Abstract: Disclosed is a noncontact metrology probe including: a first camera including a first field of view; a second camera including a second field of view and arranged such that the second field of view overlaps the first field of view to form a prime focal volume; a third camera including a third field of view and arranged such that the third field of view overlaps the prime focal volume to form a probe focal volume; and a tracker including a tracker field of view to determine a location of the probe focal volume in the tracker field of view.

Abstract: A printer that incorporates a spectrometry device includes a spectroscope, a distance measurer, and a spectrometry unit. The spectroscope includes a wavelength-selective interference filter on which light from a position of measurement in a medium is incident. The distance measurer measures the distance between the position of measurement and the spectroscope, and the spectrometry unit performs spectrometry at the position of measurement by using the spectroscope and correct a measured value obtained by the spectrometry based on the measured distance.

Abstract: Spectrometers and methods for determining the presence or absence of a material in proximity to and/or combined with another material are provided. In one particular example, a spectrometer is provided that includes a light source, a detector and an optical system. In this implementation, the light source is configured to provide an excitation incident beam. The detector is configured to detect a spectroscopy signal. The optical system is configured to direct the excitation incident beam toward a sample at a non-zero angle from a zero-angle reference. The optical system is further configured to receive a spectroscopy signal from the sample and provide the spectroscopy signal to the detector. The detector is configured to remove a spectral interference component of the spectroscopy signal.

Abstract: A flexible apparatus is provided. The flexible apparatus includes a plurality of motion sensors mounted on different locations of the flexible apparatus, a storage configured to store operation information of the flexible apparatus corresponding to a bending shape, and a controller configured to determine a bending shape of the flexible apparatus based on a sensing value of each of the plurality of motion sensors, and to perform an operation corresponding to the determined bending shape based on the operation information stored in the storage.

Abstract: A transparent tube is placed in a parallel laser light beam emitted from a light projector and reaching a photoreciever, and a detection signal indicating an amount of light received corresponding to a width direction position of the parallel laser light beam is obtained from the photoreceiver. Peaks formed in the detection signal by beams reflected by an inner circumferential surface of the transparent tube and incident to the photoreceiver are detected; width direction positions of two intersection points where the peaks cross a predetermined threshold value are detected; the width direction positions of the light beam reflected by the inner circumferential surface of the transparent tube are calculated from an average value of the two intersection points; and an internal diameter of the transparent tube is measured from the width direction positions.

Abstract: Method and system for measuring one or more parameters of a patterned structure, using light source producing an input beam of at least partially coherent light in spatial and temporal domains, a detection system comprising a position sensitive detector for receiving light and generating measured data indicative thereof, an optical system configured for focusing the input light beam onto a diffraction limited spot on a sample's surface, collecting an output light returned from the illuminated spot, and imaging the collected output light onto a light sensitive surface of the position sensitive detector, where an image being indicative of coherent summation of output light portions propagating from the structure in different directions.

Abstract: An apparatus and a method for aligning a substrate are disclosed. In one aspect, the substrate aligning apparatus includes a stage configured to support a plurality of substrates, a supporting pin placed in the stage to support the substrates and an alignment clamp configured to respectively move each of the substrates to align the substrates. The alignment clamp can respectively align at least two of the substrates with reference to an alignment reference position as a two-dimensional coordinate system which includes a first axis and a second axis crossing the first axis and is set on an imaginary plane by the first and second axes.

Abstract: Methods and apparatuses of generating and processing a real-time time-domain cavity ringdown spectroscopy (CRDS) signal from absorbing species in an optical detection system having an optical ringdown cavity using off-axis paths are provided. At least one modulated light signal is generated using one or more light sources, each modulated at specified modulation frequency. Each modulated signal has harmonic frequency components and is input off-axis relative to the cavity's optical axis. The cavity contains mirrors arranged in a predetermined configuration. The optical axis is defined by a path passing through centers of mirrors. The modulated light signal is resonated off axis without astigmatic optical elements to produce CRDS signal and passes at least twice through cavity and across the mirrors without interfering with itself. An overall path length through cavity is greater than path length of optical axis. A photodetector detects the CRDS signal, which is demodulated dependent upon selected harmonics.

Abstract: An optical probe for irradiating light onto a subject includes an optical path control unit configured to receive light from outside the optical probe, and change a path of the light within the optical probe; an optical path length control element configured to receive the light having the changed path from the optical path control unit, and change an optical path length of the light as the optical path control unit changes the path of the light; and an optical output unit configured to receive the light having the changed optical path length from the optical path length control element, and output the light.

Abstract: In various embodiments, an optical alignment structure may be provided. The optical alignment structure may include a light carrying structure configured to receive an input optical light from an external light source. The optical alignment structure may further include a light redirection mechanism coupled to the light carrying structure. The light redirection mechanism may be configured to receive the input optical light from the light carrying structure. The light redirection mechanism may be further configured to redirect the input optical light back to the light carrying structure, the redirected input optical light configured to be detected by a detector for alignment of the optical alignment structure with the external optical source.

Abstract: An overlay mark comprises a first feature in a first layer. The first feature has a length extending in a first longitudinal direction and a width extending in a second longitudinal direction. The length of the first feature is greater than the width of the first feature. The overlay mark also comprises a second feature in a second layer over the first layer. The second feature has a length extending in the second longitudinal direction and a width extending in the first longitudinal direction. The length of the second feature is greater than the width of the second feature. The overlay mark further comprises a third feature in a third layer over the second layer. The third feature is a box-shaped opening in the third layer.

Abstract: A measurement system (10) for determining a polarization parameter of an optical system (50) has an illumination system (12) providing an optical radiation (14), a measurement mask (22) arranged between the illumination system and the optical system and including measurement structures (24) arranged at a plurality of field points (26) of the measurement mask, a polarization variation device (28) arranged in a beam path of the optical radiation and configured to vary a polarization state of the optical radiation in a field-point-dependent manner, such that at the same point in time one of the field points is irradiated with the optical radiation (14-1) in a first polarization state and another of the field points is irradiated with the optical radiation (14-2) in a second polarization state, and a detection module (32), which is configured to detect the optical radiation after it has interacted with the optical system.

Abstract: Methods and systems for providing real-time monitoring of a metal surface are provided herein. The system includes a fiber-optic cable disposed alongside a length of a wall that includes the metal surface. A laser source is attached to the fiber-optic cable to transmit light through the fiber-optic cable. An acoustic source is configured to generate acoustic signals in the metal surface, wherein the acoustic signals interact with the fiber-optic cable and influence characteristics of the light. A receiver is attached to the fiber-optic cable to detect the light. The system also includes a signal processing unit configured to determine a location of a change in the metal surface based on changes in the characteristics of the light.

Abstract: In a photoacoustic measurement apparatus and a probe, artifacts due to photoacoustic waves generated in a surface portion of a subject are reduced without increasing the repetition period of photoacoustic measurement. A measurement light emitting unit emits measurement light toward a subject. An acoustic wave detector detects photoacoustic waves generated within the subject due to the measurement light. A correction light source emits correction light toward the subject. A light intensity detector detects reflected light generated by reflection of the correction light, which is emitted toward the subject, from the subject. In a probe, the correction light source and the light intensity detector are disposed between the measurement light emitting unit and the acoustic wave detector.

Abstract: A detection method in which light is irradiated on a bagged electrode, and an electrode is disposed inside of a bag-shaped separator for detecting breakage of the separator, the method includes capturing an image by irradiating the light onto the bagged electrode so that a first portion in which the light has been transmitted through n layers of the separator, and a second portion in which the light has been transmitted through equal to or less than n?1 layers of the separator, will have mutually different brightness levels, while capturing an image of the bagged electrode, detecting the first portion from the brightness of the image that is obtained by capturing the bagged electrode, and determining a breakage of the separator, based on the distance between edges of the first portion, and of an electrode portion where the light does not pass through.

Abstract: A method for calibrating an optical fluid sensor, the method including providing a calibration element having defined properties similar to those of a fluid to be measured; simulating optical characteristics of the fluid to be measured, with the aid of the calibration element, a measuring radiation being routed onto the calibration element, and evaluating the measuring radiation modified by the calibration element, at least one calibration point of the fluid being ascertained with the aid of the calibration element.

Abstract: A method that includes: illuminating a wafer with excitation light having a wavelength and intensity sufficient to induce photoluminescence in the wafer; filtering photoluminescence emitted from a portion of the wafer in response to the illumination; directing the filtered photoluminescence onto a detector to image the portion of the wafer on the detector with a spatial resolution of 1 ?m×1 ?m or smaller; and identifying one or more crystallographic defects in the wafer based on the detected filtered photoluminescence.

Abstract: A measurement device includes a first flow passage, a heating unit provided on one end side of the first flow passage, a gas detection unit provided on one end side of the first flow passage and capable of detecting a gas through heat applied from the heating unit, and a particle measurement unit which optically measures, at an upper side than the heating unit of the first flow passage, particles passing through the first flow passage.

Abstract: The present invention provides a method and apparatus for the production and labeling of objects in a manner suitable for the prevention and detection of counterfeiting. Thus, the system incorporates a variety of features that make unauthorized reproduction difficult. In addition, the present invention provides an efficient means for the production of labels and verification of authenticity, whereby a recording apparatus which includes a recording medium, having anisotrophic optical domains, along with a means for transferring a portion of the recording medium to a carrier, wherein a bulk portion of the recording medium has macroscopically detectable anisotrophic optical properties and the detecting apparatus thereon.

Abstract: In an example implementation, a method includes illuminating a wafer with excitation light having a wavelength and intensity sufficient to induce photoluminescence in the wafer. The method also includes detecting photoluminescence emitted from a portion of the wafer in response to the illumination, and detecting excitation light reflected from the portion of the wafer. The method also includes comparing the photoluminescence emitted from the portion of the wafer and the excitation light reflected from the portion of the wafer, and identifying one or more defects in the wafer based on the comparison.