Abstract: The present disclosure provides an electrostatic chuck and a reaction chamber. The electrostatic chuck includes an insulation layer and a heating body arranged at a bottom of the insulation layer. The electrostatic chuck further includes a cooling pipeline. The cooling pipeline is arranged under the heating body, spaced apart from the heating body, and configured to transfer cooling liquid to absorb heat radiated by the heating body. The electrostatic chuck further includes a thin-wall structure respectively connected to the heating body and the cooling pipeline. The thin-wall structure is configured to reduce heat dissipation efficiency between the heating body and the cooling pipeline. The electrostatic chuck provided by the present disclosure may realize stable temperature control for the heating body during a processing process to effectively reduce whisker defects and to improve the product yield.

Abstract: Described are electrostatic chucks designed for use in supporting a workpiece during a workpiece processing step, the electrostatic chuck including a gas flow system.

Abstract: A method of manufacturing a composite sintered body includes a step (Step S11) of molding mixed powder in which Al2O3, SiC, and MgO are mixed, into a green body having a predetermined shape and a step (Step S12) of generating a composite sintered body by sintering the green body. Then, in Step S11, the ratio of SiC to the mixed powder is not lower than 4.0 weight percentage and not higher than 13.0 weight percentage. Further, the purity of Al2O3 in Step S11 is not lower than 99.9%. It is thereby possible to suppress the abnormal grain growth of Al2O3 and suitably manufacture a composite sintered body having high relative dielectric constant and withstand voltage, and low tan ?.

Abstract: This disclosure describes systems, methods, and apparatus for non-invasive wafer chuck monitoring using a low voltage AC signal injected into a high voltage DC chucking voltage provided to a wafer chuck. Monitoring the injected signal can provide insight into the wafer chucking state and remedial actions, such as realignment of the wafer with the wafer chuck, can be carried out. Because of the low voltage nature of the AC signal, wafer chuck monitoring can be performed without influencing chucking performed by the higher voltage DC chucking voltage.

Abstract: A method and apparatus provide an improved way to monitor a circuit for deterioration and obtain an advance warning of the deterioration so that action can be taken before the circuit breaker may trip for the circuit. The method establishes a baseline for the circuit, including monitoring the zero crossing point for the voltage and current for the circuit. In operation, the circuit is monitored using the zero crossing point and this information is compared to the baseline to determine if a change has occurred. The baseline information establishes thresholds that signify that the circuit is deteriorating so that the appropriate signal can be provided so that an appropriate action can be taken, interrupt the circuit, take remedial action, etc.

Abstract: There is provided a substrate fixing device. The substrate fixing device includes: a base plate; and an electrostatic chuck that is fixed to the base plate and configured to adsorb a subject by electrostatic force. The electrostatic chuck includes: an adsorptive layer configured to adsorb and retain the subject; and a heater layer that is provided between the adsorptive layer and the base plate and configured to heat the subject retrained by the adsorptive layer. A thickness of the heater layer is uniform over an entire area of the heater layer.

Abstract: To recognize a fault in an arrangement including a transformer having a primary winding connected in series with a DC voltage line and a secondary winding coupled magnetically to the primary winding, and including an evaluation unit that processes a secondary signal on the secondary winding, a signal component at at least one frequency is determined from the secondary signal and a signal level of the signal component is compared with a signal threshold. The fault is detected when the signal level falls below the signal threshold.

Abstract: The present invention relates to a method for manufacturing an electrostatic chuck comprising: a base member of a metal material; and a dielectric layer, formed on an upper surface of the base member, including an electrode layer to the inside of which a DC power is applied. According to the present invention, the dielectric layer is formed of a ceramic material by using at least one selected from among a plasma spraying method and a sol-gel method, and thus can be provided with low porosity to increase in lifespan, and with high permittivity to increase in adhesion force to a substrate.

Abstract: Systems and methods for calibrating a low-power voltage transformer (LPVT). Systems include a capacitive voltage divider and a variable capacitance device connected to the capacitive voltage divider. A parameter of the variable capacitance device is adjusted to minimize the ratio error of the LPVT. Methods include connecting a variable capacitance device to a capacitive voltage divider of the LPVT system, measuring a ratio error of the LPVT system based on an output of the variable capacitance device, and adjusting a parameter of the variable capacitance device.

Abstract: This electrostatic chuck device (1) includes a base (11) having one main surface serving as a mounting surface (19) on which a plate-shaped sample is mounted, and an electrode for electrostatic attraction (13) provided on the side opposite to the mounting surface (19) in the base (11), in which the base (11) consists of a ceramic material as a forming material, and the ceramic material contains aluminum oxide and silicon carbide as main components thereof, and has a layered graphene present at a grain boundary of the aluminum oxide.

Abstract: An inrush current limiting circuit in aspects of the present disclosure may have one or more of the following features: a printed circuit board, an electrical input disposed on the circuit board, one or more electrical outputs disposed on the circuit board, a current limiting circuit connected between the electrical input and the one or more electrical outputs, at least one microcontroller connected within the current limiting circuit, at least one current sensor connected within the current limiting circuit, one or more current limiting components within the current limiting circuit for increasing voltage and current over time from the electrical input to the one or more electrical outputs by operation of the current sensor and the microcontroller.

Abstract: A head-mounted device includes a device housing, a display device, an optical system, and a headband. The head-mounted device also includes a first headband connector that includes a headband-side connector portion that is connected to the headband at a first end of the headband and a device-side connector portion that is connected to the device housing. The first headband connector is movable between a disconnected position, in which the headband-side connector portion is disconnected from the device-side connector portion, and a connected position, in which the headband-side connector portion is connected to the device-side connector portion. The first headband connector also includes paired magnetic components that are configured to attract the headband-side connector portion and the device-side connector portion to one another to urge the first headband connector to move to the connected position.

Abstract: An electromagnetic actuator device includes an actuator having an actuator coil and a tappet that can be moved in and against a longitudinal direction. The actuator device includes a sensor device having a transmitter element arranged on the tappet and a sensor element for generating a measurement signal, containing information about a current actual position of the tappet, depending on a magnetic field generated by the transmitter element. The actuator device includes a control unit with a controller, which applies a control voltage to the actuator coil for generating an electromagnetic field during operation in dependence on a position signal based on the measurement signal, so that the tappet moves into a target position. During operation, a stray magnetic field is generated by the at actuator coil, an adaptation of the measurement signal is performed to compensate for the influence on the measurement signal caused by the stray field.

Abstract: This disclosure relates generally to a device for measuring the volume of a female breast. The disclosure is more particularly comprising of a cup-like template of variable size to embrace a breast to be measured and having an interior wall located in proximity to a breast to be measured and the cup-like template further comprises openings permit passage of excess fluid out of the space between said interior wall and the patient's breast as fluid is injected into said space, a sealing means all around periphery thereof for contact with a patient's skin of the breast to be measured, connector means in said template for passage of a fluid into the space formed between said interior wall and the breast to be measured when the template is sealed against the patient's skin by said sealing means, and a container for measuring the volume of fluid.

Abstract: Electrostatic chucks and method for forming the same are described herein. The electrostatic chucks include a backside gas passage having a ceramic porous plug secured therein by a ceramic body of the chuck with a ceramic-to-ceramic body. In one example, ceramic porous plug is sintered with the ceramic body.

Abstract: A method, apparatus, and system for disconnecting loads from the electrical grid based on a power line frequency are disclosed. An electricity meter may monitor a power line frequency of a source power line connected to the electricity meter, and in response to determining that the power line frequency is lower than a disconnect threshold frequency, may open an internal switch and disconnect a load side output of the electricity meter from the source power line.

Abstract: An arc suppressing circuit configured to suppress arcing across a power contactor coupled to an alternating current (AC) power source having a predetermined number of phases, each contact of the power contactor corresponding to one of the predetermined number of phases includes a number of dual unidirectional arc suppressors equal to the predetermined number of phases of the AC power source. Each dual unidirectional arc suppressor includes a first phase-specific arc suppressor configured to suppress arcing across the associated contacts in a positive domain, a a second phase-specific arc suppressor configured to suppress arcing across the associated contacts in a negative domain, and a coil lock controller, configured to be coupled between a contact coil driver of the power contactor, configured to detect an output condition from the contact coil driver and inhibit operation of the first and second phase-specific arc suppressors over a predetermined time.

Abstract: Embodiments of negative pressure wound therapy systems and methods are disclosed. In one embodiment, an apparatus includes a housing, negative pressure source, circuit board, and one or more controllers. The circuit board can be supported by the housing and include a conductive pathway extending around at least part of a perimeter of a first side of the circuit board. The conductive pathway can be electrically coupled to an electrical ground for the circuit board. The one or more controllers can be mounted on the circuit board and activate and deactivate the negative pressure source.

Abstract: A facepiece charging device comprising a receptacle system, an electrostatic charging system, and a support structure. The receptacle system is configured to detachably receive and secure a facepiece. The electrostatic charging system is configured to transfer an electrostatic charge to the facepiece when energized. The support structure has a moveable guide system coupled to at least one of the receptacle system or the electrostatic charging system. The moveable guide system has at least an engaged position where the receptacle system is adjacent the electrostatic charging system to electrostatically charge the facepiece and a disengaged position where the receptacle system is spaced from the electrostatic charging system.

Abstract: The present disclosure provides a coil driving device comprising: an input voltage sensing unit for sensing an input voltage; a switch unit configured to make a switching operation to supply a driving current to a coil; a PWM circuit unit for outputting a pulse width modulation (PWM) signal for the switching operation of the switch unit; an impedance adjustment unit for varying an impedance value such that the PWM signal is adjusted, thereby limiting the driving current; and a control unit for causing the impedance adjustment unit to vary the impedance value on the basis of the input voltage, thereby adjusting at least one of the duty ratio of the PWM signal and the frequency thereof.