrane, and installed in the vessel at the time of sorbent material loading. Semiconductor manufacturing processes and products manufactured by such processes are described.

Abstract: The present disclosure relates to systems and methods that use a hydrophobic medium to remove salt and moisture from the intake air of a gas turbine system. The disclosure also relates to systems and methods that use a two stage filtering process to remove particulate material, salt and moisture from the intake air of a gas turbine system. Particulate material is filtered from the intake air at a first stage air cleaner. Subsequently, salt and moisture are removed from the intake air at a second stage salt barrier located downstream from the first stage air cleaner. In certain embodiments, the second stage salt barrier uses a hydrophobic medium to remove salt and moisture from the intake air.

Abstract: A process is provided for the removal of trace amount of aromatic hydrocarbons from a waste feed gas stream comprising sulfur compounds and the aromatic hydrocarbons. An adsorption process employing an adsorbent such as a high silica zeolite adsorbent having a framework silica to alumina ratio greater than about 15 and having a pore size greater than about 6.2 Angstroms is used to remove from the feed gas mixture aromatic hydrocarbon contaminants and permit the recovery of a high purity sulfur product from the treated effluent stream. The adsorption zone comprises at least 2 adsorption beds wherein one of the first adsorption beds is operating in an adsorption mode and the other is being regenerated at a desorption pressure higher than the adsorption pressure. The regeneration is performed in a closed system or partially closed system, and prior to returning a regenerated adsorption zone to adsorption conditions the waste feed gas stream is used to cool and purge the regenerated zone.

Abstract: Water containing contaminants is removed from a gas or liquid stream and then treated to separate the water from the contaminants. The water is separated using a condenser and a semi-permeable membrane so that it is pure enough to be disposed-of in the local environment by evaporation. The accumulated contaminants may be removed separately for controlled disposal, or reintroduced into the original stream as an alternate method of disposal.

Abstract: An adsorption bed arrangement includes a plurality of adsorption elements, a housing, and a gasket member. Each of the adsorption elements has adsorption media contained within a respective element. Each of the adsorption elements are selectively openable to provide access to the adsorption media. The housing defines an interior, a plurality of inlet openings, and a plurality of outlet openings. The plurality of adsorption elements are positioned within the housing interior. The housing is selectively openable to provide access to the plurality of adsorption elements. The gasket member is between the housing and the adsorption elements. A method for changing filtering media in an adsorption apparatus includes steps of removing an access panel from an adsorption bed housing to expose a cover member covering an end of an adsorption element; removing the cover member from the end of the adsorption element to expose filtering media within the element; and pouring the filtering media from the element.

Abstract: A method for removing trace moisture from a gas is disclosed. The method involves heating a zeolite having a high silica-to-alumina ratio to about 400.degree. C. to remove physically absorbed water from the zeolite, followed by heating the zeolite to a temperature in excess of 650.degree. C., to form a superheated zeolite. Heating to temperatures of 650.degree. C. or above is believed to cause dehydroxylation of the zeolite. A method for the preparation of a dehydroxylated zeolite is also disclosed. The superheated zeolite is contacted with the gas, thereby adsorbing water from the gas. A dehydroxylated zeolite for removing trace moisture from a gas wherein the zeolite has a high silica-to-alumina ratio and a low level of metallic impurities is also disclosed. The zeolite and methods of the invention are particularly useful for removing trace water from acid gases such as hydrogen chloride and hydrogen bromide.

Abstract: A receiver/dryer includes a canister with a cylindrical sidewall, an integral lower end, and an open upper end. A pick-up tube is disposed centrally within the canister. The lower end of the pick-up tube has a wedged-shape and is supported by the lower end of the canister. The upper end of the pick-up tube has an annular groove that carries an O-ring seal. A lower baffle and lower filter pad are received over the pick-up tube with the lower baffle having a tight slip-fit therewith. Loose desiccant is supported by the lower baffle and filter pad. An upper filter pad and upper baffle are received over the pick-up tube, with the upper baffle having a slip-fit therewith. An upper end cap is secured to the open end of the canister, with the pick-up tube being received within an outlet passage in the upper end cap, and the O-ring seal providing a fluid-tight seal between the pick-up tube and the end cap.

Abstract: Pressure swing adsorption process and system for separating gas mixtures comprising at least one more strongly adsorbable component and at least one less strongly adsorbable component. The process includes storing gas enriched in one of the components in a first storage tank and a second storage tank. Final product gas is provided from the second storage tank while gas for purge, rinse, and/or repressurization is provided from the first storage tank.

Abstract: A method is described for providing clean air at desired temperature to an environment. Incoming air possibly contaminated with nuclear biological and chemical contaminants is compressed. The compressed air is cooled in a first heat exchanger. The cooled air from the first heat exchanger is compressed in a secondary compressor. Compressed air from the secondary compressor is cooled in a second heat exchanger. Cooled air from the secondary heat exchanger is directed through a regenerative pressure swing absorption system to provide clean output air with the contaminants removed therefrom. This cleaned air is expanded in a turbine coupled to the secondary compressor, whereby to recover energy from the cleaned air to drive the secondary compressor. The expanded cleaned air from the turbine is utilized to condition air in the environment. The regenerative pressure swing absorption system is purged with air derived from the expanded clean air.

Abstract: A process for recovering SF.sub.6 from a gas is provided. The process includes the step of contacting a gas stream comprising SF.sub.6 and at least one of N.sub.2, O.sub.2, CO.sub.2, and H.sub.2 O with a membrane in at least one membrane separation unit at conditions effective to obtain a retentate stream rich in SF.sub.6 and a permeate stream rich in at least one of N.sub.2, O.sub.2, CO.sub.2, and H.sub.2 O. A process for forming solidified Mg metal is also provided. The process includes recovering and/or recycling of SF.sub.6 and/or CO.sub.2.

Abstract: An adsorbent package is provided for mounting to a filter or bleed nipple that is, in turn, attached to a bright tube or other fluid flow conduit in an auto or truck accumulator or receiver dryer. In a preferred form of the invention, a centrally disposed opening is provided in the adsorbent package and is surrounded by a rigid collar. The aperture is dimensioned so that it will be force or snap fit over a flange or the like on a filter.

Abstract: An adsorbent package is provided for mounting to a filter or bleed nipple that is, in turn, attached to a bight tube or other fluid flow conduit in an auto or truck accumulator or receiver dryer. In a preferred form of the invention, a centrally disposed opening is provided in the adsorbent package and is surrounded by a rigid collar. The aperture is dimensioned so that it will be force or snap fit over a flange or the like on a filter.

Abstract: Process for purifying an inert fluid, in particular argon or helium, with respect to at least one of its impurities nitrogen (N.sub.2), oxygen (O.sub.2), carbon dioxide (CO.sub.2), carbon monoxide (CO) and hydrocarbons, in which at least some of the impurities are removed using a first adsorbent of the X zeolite type having a silica to aluminum ratio less than or equal to 1.15, and a purified inert fluid containing at most 10 ppb, preferably at most 1 ppb of impurities is recovered.

Abstract: The invention relates to a gas dehydration membrane comprising a membrane having pores communicating between a first and an opposing second surface of the membrane and further having an average pore diameter on the first surface of the membrane which is about 10 to 1000 times smaller than that on the opposing second surface of the membrane. The invention further relates to a process for dehydrating a gaseous feedstock comprising passing the gaseous feedstock over a membrane characterized by high surface porosity wherein pore openings on a first surface thereof are at least 10 to 1000 times smaller than pore openings on an opposing surface thereof and wherein from about 2% to about 30% of the pore volume is occupied by a humectant.

Abstract: A VOC concentrating apparatus includes a honeycomb rotor. In order to lower concentration at an exit of adsorption and at the same time to be able to regulate the amount of air flow introduced into a desorbing zone, independently from the amount of cooling air, there are disposed a cooling zone, desorbing zone and an adsorbing zone in the honeycomb rotor. The honeycomb rotor rotates and thus passes through the zones one after another. After gas to be treated has passed through the adsorbing zone, concentration of VOC in the gas is measured on the exit side by a concentration detector. The cooling air is divided by a damper for regulating the amount of air flow, after having entered the cooling zone, and a part thereof enters the desorbing zone through a heater. Further air coming out therefrom is heated again by a heater to enter the desorbing zone and concentrated gas is removed.

Abstract: A molecular sieve type gas separation apparatus (10) for separating product gas from a gas supply (14) includes at least one sieve bed (11-13) which during an adsorption charge phase of a cycle, adsorbs non product gas in the gas supply (14), and in a desorption regeneration phase of the cycle desorbs the previously adsorbed non product gas. The apparatus further includes an outlet (18) to which product gas is delivered during the adsorption charge phase, and an outlet (31) for non product gas during the desorption regeneration phase. A sensor (36) responsive to the concentration of a constituent in the product gas, and a control (20) to switch the apparatus (10) between the adsorption charge and desorption regeneration phases are further provided. The control (20) is adapted to adjust the duration of adsorption charge phase relative to the duration of the desorption regeneration phase in each cycle.

Abstract: The purge and trap procedure commonly used for analysis of volatile organic compounds in water or air can be significantly improved using traps employing clays and modified clays as adsorbents. Examples of clays include attapulgite clay, attapulgite clay modified with tetrasodiumpyrophosphate, carboxymethylcellulose and the combination thereof, kaolin clay, kaolin clay modified with tetrasodiumpyrophosphate, carboxymethylcellulose or the combination thereof, and mixtures of the above clays.

Abstract: A chromatograph includes an inlet for receiving a sample and a pressurized carrier fluid flow and in response providing a sample/fluid mixture; a separation column located in a temperature-controlled zone for receiving the sample/fluid mixture and for providing a column effluent stream; a detector for receiving the effluent stream and for providing a detector output stream; and a gas recycling system for receiving the detector output stream, and optionally a split flow and a septum purge line flow, and for providing therefrom a recycled carrier gas stream suitable for reuse as the pressurized carrier fluid flow.