Abstract: An exposure apparatus and device manufacturing method having structure and steps for projecting, for scan exposure of a substrate through an original, a plurality of light pulses from a pulse light source to the substrate through the original, changing an emitted light intensity of light pulses from the pulse light source during the scan exposure, and changing timing of light emission from the pulse light source during the scan exposure, whereby both the emitted light intensity and the timing of light pulses may be controlled during the scan exposure.

Abstract: A sheet transport system for an image-forming apparatus including a scanner unit on an upper part of an image-forming unit. A paper ejecting path ejects an image formed paper sheet to an ejected paper stacker via the image-forming unit. A scanning sheet path conveys an original document through an original document platform to a scanned paper stacker via the scanner unit. A sheet path selector selects one of the paper ejecting path or scanning sheet path, the scanning sheet path and the paper ejecting path crossing each other.

Abstract: A projection exposure apparatus includes an illumination optical system for illuminating a plurality of partial areas on a mask. A plurality of projection optical systems each project images of the partial areas thus illuminated onto a photosensitive substrate. A mask table holds the mask. A position detector detects a position of the mask table. A substrate table holds the photosensitive substrate. A plurality of first reference marks are provided on the mask table; each of the plurality of first reference marks are disposed at a position corresponding to each of the plurality of projection optical systems. A plurality of second reference marks are provided on the substrate table; the second reference marks are substantially conjugate with the first reference marks with respect to the projection optical systems and are in a predetermined positional relation with the first reference marks in in-plane directions of the mask and the photosensitive substrate.

Abstract: An exposure method of illuminating a pattern on a mask by a light beam from an illuminating optical system and exposing the image of the pattern onto a photosensitive substrate through a projection optical system comprises the steps of discriminating the kind of the mask, setting the state of at least one of the field stop of the illuminating optical system, the aperture stop of the illuminating system and the aperture stop of the projection optical system in conformity with the discriminated kind of the mask, and projecting the image of the pattern on the mask onto a predetermined area of the photosensitive substrate.

Abstract: An exposure apparatus comprises a light source for supplying light with a predetermined wavelength and an illumination optical system for guiding the light from this light source onto a mask formed with a predetermined pattern. The illumination optical system includes a plurality of light-transmitting optical members which transmit therethrough the light from the light source, while at least one of the plurality of light-transmitting optical members is comprised of fluorite. Even when the mask is irradiated with exposure light for a long period, the optical members in the illumination optical system can be prevented from deteriorating, whereby a stable exposure operation can be realized over a long period.

Abstract: A toner cartridge (1000) that is attached to a development unit of an image forming apparatus in order to supply toner to the development unit comprises a toner bottle (100) containing toner, a lid member (200) fitted on a toner outlet (114d) of the toner bottle (100), and an armoring member (300) in which the toner bottle (100) is housed and to which the lid member (200) is attached. The lid member (200) is provided with a toner supply mechanism for supplying the toner contained in the toner bottle (100) to the development unit when the toner cartridge (1000) is attached to the development unit of the image forming apparatus. In the toner cartridge (1000), both of or one of the lid member (200) and the armoring member (300) is shaped quadrangularly in external appearance. The armoring member (300) and the toner bottle (100) are individually constructed so that the toner cartridge (1000) has a double construction comprising the armoring member (300) and the toner bottle (100).

Abstract: Stable attraction of the transfer paper and stable toner transfer are ensured by preventing an electrostatic attracting force of transfer paper from lowering as charge accumulated on the transfer paper moves through ends of a transfer drum thereby declining. The transfer drum provided in a transfer section is composed of a dielectric layer, a semi-conductive layer, and a conductive layer laminated in this order from a transfer paper side, and there are further provided a power source section for applying a predetermined voltage to the conductive layer, and a grounded conductive roller which comes into contact with a surface portion, on an upstream side to a transfer point, of the dielectric layer with the transfer paper therebetween. Further, an insulating material is applied to ends of at least one of the dielectric layer, the semi-conductive layer, and the conductive layer.

Abstract: When an order for photographic processing is placed from the customer, an operator, first, operates a keyboard to input the type of photographic processing ordered by the customer. Then, the operator causes a card reader to read customer identification information recorded on a card, and causes a bar code reader to read a bar code recorded on a cartridge and representing film information, and further, causes a film-data reading device to read film information magnetically recorded on the film. Further, when an order for extra prints is placed from the customer, the operator loads a print order slip on which information for extra prints is recorded, into a loading portion so that the information recorded on the print order slip is read by a mark-sheet reader. As a result, the information required for issuing order forms is obtained, and three sheets of order form for a customer, laboratory, and photo processing shop, are issued by a printer.

Abstract: A computer (500) with a graphics program, an eight-plane raster image processor program, an eight-plane print-sending program, and a contrast-control program is connected to a single-bit, four-pass, electrographic printer (430). One or more of the primary colors is individually divided into multiple layers (100', 200 . . . ), with each layer having an independently selectable contrast setting (300--330). The printer (430') is now capable of printing images with an improved color gamut and dynamic range.

Abstract: A paper detecting device is provided that may be constructed using a tray-rotatable-cam that can rotate around a shaft through a limited range. The tray-rotatable-cam is rotated into operating position by the insertion of the paper tray into the electrophotographic apparatus. A height-adjusting-beam is positioned substantially perpendicularly to the tray-rotatable-cam and is able to rotate on its own shaft through a limited range to raise the height of the shaft supporting the sensor-activating-blade. The shaft supporting the sensor-activating-blade is at a substantially perpendicular orientation to the height-adjusting-beam. A torsion spring installed on the same shaft as the height-adjusting-beam to provide the force to lift the shaft, and sensor-activating-blade to their operational height. The torsional spring also prevent the shaft and sensor-activating-blade from being caught in the paper tray when the paper tray is inserted or removed from the electrophotographic apparatus.

Abstract: An exposure method wherein a mask on which a pattern is formed is illuminated with a slit-like illumination light beam, and the mask and a substrate are caused to scan the slit-like illumination light beam in a scanning direction in order to form an image of the pattern on the substrate, and wherein photo-electric signals obtained by a sensor which moves in the scanning direction, relative to the slit-like illumination light beam, and photo-electric signals obtained from the sensor which moves in a direction orthogonal to the scanning direction are integrated so as to obtain integrated values thereof, and an unevenness among the integrated values relating to a direction orthogonal to the scanning direction is calculated

Abstract: In a photographic film having a substantially transparent magnetic layer, and a sequence of longitudinally spaced image frames, the improvement comprising:at least one longitudinal magnetic track in said magnetic layer located on a side of each image frame, said track having a fixed length L; anda pair of data blocks recorded on said track, each said data block having a length which is less than L/2 and being recorded respectively at the beginning and end of said track with an unrecorded space between said data blocks.

Abstract: A reticle and a wafer are relatively scanned in a scanning exposure type of projection exposure apparatus so that a pattern on the reticle is transferred onto the wafer by exposure. Heat exchangers which has the Peltier device are provided on a side surface of an integrator sensor which measures the quantity of exposure to control temperature of a photosensitive surface of the integrator sensor. In a side of heat irradiation surface of the heat exchangers, cooling water is circulated so that the heat exchangers are cooled. Saturation temperature at which temperature of the photosensitive surface is saturated when an illumination beam is irradiated to the photosensitive surface is determined and then the quantity of light irradiated to the photosensitive surface is measured with the temperature of the photosensitive surface being maintained at the saturation temperature.

Abstract: This invention relates to an image forming apparatus with a transfer unit for transferring toner electrically to an electrostatic latent image formed on a photoreceptor onto a copy sheet. The image forming apparatus has a transfer electrode charge supply means for supplying electric charges to a transfer electrode provided in the transfer unit to electrically attract the toner onto the copy sheet and control means for controlling the quantity of electric charges to be supplied to the photoreceptor via the transfer electrode from the transfer electrode charge supply means based on a photoreceptor inflow current flowing to the photoreceptor through the charge send/receive means and on a photoreceptor outflow current flowing out from the photoreceptor through a ground wire connecting the photoreceptor and the ground. The charge send/receive means, other than the transfer unit, sends and receives electric charges to and from the photoreceptor.

Abstract: An exposure apparatus including an illumination optical system, a first light receiving system for receiving a portion of exposure light from the illumination optical system, a movable reticle stage having a transmitting portion for transmitting exposure light, and a second light receiving system for receiving the exposure light transmitted through the transmitting portion. Accordingly, the exposure apparatus is able to correct the sensitivity of the first light receiving system without unloading a reticle.

Abstract: A projection exposure apparatus has an exposure processing section for projecting and exposing an image of a pattern of a reticle on a photosensitive substrate, an environmental chamber for covering the exposure processing section and a fan unit for supplying a temperature-controlled gas to the environmental chamber. Exposure to the photosensitive substrate is carried out in a temperature-controlled atmosphere. The pressure of the gas in the environmental chamber is monitored by a pressure sensor. When the pressure is changed, the mixture ratio of the gas supplied to the environmental chamber is changed to keep the refractive index of the gas in the chamber constant thereby to prevent imaging characteristics of the projected image from deteriorating.

Abstract: A compact and inexpensive illuminating light source apparatus for a photographic printer, which is designed so that infrared rays emitted from a lamp are reused without dissipating as heat, thereby considerably improving the light source efficiency, and that color and other characteristics are not affected by replacement of the lamp, and further that the apparatus is easy to produce and simple in arrangement. All the components of light that is emitted from a filament (FM) of a lamp (S) are reflected by a total internal reflection reflector (R1) having a paraboloid of revolution, and the resulting parallel beam of light is perpendicularly incident on an infrared reflecting plate (RP). The visible light component in the incident light passes through the infrared reflecting plate (RP) and is used to print a film. The infrared component is reflected by the infrared reflecting plate (RP) so as to return to the filament (FM) of the lamp (S), traveling backwards along the optical path.

Abstract: When the position of a stage is detected by interferometers, a converting means converts information detected by the interferometers into information on a position and a velocity of a center of gravity of the stage concerning each of degrees of freedom. PI controllers provided for each of the degrees of freedom determine control amounts for each of the degrees of freedom necessary for movement of the center of gravity by means of (proportional+integral) operation on the basis of velocity deviations in respective directions obtained as differences between values obtained by conversion into velocities from positional deviations of the center of gravity in the .theta., Y, X directions and velocities of the center of gravity in the respective directions.

Abstract: A projection optical system of a projection exposure apparatus according to the present invention has a plurality of optical members made of glass materials at least one of which has a temperature characteristic of index of refraction different from that of the other glass material. Further, a temperature control device for controlling a temperature of at least one of the optical members is provided. An imaging characteristic of the projection optical system is controlled. The imaging characteristic to be controlled is a non-linear magnification or curvature of field. The temperature control device sets the temperature to be controlled to a variable target temperature determined in accordance with the imaging characteristic of the projection optical system. An exposing operation for transferring a mask pattern to a photosensitive substrate is started after the temperature of the optical member to be controlled reaches a predetermined allowable range of the target temperature.

Abstract: A scanning projection exposure apparatus includes an illumination optical system for illuminating an original with pulse light, a projection optical system for projecting a pattern of the original, illuminated with the pulse light, onto a substrate, a moving device for moving the original and the substrate relative to each other, a position measuring device for measuring a relative positional relation between the original and the substrate, and a controller for discriminating whether the positional relation measured by the position measuring device is in a predetermined range. The discrimination is performed within a period after the moving device initiates the relative movement of the original and the substrate and before the illumination optical system initiates the projection exposure with the pulse light. The controller stops the projection exposure with the pulse light from the illumination optical system when the positional relation is discriminated as being out of a predetermined range.