Patents Examined by Wael Fahmy
  • Patent number: 9362184
    Abstract: A semiconductor device having Cu wiring including a basic crystal structure which can reduce surface voids, and an inspecting technique for the semiconductor device. In the semiconductor device, surface voids can be reduced down to 1/10 or less of a current practical level by specifying a barrier layer and a seed layer and setting a proportion (frequency) of occupation of a coincidence site lattice (CSL) boundary having a grain boundary Sigma value 27 or less to all crystal grain boundaries of a Cu wiring to 60% or higher. Alternatively, a similar effect of surface void reduction can be obtained by specifying a barrier layer and a seed layer and setting a proportion (frequency) of occupation of a coincidence site lattice (CSL) boundary having a grain boundary Sigma value 3 to all crystal grain boundaries of a Cu wiring to 40% or higher.
    Type: Grant
    Filed: December 22, 2014
    Date of Patent: June 7, 2016
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventors: Takahiko Kato, Hiroshi Nakano, Haruo Akahoshi, Yuuji Takada, Yoshimi Sudo, Tetsuo Fujiwara, Itaru Kanno, Tomoryo Shono, Yukinori Hirose
  • Patent number: 9362228
    Abstract: A method of forming a barrier on both the sidewalls and bottom of a via and the resulting device are provided. Embodiments include forming a metal line in a substrate; forming a Si-based insulating layer over the metal line and the substrate; forming a via in the Si-based insulating layer down to the metal line; forming a dual-layer Mn/MnN on sidewalls and a bottom surface of the via; and filling the via with metal.
    Type: Grant
    Filed: October 22, 2013
    Date of Patent: June 7, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Moosung Chae, Larry Zhao
  • Patent number: 9355927
    Abstract: The present disclosure provides a semiconductor package includes a contact pad, a device external to the contact pad and a solder bump on the contact pad. The device has a conductive contact pad corresponding to the contact pad. The solder bump connects the contact pad with the conductive contact pad. The solder bump comprises a height from a top of the solder bump to the contact pad; and a width which is a widest dimension of the solder bump in a direction perpendicular to the height. A junction portion of the solder bump in proximity to the contact pad comprises an hourglass shape.
    Type: Grant
    Filed: November 25, 2013
    Date of Patent: May 31, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Hsiu-Jen Lin, Wen-Hsiung Lu, Cheng-Ting Chen, Hsuan-Ting Kuo, Wei-Yu Chen, Ming-Da Cheng, Chung-Shi Liu
  • Patent number: 9349769
    Abstract: Various structures of image sensors are disclosed, as well as methods of forming the image sensors. According to an embodiment, a structure comprises a substrate comprising photo diodes, an oxide layer on the substrate, recesses in the oxide layer and corresponding to the photo diodes, a reflective guide material on a sidewall of each of the recesses, and color filters each being disposed in a respective one of the recesses. The oxide layer and the reflective guide material form a grid among the color filters, and at least a portion of the oxide layer and a portion of the reflective guide material are disposed between neighboring color filters.
    Type: Grant
    Filed: October 31, 2013
    Date of Patent: May 24, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei Chuang Wu, Jhy-Jyi Sze, Yu-Jen Wang, Yen-Chang Chu, Shyh-Fann Ting, Ching-Chun Wang
  • Patent number: 9306184
    Abstract: An ordered multilayer crystalline organic thin film structure is formed by depositing at least two layers of thin film crystalline organic materials successively wherein the at least two thin film layers are selected to have their surface energies within ±50% of each other, and preferably within ±15% of each other, whereby every thin film layer within the multilayer crystalline organic thin film structure exhibit a quasi-epitaxial relationship with the adjacent crystalline organic thin film.
    Type: Grant
    Filed: December 22, 2014
    Date of Patent: April 5, 2016
    Assignee: The Regents of the University of Michigan
    Inventors: Stephen R. Forrest, Richard R. Lunt
  • Patent number: 9306126
    Abstract: Transparent conductive layers usable as ohmic contacts for III-V semiconductors with work functions between 4.1 and 4.7 eV are formed by annealing layers of transparent oxide with thin (0.1-5nm) layers of conductive metal. When the layers interdiffuse during the annealing, some of the conductive metal atoms remain free to reduce resistivity and others oxidize to reduce optical absorption. Examples of the transparent oxides include indium-tin oxide, zinc oxide, and aluminum zinc oxide with up to 5 wt % Al. Examples of the metals include aluminum and titanium. The work function of the transparent conductive layer can be tuned to match the contacted semiconductor by adjusting the ratio of metal to transparent oxide.
    Type: Grant
    Filed: July 14, 2014
    Date of Patent: April 5, 2016
    Assignee: Intermolecular, Inc.
    Inventors: Jianhua Hu, Heng-Kai Hsu, Minh Huu Le, Sandeep Nijhawan, Teresa B. Sapirman
  • Patent number: 9281385
    Abstract: A graphene composition including a graphene monolayer and an alkali metal disposed on the graphene monolayer.
    Type: Grant
    Filed: June 20, 2011
    Date of Patent: March 8, 2016
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Hyeon-jin Shin, Jae-young Choi, Joung-real Ahn, Cheol-ho Jeon
  • Patent number: 9269607
    Abstract: Embodiments of the present invention provide structures and methods for controlling stress in semiconductor wafers during fabrication. Features such as deep trenches (DTs) used in circuit elements such as trench capacitors impart stress on a wafer that is proportional to the surface area of the DTs. In embodiments, a corresponding pattern of dummy (non-functional) DTs is formed on the back side of the wafer to counteract the electrically functional DTs formed on the front side of a wafer. In some embodiments, the corresponding pattern on the back side is a mirror pattern that matches the functional (front side) pattern in size, placement, and number. By creating the minor pattern on both sides of the wafer, the stresses on the front and back of the wafer are in balance. This helps reduce topography issues such as warping that can cause problems during wafer fabrication.
    Type: Grant
    Filed: June 17, 2014
    Date of Patent: February 23, 2016
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Edward Engbrecht, Donghun Kang, Rishikesh Krishnan, Oh-jung Kwon, Karen A. Nummy
  • Patent number: 9236470
    Abstract: A semiconductor power device and a method of fabricating the same are provided. The semiconductor power device involving: a first conductivity type semiconductor substrate; an epitaxial layer formed on the semiconductor substrate; a second conductivity type well formed in the semiconductor substrate and the epitaxial layer; a drain region formed in the well; an oxide layer that insulates a gate region from the drain region; a first conductivity type buried layer formed in the well; a second conductivity type drift region surrounding the buried layer; and a second conductivity type TOP region formed between the buried layer and the oxide layer.
    Type: Grant
    Filed: December 23, 2013
    Date of Patent: January 12, 2016
    Assignee: MagnaChip Semiconductor, Ltd.
    Inventors: Francois Hebert, Young Bae Kim, Jin Woo Moon, Kyung Ho Lee
  • Patent number: 9231117
    Abstract: Methods of forming multi-tiered semiconductor devices are described, along with apparatus and systems that include them. In one such method, an opening is formed in a tier of semiconductor material and a tier of dielectric. A portion of the tier of semiconductor material exposed by the opening is processed so that the portion is doped differently than the remaining semiconductor material in the tier. At least substantially all of the remaining semiconductor material of the tier is removed, leaving the differently doped portion of the tier of semiconductor material as a charge storage structure. A tunneling dielectric is formed on a first surface of the charge storage structure and an intergate dielectric is formed on a second surface of the charge storage structure. Additional embodiments are also described.
    Type: Grant
    Filed: June 20, 2014
    Date of Patent: January 5, 2016
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, John K. Zahurak
  • Patent number: 9231100
    Abstract: A semiconductor device is at least partially formed in a semiconductor substrate, the substrate including first and second opposing main surfaces. The semiconductor device includes a cell field portion and a contact area, the contact area being electrically coupled to the cell field portion, the cell field portion including at least a transistor. The contact area includes a connection substrate portion insulated from other substrate portions and including a part of the semiconductor substrate, an electrode adjacent to the second main surface and in contact with the connection substrate portion, and a metal layer disposed over the first main surface, the connection substrate portion being electrically coupled to the metal layer to form an ohmic contact between the electrode and metal layer. The connection substrate portion is not electrically coupled to a component of the cell field portion by a conductive material disposed between the first and second main surfaces.
    Type: Grant
    Filed: October 31, 2012
    Date of Patent: January 5, 2016
    Assignee: Infineon Technologies Austria AG
    Inventors: Andreas Meiser, Till Schloesser, Martin Poelzl
  • Patent number: 9219058
    Abstract: A high voltage switching circuit includes first and second group III-V transistors, the second group III-V transistor having a greater breakdown voltage than the first group III-V transistor. The circuit further includes a silicon diode in a parallel arrangement with the first group III-V transistor, the parallel arrangement being in cascade with the second group III-V transistor. The circuit is effectively a three-terminal device, where a first terminal is coupled to a gate of the second III-V transistor, a source of the first III-V transistor, and an anode of the silicon diode. A second terminal is coupled to a gate of the first group III-V transistor, and a third terminal is coupled to a drain of the second group III-V transistor. The first group III-V transistor might be an enhancement mode transistor. The second group III-V transistor might be a depletion mode transistor. The first and second group III-V transistors can be GaN HEMTs.
    Type: Grant
    Filed: February 3, 2011
    Date of Patent: December 22, 2015
    Assignee: Infineon Technologies Americas Corp.
    Inventor: Michael A. Briere
  • Patent number: 9209040
    Abstract: A semiconductor device includes a semiconductor substrate and a trench isolation. The trench isolation is located in the semiconductor substrate, and includes a first cushion layer, a second cushion layer and an insulating filler. The first cushion layer is peripherally enclosed by the semiconductor substrate, the second cushion layer is peripherally enclosed by the first cushion layer, and insulating filler is peripherally enclosed by the second cushion layer. A method for fabricating the semiconductor device is also provided herein.
    Type: Grant
    Filed: October 11, 2013
    Date of Patent: December 8, 2015
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Min Lin, Wei-Lun Hong, Ying-Tsung Chen, Liang-Guang Chen
  • Patent number: 9202741
    Abstract: Embodiments relate to semiconductor structures and methods of forming them. In some embodiments, the methods may be used to fabricate a semiconductor substrate by forming a weakened zone in a donor structure at a predetermined depth to define a transfer layer between an attachment surface and the weakened zone and a residual donor structure between the weakened zone and a surface opposite the attachment surface. A metallic layer is formed on the attachment surface and provides an ohmic contact between the metallic layer and the transfer layer, a matched Coefficient of Thermal Expansion (CTE) for the metallic layer that closely matches a CTE of the transfer layer, and sufficient stiffness to provide structural support to the transfer layer. The transfer layer is separated from the donor structure at the weakened zone to form a composite substrate comprising the transfer layer and the metallic layer.
    Type: Grant
    Filed: March 21, 2013
    Date of Patent: December 1, 2015
    Assignee: SOITEC
    Inventors: Christiaan J. Werkhoven, Chantal Arena
  • Patent number: 9196495
    Abstract: A semiconductor device in accordance with one embodiment of the invention can include a semiconductor substrate having a groove, a bit line, a pocket implantation region, a bottom insulating membrane, and a charge accumulation region. The bit line is formed on a side of the groove in the semiconductor substrate and acts as a source and a drain. The pocket implantation region is formed to touch (or contact) the bit line, has a similar conductivity type as the semiconductor substrate, and has a dopant concentration higher than that of the semiconductor substrate. The bottom insulating membrane is formed on and touches (or contacts) a side surface of the groove. The charge accumulation layer is formed on and touches (or contacts) a side surface of the bottom insulating membrane.
    Type: Grant
    Filed: June 18, 2012
    Date of Patent: November 24, 2015
    Assignee: Cypress Semiconductor Corporation
    Inventor: Yukihiro Utsuno
  • Patent number: 9196332
    Abstract: An STTMRAM element includes a magnetic tunnel junction (MTJ) having a perpendicular magnetic orientation. The MTJ includes a barrier layer, a free layer formed on top of the barrier layer and having a magnetic orientation that is perpendicular and switchable relative to the magnetic orientation of the fixed layer. The magnetic orientation of the free layer switches when electrical current flows through the STTMRAM element. A switching-enhancing layer (SEL), separated from the free layer by a spacer layer, is formed on top of the free layer and has an in-plane magnetic orientation and generates magneto-static fields onto the free layer, causing the magnetic moments of the outer edges of the free layer to tilt with an in-plane component while minimally disturbing the magnetic moment at the center of the free layer to ease the switching of the free layer and to reduce the threshold voltage/current.
    Type: Grant
    Filed: June 15, 2011
    Date of Patent: November 24, 2015
    Assignee: Avalanche Technology, Inc.
    Inventors: Jing Zhang, Yuchen Zhou, Rajiv Yadav Ranjan, Yiming Huai
  • Patent number: 9190340
    Abstract: A semiconductor device has a first semiconductor die containing a low pass filter and baluns. The first semiconductor die has a high resistivity substrate. A second semiconductor die including a bandpass filter is mounted to the first semiconductor die. The second semiconductor die has a gallium arsenide substrate. A third semiconductor die including an RF switch is mounted to the first semiconductor die. A fourth semiconductor die includes an RF transceiver. The first, second, and third semiconductor die are mounted to the fourth semiconductor die. The first, second, third, and fourth semiconductor die are mounted to a substrate. An encapsulant is deposited over the first, second, third, and fourth semiconductor die and substrate. A plurality of bond wires is formed between the second semiconductor die and first semiconductor die, and between the third semiconductor die and first semiconductor die, and between the first semiconductor die and substrate.
    Type: Grant
    Filed: June 17, 2011
    Date of Patent: November 17, 2015
    Assignee: STATS ChipPAC, Ltd.
    Inventors: YongTaek Lee, HyunTai Kim, Gwang Kim, ByungHoon Ahn, Kai Liu
  • Patent number: 9184214
    Abstract: A semiconductor device includes a substrate and a gate stack disposed on the substrate. An upper layer of the gate stack is a metal gate conductor and a lower layer of the gate stack is a gate dielectric. A gate contact is in direct contact with the metal gate conductor.
    Type: Grant
    Filed: April 11, 2011
    Date of Patent: November 10, 2015
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Bruce B. Doris, Kangguo Cheng, Keith Kwong Hon Wong
  • Patent number: 9178182
    Abstract: To realize a high-performance liquid crystal display device or light-emitting element using a plastic film. A CPU is formed over a first glass substrate and then, separated from the first substrate. A pixel portion having a light-emitting element is formed over a second glass substrate, and then, separated from the second substrate. The both are bonded to each other. Therefore, high integration can be achieved. Further, in this case, the separated layer including the CPU serves also as a sealing layer of the light-emitting element.
    Type: Grant
    Filed: September 29, 2011
    Date of Patent: November 3, 2015
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Toru Takayama, Junya Maruyama, Yumiko Ohno
  • Patent number: 9171999
    Abstract: A thin film transistor array panel is provided and includes a gate line, a gate insulating layer covering the gate line, a semiconductor layer disposed on the gate insulating layer, and a data line and a drain electrode disposed on the semiconductor layer. The data line and the drain electrode have a dual-layered structure including a lower layer and an upper layer with the lower layer having a first portion protruded outside the upper layer and the semiconductor layer having a second portion protruded outside the edge of the lower layer.
    Type: Grant
    Filed: May 31, 2013
    Date of Patent: October 27, 2015
    Assignee: Samsung Display Co., Ltd.
    Inventors: Chang-Oh Jeong, Woo-Sung Sohn, Dong-Gyu Kim, Shi-Yul Kim, Ki-Yeup Lee, Jean-Ho Song