Patents Examined by Selim U Ahmed
  • Patent number: 11862653
    Abstract: An imaging sensor package includes: an imaging sensor; and an architected substrate coupled to a bottom surface of the imaging sensor. The architected substrate has local stiffness variations along an in-plane direction of the architected substrate, and the imaging sensor and the architected substrate are curved.
    Type: Grant
    Filed: December 3, 2020
    Date of Patent: January 2, 2024
    Assignee: HRL LABORATORIES, LLC
    Inventors: Mark O'Masta, Jacob Hundley, Eric Clough, Christopher Roper, Geoffrey McKnight
  • Patent number: 11862624
    Abstract: An integrated circuit device includes a semiconductor substrate having components of a peripheral circuit structure formed in and on a surface of the semiconductor substrate. The peripheral circuit structure comprising a plurality of protective antenna diodes therein. A memory cell array structure is provided on at least a portion of the peripheral circuit structure. A charge accumulating conductive plate is provided, which extends between the peripheral circuit structure and the memory cell array structure. The conductive plate is electrically connected to current carrying terminals of the antenna diodes within the peripheral circuit structure. The conductive plate may have a generally rectangular planar shape with four corners, and the antenna diodes may be arranged into four groups, which extend between respective corners of the conductive plate and the semiconductor substrate.
    Type: Grant
    Filed: May 20, 2021
    Date of Patent: January 2, 2024
    Inventors: Taemin Ok, Inmo Kim, Sujeong Kim, Daeseok Byeon
  • Patent number: 11862469
    Abstract: A method of forming a package structure includes the following steps. A first package structure is formed. The first package structure is connected to a second package structure. The method of forming the first package structure includes the following steps. A redistribution layer (RDL) structure is formed. A die is bonded to the RDL structure. The RDL structure is electrically connected to the die. A through via is formed on the RDL structure and laterally aside the die. An encapsulant is formed to laterally encapsulate the through via and the die. A protection layer is formed over the encapsulant and the die. A cap is formed on the through via and laterally aside the protection layer, wherein the cap has a top surface higher than a top surface of the encapsulant and lower than a top surface of the protection layer. The cap is removed from the first package structure.
    Type: Grant
    Filed: March 31, 2022
    Date of Patent: January 2, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Feng-Cheng Hsu, Shuo-Mao Chen, Shin-Puu Jeng
  • Patent number: 11855043
    Abstract: A multi-chip module (MCM) includes a common substrate and first and second integrated circuit (IC) chips disposed on the common substrate. The first integrated circuit (IC) chip includes a first interface circuit disposed proximate a first edge of the first IC chip and a second interface circuit disposed proximate the first edge of the first IC chip. A first chiplet couples to the first interface circuit via a first link. A second chiplet couples to the second interface circuit via a second link. A first position of the first chiplet with respect to the first IC chip is staggered in a longitudinal dimension relative to a second position of the second chiplet with respect to the first IC chip.
    Type: Grant
    Filed: November 25, 2022
    Date of Patent: December 26, 2023
    Assignee: Eliyan Corporation
    Inventors: Ramin Farjadrad, Syrus Ziai
  • Patent number: 11855004
    Abstract: A package structure is provided. The package structure includes a first conductive pad in an insulating layer, a first under bump metallurgy structure under the first insulating layer, and a first conductive via in the insulating layer. The first conductive via is vertically connected to the first conductive pad and the first under bump metallurgy structure. In a plan view, a first area of the first under bump metallurgy structure is confined within a second area of the first conductive pad.
    Type: Grant
    Filed: June 17, 2021
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chia-Kuei Hsu, Ming-Chih Yew, Shu-Shen Yeh, Che-Chia Yang, Po-Yao Lin, Shin-Puu Jeng
  • Patent number: 11855008
    Abstract: A method includes forming a first dielectric layer, forming a first redistribution line comprising a first via extending into the first dielectric layer, and a first trace over the first dielectric layer, forming a second dielectric layer covering the first redistribution line, and patterning the second dielectric layer to form a via opening. The first redistribution line is revealed through the via opening. The method further includes forming a second via in the second dielectric layer, and a conductive pad over and contacting the second via, and forming a conductive bump over the conductive pad. The conductive pad is larger than the conductive bump, with a first center of conductive pad being offsetting from a second center of the conductive bump. The second via is further offset from the second center of the conductive bump.
    Type: Grant
    Filed: August 10, 2022
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shu-Shen Yeh, Che-Chia Yang, Chin-Hua Wang, Po-Yao Lin, Shin-Puu Jeng, Chia-Hsiang Lin
  • Patent number: 11854835
    Abstract: A method includes forming a first package component, which formation process includes forming a first plurality of openings in a first dielectric layer, depositing a first metallic material into the first plurality of openings, performing a planarization process on the first metallic material and the first dielectric layer to form a plurality of metal pads in the first dielectric layer, and selectively depositing a second metallic material on the plurality of metal pads to form a plurality of bond pads. The first plurality of bond pads comprise the plurality of metal pads and corresponding parts of the second metallic material. The first package component is bonded to a second package component.
    Type: Grant
    Filed: August 10, 2022
    Date of Patent: December 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Mirng-Ji Lii, Chen-Shien Chen, Lung-Kai Mao, Ming-Da Cheng, Wen-Hsiung Lu
  • Patent number: 11855037
    Abstract: The invention relates to a method (110) for producing an electrically conductive connection (112, 112?) on a substrate (114), comprising the following steps: a) providing a substrate (114), wherein the substrate (114) is configured for receiving an electrically conductive connection (112, 112?); b) providing a reservoir of an electrically conductive liquid alloy, wherein the reservoir has a surface at which the alloy has an insulating layer; c) providing a capillary (120) configured for taking up the electrically conductive liquid alloy; d) penetrating of a tip (122) of the capillary (120) under the surface of the reservoir and taking up of a portion of the alloy from the reservoir; and e) applying the portion of the alloy at least partly to the substrate (114) in such a manner that an electrically conductive connection (112, 112?) is formed from the alloy on the substrate (114), wherein the alloy remains on the substrate (114) by adhesion.
    Type: Grant
    Filed: August 22, 2019
    Date of Patent: December 26, 2023
    Assignee: Karlsruher Institut für Technologie
    Inventors: Uwe Bog, Michael Hirtz, Harald Fuchs, Jasmin Aghassi, Gabriel Cadilha Marques, Subho Dasgupta, Ben Breitung, Horst Hahn
  • Patent number: 11848385
    Abstract: A method of forming a semiconductor device includes forming source/drain contact openings extending through at least one dielectric layer to expose source/drain contact regions of source/drain structures. The method further includes depositing a light blocking layer along sidewalls and bottom surfaces of the source/drain contact openings and a topmost surface of the at least one dielectric layer. The method further includes performing a laser annealing process to activate dopants in the source/drain contact region. The method further includes forming source/drain contact structures within source/drain contact openings.
    Type: Grant
    Filed: March 28, 2022
    Date of Patent: December 19, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Blandine Duriez, Marcus Johannes Henricus Van Dal, Martin Christopher Holland, Gerben Doornbos, Georgios Vellianitis
  • Patent number: 11849597
    Abstract: A sensor includes an anode and a cathode, and a near-infrared photoelectric conversion layer between the anode and the cathode. The near-infrared photoelectric conversion layer is configured to absorb light of at least a portion of a near-infrared wavelength spectrum and convert the absorbed light into an electrical signal. The near-infrared photoelectric conversion layer includes a first material having a maximum absorption wavelength in the near-infrared wavelength spectrum and a second material forming a pn junction with the first material and having a wider energy bandgap than an energy bandgap of the first material. The first material is included in the near-infrared photoelectric conversion layer in a smaller amount than the second material.
    Type: Grant
    Filed: September 27, 2021
    Date of Patent: December 19, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dong-Seok Leem, Rae Sung Kim, Hyesung Choi, Ohkyu Kwon, Changki Kim, Hwang Suk Kim, Bum Woo Park, Jae Jun Lee
  • Patent number: 11842966
    Abstract: The present disclosure relates to an integrated chip comprising a substrate. A first conductive wire is over the substrate. A second conductive wire is over the substrate and is adjacent to the first conductive wire. A first dielectric cap is laterally between the first conductive wire and the second conductive wire. The first dielectric cap laterally separates the first conductive wire from the second conductive wire. The first dielectric cap includes a first dielectric material. A first cavity is directly below the first dielectric cap and is laterally between the first conductive wire and the second conductive wire. The first cavity is defined by one or more surfaces of the first dielectric cap.
    Type: Grant
    Filed: June 23, 2021
    Date of Patent: December 12, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsin-Chieh Yao, Chung-Ju Lee, Chih Wei Lu, Hsi-Wen Tien, Wei-Hao Liao, Yu-Teng Dai, Hsin-Yen Huang, Chia-Tien Wu
  • Patent number: 11842921
    Abstract: The present disclosure provides a method for preparing a semiconductor device structure. The method includes forming a pad oxide layer over a semiconductor substrate; forming a pad nitride layer over the pad oxide layer; forming a shallow trench penetrating through the pad nitride layer and the pad oxide layer and extending into the semiconductor substrate; forming a first liner, a second liner and a third liner over sidewalls and a bottom surface of the semiconductor substrate in the shallow trench; filling a remaining portion of the shallow trench with a trench filling layer over the third liner; and planarizing the second liner, the third liner and the trench filling layer to expose the pad nitride layer. The first liner and the remaining portions of the second liner, the third liner and the trench filling layer collectively form a shallow trench isolation (STI) structure in an array area.
    Type: Grant
    Filed: May 31, 2022
    Date of Patent: December 12, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Yu-Han Hsueh
  • Patent number: 11830393
    Abstract: A micro LED display panel capable of simpler but more precise manufacture by pre-loading micro LEDs onto wafers which are then transferred to a substrate includes the substrate and light-emitting units. Each light-emitting unit includes a wafer unit and at least two micro LEDs on the wafer unit. The display panel includes pixel regions, each pixel region including at least three adjacent sub-pixel regions. Each sub-pixel region has one micro LED therein. Each micro LED of the light-emitting units is located in one sub-pixel region and the micro LEDs in each pixel regions emit light of different colors.
    Type: Grant
    Filed: September 20, 2021
    Date of Patent: November 28, 2023
    Assignee: HON HAI PRECISION INDUSTRY CO., LTD.
    Inventor: Feng-Hsiang Liu
  • Patent number: 11832439
    Abstract: The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate; a pad structure positioned above the substrate and including a bottom portion and two side portions, wherein the bottom portion is positioned parallel to a top surface of the substrate, and the two side portions are positioned on two sides of the bottom portion and extending along a direction parallel to a normal of the top surface of the substrate; and an insulator film surrounding the pad structure. A top surface of the insulator film is at a vertical level greater than a vertical level of a top surface of the pad structure.
    Type: Grant
    Filed: September 24, 2021
    Date of Patent: November 28, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Tsu-Chieh Ai
  • Patent number: 11827976
    Abstract: A method includes arranging a substrate in a processing chamber, and exposing the substrate to a gas mixture including a first metal precursor gas and a second metal precursor gas to deposit a first metal precursor and a second metal precursor onto the substrate at the same time. The method further includes purging the processing chamber, supplying a reactant common to both the first metal precursor and the second metal precursor to form a layer of an alloy on the substrate, and purging the processing chamber.
    Type: Grant
    Filed: December 6, 2018
    Date of Patent: November 28, 2023
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Ilanit Fisher, Raashina Humayun, Michal Danek, Patrick Van Cleemput, Shruti Thombare
  • Patent number: 11824101
    Abstract: A semiconductor device includes a semiconductor substrate, an isolation feature over the semiconductor substrate, a fin protruding from the semiconductor substrate and through the isolation feature, a gate stack over and engaging the fin, and a gate spacer on sidewalls of the gate stack. A bottom portion of the sidewalls of the gate stack tilts inwardly towards the gate stack.
    Type: Grant
    Filed: March 28, 2022
    Date of Patent: November 21, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Sai-Hooi Yeong, Chi-On Chui, Kai-Hsuan Lee, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 11825653
    Abstract: A semiconductor device includes a stack formed on a substrate and memory strings penetrating the stack along a first direction. The stack includes conductive layers and insulating layers that alternately stacked. Each of the memory strings includes a channel layer, a memory structure, a first conductive pillar and a second conductive pillar. The channel layer, the first conductive pillar and the second conductive pillar extend along a first direction. The memory structure is disposed between the stack and the channel layer. The first conductive pillar and the second conductive pillar are electrically isolated from each other, and are respectively coupled to a first portion and a second portion of the channel layer. The first portion is opposite to the second portion. The first portion is surrounded by the memory structure, and the second portion is exposed from the memory structure.
    Type: Grant
    Filed: July 8, 2020
    Date of Patent: November 21, 2023
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Hang-Ting Lue, Wei-Chen Chen
  • Patent number: 11817380
    Abstract: In an embodiment, a method for manufacturing a semiconductor device includes forming a redistribution structure on a carrier substrate, connecting a plurality of core substrates physically and electrically to the redistribution structure with a first anisotropic conductive film, the first anisotropic conductive film including a dielectric material and conductive particles, and pressing the plurality of core substrates and the redistribution structure together to form conductive paths between the plurality of core substrates and the redistribution structure with the conductive particles in the first anisotropic conductive film. The method also includes encapsulating the plurality of core substrates with an encapsulant.
    Type: Grant
    Filed: February 26, 2021
    Date of Patent: November 14, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jiun Yi Wu, Chen-Hua Yu, Chung-Shi Liu
  • Patent number: 11810862
    Abstract: An electronic package is provided, in which a circuit board and a circuit block are embedded in an encapsulating layer at a distance to each other, and circuit structures are formed on the two opposite surfaces of the encapsulating layer with electronic components arranged on one of the circuit structures. The circuit block and the circuit board embedded in the encapsulating layer are spaced apart from each other to allow to separate current conduction paths. As such, the circuit board will not overheat, and issues associated with warpage of the circuit board can be eliminated. Moreover, by embedding the circuit block and the circuit board in the encapsulating layer at a distance to each other, the structural strength of the encapsulating layer can be improved.
    Type: Grant
    Filed: November 1, 2022
    Date of Patent: November 7, 2023
    Assignee: SILICONWARE PRECISION INDUSTRIES CO., LTD.
    Inventors: Yu-Lung Huang, Chih-Ming Huang, Kuo-Hua Yu, Chang-Fu Lin
  • Patent number: 11798834
    Abstract: There is provided a method of filling one or more recesses by providing the substrate in a reaction chamber; introducing a first reactant, to form first active species, for a first pulse time to the substrate; introducing a second reactant for a second pulse time to the substrate; and introducing a third reactant, to form second active species, for a third pulse time to the substrate. An apparatus for filling a recess is also disclosed and a structure formed using the method and/or apparatus is disclosed.
    Type: Grant
    Filed: May 11, 2022
    Date of Patent: October 24, 2023
    Assignee: ASM IP Holding B.V.
    Inventors: Zecheng Liu, Viljami Pore