Abstract: A micro device in which a functional element can be moved between an operating position and a waiting position by the displacement of support means coupled to a substrate. The micro device has a cantilever structure in which one end of support means is made a fixed one fixed to the substrate and the other end to which an active element is provided is made a free end. A spring portion is provided to at least part of the support means, and thus the active element can be greatly displaced by a small stress.

Abstract: A mobile cleaning workbench that may be used for manually washing equipment components, parts or other articles is provided. The cleaning station provides a source of water or other cleaning liquid for use in the washing of an article in a wash basin. A drain is provided for removal of cleaning liquid from the wash basin. Since some chemicals produce vapors which are emitted as chemical-laden articles are moved about, alternative embodiments of the invention include a ventilation exhaust system that removes the vapors from the washing area and transfers them to a remote location via appropriate ducting.

Abstract: A method that includes rotating a wafer, heating the wafer, applying a first liquid through one or more nozzles to a center of a topside of the wafer that is cooler than the heated wafer, and translating the one or more nozzles to an outer diameter edge of the wafer.

Abstract: The device includes a spray system for spraying a fluid against the inside periphery of the tube to be cleaned, and two analogous brushing assemblies, each of which include brushing means and a propelling element which cooperates with the inside periphery of the tube. The device further includes means for moving axially the brushing assemblies towards and away from each other in alternation, which means include a chamber connected to a feed for feeding in fluid under pressure. The spray system includes a reservoir put under pressure by being connected to the chamber. A method of cleaning a tube, in which two brushing assemblies including brushing means are inserted into the tube and are moved towards and away from each other in alteration. A fluid, disposed in a reservoir cooperating with a support system on which the propelling elements are secured, is sprayed against the inside periphery of the tube.

Abstract: A float mounting plate is provided for a dishwasher to limit the level of water in the dishwasher tub. The float has a stem extending downwardly through a stand pipe in the bottom of the tub and into a switch bracket which houses the water level control switch. A tab is provided on the switch bracket which is adapted to extend around the float stem, thereby slidably retaining the retainer ring of the stem for engagement and disengagement with the switch, and limiting lateral or horizontal movement of the stem. In one embodiment, the tab is integrally formed with the bracket, with a living hinge allowing the tab to pivot between open and closed positions. In a second embodiment, the tab snap fits onto the bracket to capture the float stem.

Abstract: The invention relates to a method for operating a dish washing machine (1) comprising, inside a washing tub (3), at least one spraying device (6), to which a pump (8) supplies washing liquid and which is provided with spraying openings (5). The washing liquid is sprayed into the washing tub (3) via said spraying openings (5). The aim of the invention is to be able to easily detect when the spraying openings (5) become clogged. To this end, the pump (8) is switched on and washing liquid can be supplied even when the washing tub (3) is accessible. In doing this, the flow rate of the washing liquid through the spraying openings (5), however, is simultaneously reduced to such an extent as to prevent washing liquid from spraying out of the open washing tub (3) and into the free surrounding area.

Abstract: Equipment and methods are provided for combining with a typical heat exchanger having numerous fin tubes, the combination allowing the containment of cleaning fluid used to clean fin tubes with high pressure liquid cleaning devices in which cleaning fluid is discharged into one end of each fin tube and out the other. An enclosure is attached to an opened end of a heat exchanger having U-shaped fin tubes, the enclosure having cleaning tool access portions for separately exposing each of at least two pluralities of the fin tubes entry ends, while continuing to cover the remaining fin tube pluralities, and the fin tube exit ends. Fluid splashed at the cleaning fluid entry end of the fin tubes and cleaning fluid exiting the fin tubes is captured and drained by the enclosure. Alternatively, a second enclosure captures exiting cleaning fluids in heat exchangers having straight fin tubes and two openable ends.

Abstract: Equipment and methods are provided for combining with a typical air cooler having numerous fin tubes, the combination allowing the containment of cleaning fluid used while cleaning the fin tubes with high pressure liquid cleaning devices in which cleaning fluid is discharged into one end of each fin tube and out the other. Two enclosures are attached to each end of the air cooler, with one enclosure having cleaning tool access portions for separately exposing each of at least two pluralities of the fin tubes while continuing to cover the remaining fin tube pluralities. Cleaning fluid splashed at the cleaning fluid entry end of the air cooler is captured and drained by the first enclosure, while cleaning fluid exiting the fin tubes at the cleaning fluid discharge end of the air cooler is captured and drained by the second enclosure.

Abstract: A support structure and method, designed to maintain a resealable plastic bag in an open position within a dishwasher through the washing and drying cycles, has at least two vertically extending support and restraining straps that may be engaged with like straps to form a resilient support framework. A plurality of mating dimples and protrusions offer controlled size adjustments, while maintaining the reliability of the structure. The structure is readily collapsible to a flat and compact structure prior to purchase and when not in use, and includes features to engage with the rack in the dishwasher to prevent the support and bag from being substantially relocated during the wash process.

Abstract: A method of remediating deposits within a pipeline comprising inserting a removable smaller pipe within said pipeline, providing an electrically insulating coating on said smaller pipe, providing a contactor proximate said distal end of said smaller pipe to electrically contact said internal diameter of said pipeline, flowing an electrical current along the wall area of said internal pipe, through said contactor, and along the wall area of said pipeline to generate heat within said smaller pipe to remediate blockages within said smaller pipe.

Abstract: Methods for cleaning a first group of electrodes contained within an air conditioner are provided. A second group of electrodes within the air conditioner has a cleaning device fastened therewith. The cleaning device engages the first group of electrodes. A method includes removing the second group of electrodes from the air conditioner, and replacing the second group of electrodes back into the air conditioner.

Abstract: A substrate treatment apparatus includes a substrate heating device for maintaining a substrate at a temperature higher than room temperature, a wetting device for producing a wet ozone-containing gas by wetting an ozone-containing gas with a treatment solution, and a supply device for supplying the wet ozone-containing gas from the wetting device to a work object on a surface of the substrate. The supply device includes a gas disperser including apertures aligned in rows in a width direction of the work object. The apertures in adjacent rows are not aligned with each other in a direction perpendicular to the rows. At least one of the gas disperser and the substrate is movable in a direction perpendicular to the rows. A gas conduit connects the wetting device to the supply device. A wet ozone-containing gas heating device heats the wet ozone-containing gas to a temperature at least equal to the temperature of the substrate.

Abstract: The present invention is directed towards the use of a reactive gas or vapor of a reactive liquid prior to or in combination with cryogenic cleaning to remove contaminants from the semiconductor surfaces or other substrate surfaces requiring precision cleaning. The reactive gas or vapor is selected according to the contaminants to be removed and the reactivity of the gas or vapor with the contaminants. Preferably, this reaction forms a gaseous byproduct which is removed from the substrate surface by the flow of nitrogen across the surface.

Abstract: There are provided a low pressure plasma processing apparatus and method by which a throughput can be improved, film contamination can be effectively prevented, and a film can be readily managed. A film substrate is carried in from the outside of a plasma processing apparatus main body to a substrate carrying position in the plasma processing apparatus main body, the film substrate positioned at the substrate carrying position is carried into a chamber, a reaction gas is introduced while the chamber is being evacuated, high frequency power is applied under low pressure to generate plasma so that plasma processing is performed to remove organic matter from the film substrate, and the film substrate subjected to plasma processing is taken out from the chamber and positioned at a substrate carrying-out position in the plasma processing apparatus main body and carried out of the plasma processing apparatus main body.

Abstract: Described and claimed are apparatuses and systems for surface cleaning comprising a pump and an applicator connected to the pump through which one or more cleaning agents can be applied to the surface at an operating pressure that is about 600 PSI or less and an operating flow rate that is about 1 gal/min or less.

Abstract: Hollow porous fibers containing adhered contaminants are cleaned to remove the contaminants by backflushing a liquid to fill the pores, and adding a flow of gas so as to form a two-phase mixture of gas and bubbles of liquid that can scrub the fibers, loosening the contaminants and allowing them to be flushed from the hollow fibers. The method is particularly useful for cleaning hemodialyzers used for dialysis and hollow fiber modules used in water treatment and separations. The two phase flow method is specifically effective in cleaning piping systems having high length to diameter (l/d) ratios.

Abstract: A substrate is supported at a plurality of edge positions thereof, to be in horizontal posture, by support pins erected on a spin chuck. A two-fluid nozzle is fixed to a position spaced from and directly over edges of the substrate to clean the edges. Substantially simultaneously therewith, a cleaning brush cleans the substrate while swinging over, in direct contact with, areas other than the edges of the substrate. The two-fluid nozzle delivers mist in a small quantity and in minute droplets. The mist is restrained from rebounding and scattering from the plurality of edge positions supported by the support pins of the spin chuck. The mist may be supplied to clean such positions.

Abstract: A dishwasher includes a water inlet connectable to a water source. A dishwasher element is operable on water received through the inlet. A flow sensor is in fluid communication with the inlet and is operable to generate a control signal indicative of water flow through the inlet. A control apparatus is connected between the dishwasher element and the flow sensor and is operable to inhibit operation of the dishwasher element in response to the control signal.

Abstract: A supercritical fluid cleaning system and method comprising mainly a pressure chamber, a closable lid, a substrate support for holding at least one substrate, a rotable shaft extending outward from within the chamber, an external rotary power source coupled magnetically or otherwise to the shaft, and a rotable component or impeller attached to the chamber end of the shaft in close proximity to the substrate holding position, and baffles located close to the rotable component. The rotable component is con|figured for rotation within the supercritical phase fluid in the chamber close to the surface of the wafer for causing agitation and turbulent fluid flow against the surface of the substrate, and increased intra-chamber fluid circulation.

Abstract: A method facilitates washing a gas turbine engine combustor. The method comprises coupling a nozzle assembly against the combustor, wherein the nozzle assembly includes an inlet end, a discharge end, a hollow nozzle body extending therebetween, and a centerbody positioned within the nozzle body, coupling the nozzle assembly to a fluid source, and discharging an annulus of fluid from the nozzle assembly into the combustor to facilitate removing particulate matter from the combustor.