Patents Examined by Sun M King
  • Patent number: 9752251
    Abstract: A self-limiting selective epitaxy process can be employed on a plurality of semiconductor fins such that the sizes of raised active semiconductor regions formed by the selective epitaxy process are limited to dimensions determined by the sizes of the semiconductor fins. Specifically, the self-limiting selective epitaxy process limits growth of the semiconductor material along directions that are perpendicular to crystallographic facets formed during the selective epitaxy process. Once the crystallographic facets become adjoined to one another or to a dielectric surface, growth of the semiconductor material terminates, thereby preventing merger among epitaxially deposited semiconductor materials.
    Type: Grant
    Filed: April 15, 2013
    Date of Patent: September 5, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kevin K. Chan, Eric C. Harley, Yue Ke, Annie Levesque
  • Patent number: 9755060
    Abstract: A method of forming an integrated circuit employs a plurality of layers formed on a substrate including i) bottom n-type ohmic contact layer, ii) p-type modulation doped quantum well structure (MDQWS) with a p-type charge sheet formed above the bottom n-type ohmic contact layer, iii) n-type MDQWS offset vertically above the p-type MDQWS, and iv) etch stop layer formed above the p-type MDQWS. P-type ions are implanted to define source/drain ion-implanted contact regions of a p-channel HFET which encompass the p-type MDQWS. An etch operation removes layers above the etch stop layer of iv) for the source/drain ion-implanted contact regions using an etchant that automatically stops at the etch stop layer of iv). Another etch operation removes remaining portions of the etch stop layer of iv) to form mesas that define an interface to the source/drain ion-implanted contact regions of the p-channel HFET. Source/Drain electrodes are on such mesas.
    Type: Grant
    Filed: June 11, 2015
    Date of Patent: September 5, 2017
    Assignees: Opel Solar, Inc., THE UNIVERSITY OF CONNECTICUT
    Inventor: Geoff W. Taylor
  • Patent number: 9748388
    Abstract: A method of fabricating a semiconductor device comprises providing a substrate with a shallow trench isolation (STI) within the substrate and a gate stack. A cavity is formed between the gate stack and the STI. The cavity comprises one sidewall formed by the STI, one sidewall formed by the substrate, and a bottom surface formed by the substrate. A film is grown in the cavity and thereafter an opening formed by removing a first portion of the strained film until exposing the bottom surface of the substrate while a second portion of the strained film adjoins the STI sidewall. Another epitaxial layer is then grown in the opening.
    Type: Grant
    Filed: January 25, 2016
    Date of Patent: August 29, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Hsien Wu, Chih-Hsin Ko, Clement Hsingjen Wann
  • Patent number: 9721862
    Abstract: A semiconductor device includes a standardized carrier. A semiconductor wafer includes a plurality of semiconductor die and a base semiconductor material. The semiconductor wafer is singulated through a first portion of the base semiconductor material to separate the semiconductor die. The semiconductor die are disposed over the standardized carrier. A size of the standardized carrier is independent from a size of the semiconductor die. An encapsulant is deposited over the standardized carrier and around the semiconductor die. An interconnect structure is formed over the semiconductor die while leaving the encapsulant devoid of the interconnect structure. The semiconductor device is singulated through the encapsulant. Encapsulant remains disposed on a side of the semiconductor die.
    Type: Grant
    Filed: September 25, 2013
    Date of Patent: August 1, 2017
    Assignee: STATS ChipPAC Pte. Ltd.
    Inventors: Byung Joon Han, Il Kwon Shim, Yaojian Lin, Pandi C. Marimuthu
  • Patent number: 9685434
    Abstract: Embodiments in accordance with the present invention include a method of fabricating a semiconductor device including forming a first dummy gate in an active area on a first portion of a semiconductor device, wherein the first dummy gate includes undoped amorphous silicon. A second dummy gate and a third dummy gate are formed on a second portion of the semiconductor device, wherein the second dummy gate and the third dummy gate include undoped amorphous silicon. A filling material is deposited on the semiconductor device, where the filling material is doped amorphous silicon, and a chemical-mechanical polishing process is performed on the filling material.
    Type: Grant
    Filed: December 10, 2014
    Date of Patent: June 20, 2017
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Ali Khakifirooz, Alexander Reznicek, Charan V. V. S. Surisetty
  • Patent number: 9679987
    Abstract: A method of forming an integrated circuit employs a plurality of layers formed on a substrate including i) n-type modulation doped quantum well structure (MDQWS) structure with n-type charge sheet, ii) p-type MDQWS, iii) undoped spacer layer formed on the n-type charge sheet, iv) p-type layer(s) formed on the undoped spacer layer, v) p-type etch stop layer formed on the p-type layer(s) of iv), and vi) p-type layers (including p-type ohmic contact layer(s)) formed on the p-type etch stop layer. An etch operation removes the p-type layers of vi) for a gate region of an n-channel HFET with an etchant that automatically stops at the p-type etch stop layer. Another etch operation removes the p-type etch stop layer to form a mesa at the p-type layer(s) of iv) which defines an interface to the gate region of the n-channel HFET, and a gate electrode is formed on such mesa.
    Type: Grant
    Filed: June 11, 2015
    Date of Patent: June 13, 2017
    Assignee: THE UNIVERSITY OF CONNECTICUT
    Inventor: Geoff W. Taylor
  • Patent number: 9666719
    Abstract: To offer a semiconductor device including a thin film transistor having excellent characteristics and high reliability and a method for manufacturing the semiconductor device without variation. The summary is to include an inverted-staggered (bottom-gate structure) thin film transistor in which an oxide semiconductor film containing In, Ga, and Zn is used for a semiconductor layer and a buffer layer is provided between the semiconductor layer and source and drain electrode layers. An ohmic contact is formed by intentionally providing a buffer layer containing In, Ga, and Zn and having a higher carrier concentration than the semiconductor layer between the semiconductor layer and the source and drain electrode layers.
    Type: Grant
    Filed: July 29, 2009
    Date of Patent: May 30, 2017
    Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    Inventors: Shunpei Yamazaki, Hidekazu Miyairi, Akiharu Miyanaga, Kengo Akimoto, Kojiro Shiraishi
  • Patent number: 9659843
    Abstract: A lead frame strip has a plurality of unit lead frames. Each of the unit lead frames has a periphery structure connecting adjacent ones of the unit lead frames, a die paddle inside of the periphery structure, a plurality of leads connected to the periphery structure and extending towards the die paddle, and a molding compound channel in the periphery structure configured to guide liquefied molding material. The lead frame strip is processed by attaching a semiconductor die to each of the die paddles, electrically connecting each of the semiconductor dies to the leads, and forming a liquefied molding compound on each of the unit lead frames. The liquefied molding compound is formed such that the liquefied molding compound encapsulates the semiconductor dies and flows into the molding compound channels thereby forming molding extensions that extend onto the periphery structures.
    Type: Grant
    Filed: November 5, 2014
    Date of Patent: May 23, 2017
    Assignee: Infineon Technologies AG
    Inventors: Boon Teik Tee, Tiam Sen Ong
  • Patent number: 9660148
    Abstract: A method for manufacturing a light emitting device comprises a package preparation step of preparing a package having a recess in which a light emitting element is locatable, wherein the package includes a projection extending from an upper surface of the package, the projection at least partially surrounding the recess, a sealing resin forming step of filling said recess in which said light emitting element is located with a sealing resin, and providing said sealing resin higher than the height of said package, and a sealing resin cutting step of cutting the sealing resin such that an upper surface of the sealing resin is at a height that is substantially the same as a height of the upper surface of the package.
    Type: Grant
    Filed: March 24, 2014
    Date of Patent: May 23, 2017
    Assignee: NICHIA CORPORATION
    Inventors: Yusuke Shimada, Motoaki Mando
  • Patent number: 9653358
    Abstract: The present invention presents a method for manufacturing a semiconductor device structure as well as the semiconductor device structure. Said method comprises: providing a semiconductor substrate; forming a first insulating layer on the semiconductor substrate; forming a shallow trench isolation embedded in the first insulating layer and the semiconductor substrate; forming a channel region embedded in the semiconductor substrate; and forming a gate stack stripe on the channel region. Said method further comprises, before forming the channel region, performing a source/drain implantation on the semiconductor substrate. By means of forming the source/drain regions in a self-aligned manner before forming the channel region and the gate stack, said method achieves the advantageous effects of the replacement gate process without using a dummy gate, thereby simplifying the process and reducing the cost.
    Type: Grant
    Filed: February 25, 2011
    Date of Patent: May 16, 2017
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Huicai Zhong, Qingqing Liang