Patents Examined by Syed I Gheyas
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Patent number: 11710771Abstract: Structures for a bipolar junction transistor and methods of forming a structure for a bipolar junction transistor. The structure includes an emitter having a raised portion, a collector having a raised portion, and a base having a base layer and an extrinsic base layer stacked with the base layer. The base layer and the extrinsic base layer are positioned in a lateral direction between the raised portion of the emitter and the raised portion of the collector, the base layer has a first width in the lateral direction, the extrinsic base layer has a second width in the lateral direction, and the second width is greater than the first width.Type: GrantFiled: November 11, 2021Date of Patent: July 25, 2023Assignee: GlobalFoundries U.S. Inc.Inventors: Alexander Derrickson, Judson R. Holt, Haiting Wang, Jagar Singh, Vibhor Jain
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Patent number: 11710776Abstract: A bipolar transistor includes a stack of an emitter, a base, and a collector. The base is structured to have a comb shape including fingers oriented in a plane orthogonal to a stacking direction of the stack.Type: GrantFiled: August 13, 2021Date of Patent: July 25, 2023Assignee: STMicroelectronics (Crolles 2) SASInventors: Alexis Gauthier, Edoardo Brezza, Pascal Chevalier
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Patent number: 11710783Abstract: Various embodiments of the present disclosure are directed towards a method for forming a bipolar junction transistor (BJT). A dielectric film is deposited over a substrate and comprises a lower dielectric layer, an upper dielectric layer, and an intermediate dielectric layer between the lower and upper dielectric layers. A first semiconductor layer is deposited over the dielectric film and is subsequently patterned to form an opening exposing the dielectric film. A first etch is performed into the upper dielectric layer through the opening to extend the opening to the intermediate dielectric layer. Further, the first etch stops on the intermediate dielectric layer and laterally undercuts the first semiconductor layer. Additional etches are performed to extend the opening to the substrate. A lower base structure and an emitter are formed stacked in and filling the opening, and the first semiconductor layer is patterned to form an upper base structure.Type: GrantFiled: November 17, 2021Date of Patent: July 25, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chun-Tsung Kuo, Jiech-Fun Lu
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Patent number: 11700776Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a substrate and a quantum well stack disposed on the substrate. The quantum well stack may include a quantum well layer and a back gate, and the back gate may be disposed between the quantum well layer and the substrate.Type: GrantFiled: February 4, 2022Date of Patent: July 11, 2023Assignee: Intel CorporationInventors: Jeanette M. Roberts, Ravi Pillarisetty, David J. Michalak, Zachary R. Yoscovits, James S. Clarke, Van H. Le
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Patent number: 11688639Abstract: A semiconductor device and method of manufacture are provided. In an embodiment a first semiconductor device and a second semiconductor device are formed within a semiconductor wafer and a scribe region between the first semiconductor device and the second semiconductor device is patterned. A singulation process is then utilized within the scribe region to singulate the first semiconductor device from the second semiconductor device. The first semiconductor device and the second semiconductor device are then bonded to a second semiconductor substrate and thinned in order to remove extension regions from the first semiconductor device and the second semiconductor device.Type: GrantFiled: December 16, 2019Date of Patent: June 27, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chen-Hua Yu, Hung-Pin Chang, Yi-Hsiu Chen, Ku-Feng Yang, Wen-Chih Chiou
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Patent number: 11680340Abstract: Methods and systems for low etch pit density 6 inch semi-insulating gallium arsenide wafers may include a semi-insulating gallium arsenide single crystal wafer having a diameter of 6 inches or greater without intentional dopants for reducing dislocation density, an etch pit density of less than 1000 cm?2, and a resistivity of 1×107 ?-cm or more. The wafer may have an optical absorption of less than 5 cm?1 less than 4 cm?1 or less than 3 cm?1 at 940 nm wavelength. The wafer may have a carrier mobility of 3000 cm2/V-sec or higher. The wafer may have a thickness of 500 ?m or greater. Electronic devices may be formed on a first surface of the wafer. The wafer may have a carrier concentration of 1.1×107 cm?3 or less.Type: GrantFiled: December 11, 2019Date of Patent: June 20, 2023Assignee: AXT, Inc.Inventors: Rajaram Shetty, Weiguo Liu, Morris Young
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Patent number: 11682701Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack and a plurality of linear arrays of gates above the quantum well stack to control quantum dot formation in the quantum well stack. An insulating material may be between a first linear array of gates and a second linear array of gates, the insulating material may be between individual gates in the first linear array of gates, and gate metal of the first linear array of gates may extend over the insulating material.Type: GrantFiled: March 27, 2019Date of Patent: June 20, 2023Assignee: Intel CorporationInventors: Stephanie A. Bojarski, Hubert C. George, Sarah Atanasov, Nicole K. Thomas, Ravi Pillarisetty, Lester Lampert, Thomas Francis Watson, David J. Michalak, Roman Caudillo, Jeanette M. Roberts, James S. Clarke
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Patent number: 11677017Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include a (111) silicon substrate, a (111) germanium quantum well layer above the substrate, and a plurality of gates above the quantum well layer. In some embodiments, a quantum dot device may include a silicon substrate, an insulating material above the silicon substrate, a quantum well layer above the insulating material, and a plurality of gates above the quantum well layer.Type: GrantFiled: September 10, 2021Date of Patent: June 13, 2023Assignee: Intel CorporationInventors: Ravi Pillarisetty, Van H. Le, Nicole K. Thomas, Hubert C. George, Jeanette M. Roberts, Payam Amin, Zachary R. Yoscovits, Roman Caudillo, James S. Clarke, Roza Kotlyar, Kanwaljit Singh
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Patent number: 11676853Abstract: A method includes: forming a first conductive structure in a first dielectric layer; forming a conductive protection structure that is coupled to at least part of the first conductive structure; forming a second dielectric layer over the first dielectric layer; forming a via hole extending through at least part of the second dielectric layer to expose a portion of the conductive protection structure; cleaning the via hole; and refilling the via hole with a conductive material to form a via structure.Type: GrantFiled: July 27, 2020Date of Patent: June 13, 2023Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hung-Chih Yu, Chien-Mao Chen
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Patent number: 11678491Abstract: An integrated circuit (IC) includes a semiconductor-on-insulator (SOI) substrate comprising a handle substrate, an insulator layer over the handle substrate, and a semiconductor device layer over the insulator layer. A logic device includes a logic gate arranged over the semiconductor device layer. The logic gate is arranged within a high ? dielectric layer. A memory cell includes a control gate and a select gate laterally adjacent to one another and arranged over the semiconductor device layer. A charge-trapping layer underlies the control gate.Type: GrantFiled: June 2, 2021Date of Patent: June 13, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chien Hung Liu, Chih-Wei Hung
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Patent number: 11670709Abstract: Disclosed herein are IC structures, packages, and device assemblies with III-N transistors that include additional materials, referred to herein as “stressor materials,” which may be selectively provided over portions of polarization materials to locally increase or decrease the strain in the polarization material. Providing a compressive stressor material may decrease the tensile stress imposed by the polarization material on the underlying portion of the III-N semiconductor material, thereby decreasing the two-dimensional electron gas (2DEG) and increasing a threshold voltage of a transistor. On the other hand, providing a tensile stressor material may increase the tensile stress imposed by the polarization material, thereby increasing the 2DEG and decreasing the threshold voltage. Providing suitable stressor materials enables easier and more accurate control of threshold voltage compared to only relying on polarization material recess.Type: GrantFiled: March 11, 2019Date of Patent: June 6, 2023Assignee: Intel CorporationInventors: Sansaptak Dasgupta, Marko Radosavljevic, Han Wui Then, Nidhi Nidhi, Rahul Ramaswamy, Paul B. Fischer, Walid M. Hafez, Johann Christian Rode
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Patent number: 11658055Abstract: Embodiments disclosed herein include electronic packages and methods of forming such packages. In an embodiment, the electronic package comprises a package substrate having a first surface and a second surface opposite from the first surface, and a monolayer having a plurality of first molecules over the first surface of the package substrate. In an embodiment, the first molecules each comprise a first functional group attached to the first surface, and a first release moiety attached to the first functional group.Type: GrantFiled: March 25, 2019Date of Patent: May 23, 2023Inventors: Suddhasattwa Nad, Rahul Manepalli
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Patent number: 11658210Abstract: The present disclosure provides an HBT that includes (i) a semiconductor support layer; at least four wall structures side-by-side on the support layer; (iii) a semiconductor collector-material ridge structure disposed on the support layer between two adjacent wall structures of the at least four wall structures; (iv) a semiconductor base-material layer, wherein a first part of the base-material layer is disposed on a first region of the ridge structure and a second part of the base-material layer is disposed across the wall structures, wherein the base-material layer is supported by the wall structures; (v) a semiconductor emitter-material layer disposed on the first part of the base-material layer; (vi) a base contact layer disposed on the second part of the base-material layer; an emitter contact layer disposed on the emitter-material layer; and (viii) a collector contact layer disposed on a second region of the ridge structure.Type: GrantFiled: July 7, 2021Date of Patent: May 23, 2023Assignee: Imec VZWInventor: Abhitosh Vais
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Patent number: 11654596Abstract: Silicon carbide (SiC) wafers and related methods are disclosed that include intentional or imposed wafer shapes that are configured to reduce manufacturing problems associated with deformation, bowing, or sagging of such wafers due to gravitational forces or from preexisting crystal stress. Intentional or imposed wafer shapes may comprise SiC wafers with a relaxed positive bow from silicon faces thereof. In this manner, effects associated with deformation, bowing, or sagging for SiC wafers, and in particular for large area SiC wafers, may be reduced. Related methods for providing SiC wafers with relaxed positive bow are disclosed that provide reduced kerf losses of bulk crystalline material. Such methods may include laser-assisted separation of SiC wafers from bulk crystalline material.Type: GrantFiled: February 18, 2021Date of Patent: May 23, 2023Assignee: WOLFSPEED, INC.Inventors: Simon Bubel, Matthew Donofrio, John Edmond, Ian Currier
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Patent number: 11652142Abstract: A structure for a lateral bipolar junction transistor is provided. The structure comprising an emitter including a first concentration of a first dopant. A collector including a second concentration of the first dopant, the first concentration of the first dopant may be different from the second concentration of the first dopant. An intrinsic base may be laterally arranged between the emitter and the collector, and an extrinsic base region may be above the intrinsic base. An emitter extension may be arranged adjacent to the emitter, whereby the emitter extension laterally extends under a portion of the extrinsic base region. A halo region may be arranged adjacent to the emitter extension, whereby the halo region laterally extends under another portion of the extrinsic base region.Type: GrantFiled: September 22, 2021Date of Patent: May 16, 2023Assignee: GlobalFoundries U.S. Inc.Inventors: Mankyu Yang, Richard Taylor, III, Alexander Derrickson, Alexander Martin, Jagar Singh, Judson Robert Holt, Haiting Wang
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Patent number: 11646348Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a heterojunction bipolar transistor and methods of manufacture. The structure includes: a sub-collector region; a collector region above the sub-collector region; an intrinsic base region composed of intrinsic base material located above the collector region; an emitter located above and separated from the intrinsic base material; and a raised extrinsic base having a stepped configuration and separated from and self-aligned to the emitter.Type: GrantFiled: September 13, 2021Date of Patent: May 9, 2023Assignee: GLOBALFOUNDRIES U.S. INC.Inventors: John J. Pekarik, Vibhor Jain
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Patent number: 11637181Abstract: The present disclosure relates to semiconductor structures and, more particularly, to lateral bipolar transistors and methods of manufacture. The structure includes: an extrinsic base comprising semiconductor material; an intrinsic base comprising semiconductor material which is located below the extrinsic base; a polysilicon emitter on a first side of the extrinsic base; a raised collector on a second side of the extrinsic base; and sidewall spacers on the extrinsic base which separate the extrinsic base from the polysilicon emitter and the raised collector.Type: GrantFiled: October 25, 2021Date of Patent: April 25, 2023Assignee: GLOBALFOUNDRIES U.S. INC.Inventors: Vibhor Jain, Alvin J. Joseph, Alexander Derrickson, Judson R. Holt, John J. Pekarik
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Patent number: 11621235Abstract: Structures and methods for reducing thermal expansion mismatch during chip scale packaging are disclosed. In one example, a semiconductor structure is disclosed. The semiconductor structure includes a first metal layer over a substrate, a dielectric region, and a polymer region. The first metal layer comprises a first device metal structure. The dielectric region is formed over the first metal layer. The polymer region is formed over the dielectric region. The dielectric region comprises a plurality of metal layers and an inter-metal dielectric layer comprising dielectric material between each pair of two adjacent metal layers in the plurality of metal layers. Each of the plurality of metal layers comprises a dummy metal structure over the first device metal structure. The dummy metal structures in each pair of two adjacent metal layers in the plurality of metal layers shield respectively two non-overlapping portions of the first device metal structure from a top view of the semiconductor structure.Type: GrantFiled: June 30, 2021Date of Patent: April 4, 2023Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Kuen-Shian Chen, Chien-Li Kuo
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Patent number: 11613653Abstract: Provided herein are dyes, dye-sensitized solar cells, and sequential series multijunction dye-sensitized solar cell devices. The dyes include an electron deficient acceptor moiety, a medium electron density ?-bridge moiety, and an electron rich donor moiety comprising a biaryl, a substituted biaryl, or an R1, R2, R3 substituted phenyl where each of R1, R2, and R3 independently comprises H, aryl, multiaryl, alkyl substituted aryl, alkoxy substituted aryl, alkyl substituted multiaryl, alkoxy substituted multiaryl, OR4, N(R5)2, or a combination thereof; each R4 independently comprises H, alkyl, aryl, alkyl substituted aryl, alkoxy substituted aryl, or a combination thereof; and each R5 independently comprises aryl, multiaryl, alkyl substituted aryl, alkoxy substituted aryl, alkyl substituted multiaryl, alkoxy substituted multiaryl, or a combination thereof. The solar cells include a glass substrate, a dye-sensitized active layer, and a redox shuttle.Type: GrantFiled: July 26, 2018Date of Patent: March 28, 2023Assignee: UNIVERSITY OF MISSISSIPPIInventors: Jared Heath Delcamp, Roberta Ramalho Rodrigues, Adithya Peddapuram, Hammad Arshad Cheema
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Patent number: 11612017Abstract: There is provided a substrate processing apparatus, including: a substrate holding/rotating part configured to hold a substrate on a mounting table and rotate the substrate; a laser irradiation head configured to irradiate a laser beam toward a lower surface of the mounting table; and a controller configured to control at least the rotation of the substrate holding/rotating part and the irradiation of the laser beam. The laser irradiation head is fixed below the mounting table so as to be spaced apart from the mounting table. The controller controls the laser irradiation head to irradiate the laser beam when the mounting table is rotated by the substrate holding/rotating part.Type: GrantFiled: November 5, 2019Date of Patent: March 21, 2023Assignee: TOKYO ELECTRON LIMITEDInventor: Eiichi Sekimoto