Patents Examined by Wesley A. Nicolas
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Patent number: 6746578Abstract: An apparatus and method for plating a workpiece. The apparatus comprises, generally, an anode, a cathode, and a selective anode shield/material flow assembly. In use, both the anode and the cathode are immersed in a solution, and the cathode is used to support the workpiece. During an electroplating process, the anode and the cathode generate an electric field emanating from the anode towards the cathode, to generate a corresponding current to deposit an electroplating material on the workpiece. The selective shield/material flow assembly is located between the anode and the cathode, and forms a multitude of adjustable openings. These opening have sizes that are adjustable during the electroplating process for selectively and controllably adjusting the amount of electric flux passing through the selective shield/material flow assembly and the distribution of the electroplating material on the workpiece. The selective shield/material flow assembly can also be used with an electroless plating system.Type: GrantFiled: May 31, 2001Date of Patent: June 8, 2004Assignee: International Business Machines CorporationInventors: Ralph A. Barrese, Gary Gajdorus, Allen H. Hopkins, John J. Konrad, Robert C. Schaffer, Timothy L. Wells
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Patent number: 6743347Abstract: A bearing manufacturing method for a compressor is disclosed. Since an oxide-coated layer is formed at the surface of the bearing and electrolized in a tiomolybedenic acid ammonium aqueous solution so that the molybedene emulsion can be infiltrated in the fine pores of the oxide-coated layer. Accordingly, the abrasion resistance of the bearing can be increased while the friction coefficient is remarkably reduced, and thus, a reliability of the compressor and an energy efficiency can be increased.Type: GrantFiled: December 12, 2001Date of Patent: June 1, 2004Assignee: LG Electronics Inc.Inventor: Chan Hwa Jeong
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Patent number: 6743345Abstract: A process for metallizing a substrate part includes the following three steps: coating the part with a precursor composite material layer consisting of a polymer matrix doped with photoreducer material dielectric particles, irradiating the surface to be metallized of the substrate part with a light beam emitted by a laser, and immersing the irradiated part in an autocatalytic bath containing metal ions, with deposition of the latter in a layer on the irradiated surface. The dimension of the dielectric particles is less than or equal to 0.5 microns. The method is intended in particular for producing a metallized part including a substrate part consisting of a flexible film.Type: GrantFiled: March 13, 2002Date of Patent: June 1, 2004Assignee: NexansInventors: Christian Belouet, Bertrand Joly, Didier Lecomte, Patricia Laurens
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Patent number: 6743350Abstract: An electrode for rejuvenating a cooling passage within an airfoil, the electrode including a tip, an end, a conductive core extending between the tip and the end, and an insulating coating disposed on the conductive core. The insulating coating exposes a number of conductive strips of the conductive core extending between the tip and the end. The insulating coating forms a number of insulating portions and further exposes a number of spacer portions of the conductive core longitudinally positioned between the insulating portions. The insulating portions substantially span a distance between the tip and the end and are positioned between the conductive strips.Type: GrantFiled: March 18, 2002Date of Patent: June 1, 2004Assignee: General Electric CompanyInventors: Ching-Pang Lee, Robert Alan Johnson, Bin Wei, Hsin-Pang Wang, Lawrence Bernard Kool
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Patent number: 6740221Abstract: A method of forming a copper layer with increased electromigration resistance. A doped copper layer is formed by controlling the incorporation of a non-metallic dopant during copper electroplating.Type: GrantFiled: March 15, 2001Date of Patent: May 25, 2004Assignee: Applied Materials Inc.Inventors: Robin Cheung, Liang-Yuh Chen
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Method of treating waste from nuclear fuel handling facility and apparatus for carrying out the same
Patent number: 6736951Abstract: A waste treatment apparatus treats radioactive contaminated waste from a nuclear fuel material handling facility to decontaminate the radioactive contaminated waste by using an electrolytic molten salt, and reuses the electrolytic molten salt so that any effluents are not produced. Radioactive contaminated waste (10) from a nuclear fuel material handling facility is subjected to electrolysis by a molten salt electrolysis unit (20) to decontaminate the waste (10). The used salt (16) used for decontaminating the waste (10) is filtered to separate nuclear fuel materials (19) from the used salt (16). The filtered salt (18) is reused by the molten salt electrolysis unit (20). The salt adhering to the decontaminated waste (12) is recovered by an evaporating unit (59), and the recovered salt (15) is reused by the molten salt electrolysis unit (20).Type: GrantFiled: August 29, 2001Date of Patent: May 18, 2004Assignee: Kabushiki Kaisha ToshibaInventors: Naruhito Kondo, Reiko Fujita -
Patent number: 6736956Abstract: The present invention is directed to a method of etching anode foil in a non-uniform manner which increases the overall capacitance gain of the foil while retaining foil strength. In particular, by using a mask to protect a mesh grid of the foil from further etching, a previously etched foil can be further etched, prior to the widening step. Alternatively, the mask may be used in the initial etch, eliminating the need for the second process. In effect the foil may be etched to a higher degree in select regions, leaving a web of more lightly etched foil defined by the mask to retain strength. According to the present invention, the foil is placed between two masks with a grid of openings which expose the foil in these areas to the etching solution. The exposed area can be as little as 10% of the total foil to as much as 95% of the total foil, preferably 30% to 70% of the total foil area.Type: GrantFiled: May 7, 2001Date of Patent: May 18, 2004Assignee: Pacesetter, Inc.Inventors: Ralph Jason Hemphill, Thomas V. Graham, Thomas Flavian Strange
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Patent number: 6733650Abstract: Disclosed are a process for producing a zinc oxide film comprising the steps of transporting a conductive long substrate via above at least one electrode comprised of zinc in an electrodeposition bath held in an electrodeposition tank and applying an electric field between the electrode and the conductive long substrate, thereby forming a zinc oxide film on the conductive long substrate, the process comprising a first step of forming the zinc oxide film on a part of the conductive long substrate; a second step of stopping the application of the electric field and the transportation; and a third step of bringing at least a region of a part of the conductive long substrate being in contact with the electrodeposition bath in the second step into non-contact with the electrodeposition bath, and an apparatus suitably used for the process. The process and apparatus enables high-quality zinc oxide films to be produced.Type: GrantFiled: July 3, 2001Date of Patent: May 11, 2004Assignee: Canon Kabushiki KaishaInventors: Yuichi Sonoda, Kozo Arao, Noboru Toyama, Yusuke Miyamoto
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Patent number: 6730210Abstract: A low temperature alkali metal electrolysis process is provided. The process comprises carrying out the electrolysis in the presence of a co-electrolyte and an alkali metal halide. The co-electrolyte comprises (1) a nitrogen-containing compound and optionally one ore more Group IB halides, Group IIIA halides, Group VIII halides; (2) a Group IIIA halide, a Group VB halide, or combinations of a Group IIIA halide and a Group VB halide; or (3) water. Also provided is a low temperature electrolysis process, which comprises carrying out the process using a cathode that comprises (1) a liquid alkali metal; (2) an alloy of two or more metals selected from the group consisting of bismuth, lead, tin, antimony, indium, gallium, thallium, and cadmium; or (3) an electrically conductive liquid solvated alkali metal.Type: GrantFiled: January 14, 2002Date of Patent: May 4, 2004Assignee: E. I. du Pont de Nemours and CompanyInventors: Jeffery S. Thompson, Howard M. Blank, Walter John Simmons, Oswald Robert Bergmann
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Patent number: 6726825Abstract: A method of manufacturing a positive electrode foil of an aluminum electrolytic capacitor is provided in which anodizing conditions are optimally determined and automatically set to minimize the loss of production and to produce a constant quality of the positive electrode foil. The method comprises an etching process and an anodizing process. An etched foil produced in the etching process is subjected to a constant current inspection, and then, the anodizing conditions are determined from the result of the constant current inspection. The anodizing conditions are transferred to a control panel in the anodizing process where they are automatically registered as its settings. Also, an apparatus for manufacturing the positive electrode foil is provided which has a voltage sensor connected between an output running roller and cathode electrodes in an anodizing tank. A voltage measured by the voltage sensor is fed back to a direct-current source for controlling its output voltage.Type: GrantFiled: April 3, 2001Date of Patent: April 27, 2004Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Mitsuhisa Yoshimura, Kazuaki Nakanishi, Kenji Yoshida, Seita Takahashi, Hiroyuki Nakano, Naomi Kurihara, Katsuyuki Nakamura, Masanori Okabayashi, Takahiro Suzuki
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Patent number: 6726824Abstract: The present invention provides methods and apparatus for analysis and monitoring of electrolyte bath composition. Based on the results of the analysis, the invention controls electrolyte bath composition and plating hardware. Thus, the invention provides control of electroplating processes based on plating bath composition data. The invention accomplishes this by incorporating mass spectral analysis into a feedback control mechanism for electroplating. Mass spectrometry is used to identify plating bath conditions and based on the results, the plating bath formulation and plating process are controlled.Type: GrantFiled: April 11, 2001Date of Patent: April 27, 2004Assignee: Novellus Systems, Inc.Inventor: Mukul Khosla
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Patent number: 6726815Abstract: An electrochemical etching cell (1) is proposed for etching an etching body (15) made at least superficially of an etching material. The etching cell (1) has at least one chamber filled with an electrolyte, and is provided with a first electrode (13), which at least superficially has a first electrode material, and with a second electrode (13′) which at least superficially has a second electrode material. Furthermore, the etching body (15) is in contact, at least region-wise, with the electrolyte. In this context, the first electrode material and the second electrode material are selected such that, after the etching, the etching body (15) is not contaminated and/or is not impaired in its properties by the electrode materials. In particular, the electrode materials are the same materials as the etching material. Also proposed is a method for etching an etching body (15) using this etching cell (1), the first and/or the second electrode (13, 13′) being used as a sacrificial electrode.Type: GrantFiled: December 26, 2001Date of Patent: April 27, 2004Assignee: Robert Bosch GmbHInventors: Hans Artmann, Wilhelm Frey, Franz Laermer
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Patent number: 6723219Abstract: A method of electroplating metal onto a low conductivity layer combines a potential or current reversal waveform with variation in the amplitude and duration of the applied potential or current pulse. The method includes, over time, varying the duration of the pulse and continuously decreasing the amplitude of both the cathodic and anodic portions of the waveform across the surface of the low conductivity layer as the deposition zone moves from the center of the surface of the low conductivity layer to the outside edge. By virtue of the ability to vary the amplitude and duration of the pulse, the method facilitates the filling of structures in the center of the low conductivity layer without overdepositing on the outside edge, thus ensuring a controlled deposition of material across the surface of the low conductivity layer.Type: GrantFiled: August 27, 2001Date of Patent: April 20, 2004Assignee: Micron Technology, Inc.Inventor: Dale W. Collins
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Patent number: 6723224Abstract: Generally, a method and apparatus for electro-chemical polishing a metal layer disposed on a substrate is provided. In one embodiment, the electro-chemical polishing apparatus generally includes a substrate support having a plurality of contact members, a cathode and at least one nozzle. The nozzle is adapted to centrally dispose a polishing fluid on the substrate supported by the substrate support. The cathode is adapted to couple the polishing fluid to a negative terminal of a power source. A positive terminal of the power source is electrically coupled through the contact members to the conductive layer of the substrate. The nozzle creates a turbulent flow in the portion of the polishing fluid boundary layer proximate the center of the substrate which enhances the polishing rate at the center of the substrate.Type: GrantFiled: August 1, 2001Date of Patent: April 20, 2004Assignee: Applied Materials Inc.Inventors: Joseph Yahalom, Srinivas Gandikota, Christopher R. McGuirk, Deenesh Padhi
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Patent number: 6723223Abstract: For an electromechanical machining of a work piece there is an optimal pulse duration for the machining pulses corresponding to the maximum copying accuracy. Such an optimal pulse duration corresponds to a certain value of the gap. By alternating the machining pulses with measurement pulses it is possible to obtain an accurate information about the gap dimensions on-line during the electrochemical machining process. The process control means (20) are used to automate the electromechanical machining, while keeping it in the optimal mode. For this purpose the process control means (20) comprise the pulse control unit (26) to establish the pulse duration of the voltage pulses to be applied across the gap (4).Type: GrantFiled: May 7, 2002Date of Patent: April 20, 2004Assignee: Koninklijke Philips Electronics N.V.Inventors: Alexandr Zaitsev, Sergey Bezroukov, Igor Leonidovich Agafonov, Aleksandr Leonidovich Belogorsky, Maxim Smirnov, Vladimir Zhitnikov
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Patent number: 6716331Abstract: An electrolytic method is disclosed by which occlusion of hydrogen or sticking of atoms or molecules in plating and so forth is not disturbed by electronic magnetic force produced by main electric current and ion current flowing from the positive electrode to the negative electrode through electrolyte. An electric circuit separate from a positive electrode and a negative electrode is provided between the positive electrode and the negative electrode, and electric current of a direction opposite to that of main electric current and ion current flowing in the electrolyte from the positive electrode to the negative electrode is supplied to the electric circuit to produce an opposite magnetic field which cancels a magnetic field produced by the main electric current and the ion current flowing in the electrolyte.Type: GrantFiled: July 12, 2001Date of Patent: April 6, 2004Inventor: Toichi Chikuma
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Patent number: 6716329Abstract: A plating system is composed of a transfer device for performing transfer of a wafer, a plating unit and a washing/drying unit provided around the transfer device. Each unit is structured to be detachable from the plating system. The plating unit is divided into a wafer transfer section and a plating section by a separator, and atmosphere of each section is independently set.Type: GrantFiled: May 1, 2001Date of Patent: April 6, 2004Assignee: Tokyo Electron LimitedInventors: Wataru Okase, Takenobu Matsuo
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Patent number: 6716333Abstract: A hard, wear-resistant ceramic surface is applied to spinning rotor cups in an electrolytic bath on which is imposed a shaped-wave electric current. A special electrode has been designed to facilitate application of the coating to the unique shape of a spinning rotor cup under the shaped wave conditions.Type: GrantFiled: June 6, 2001Date of Patent: April 6, 2004Assignees: Ceramic Coatings Technologies, Inc., Burckhardt America, IncorporatedInventors: Thomas J. Pearsall, Paul L. Lucas, Robert D. Mackey
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Patent number: 6709565Abstract: The present invention pertains to apparatus and methods for planarization of metal surfaces having both recessed and raised features, over a large range of feature sizes. The invention accomplishes this by increasing the fluid agitation in raised regions with respect to recessed regions. That is, the agitation of the electropolishing bath fluid is agitated or exchanged as a function of elevation on the metal film profile. The higher the elevation, the greater the movement or exchange rate of bath fluid. In preferred methods of the invention, this agitation is achieved through the use of a microporous electropolishing pad that moves over (either near or in contact with) the surface of the wafer during the electropolishing process. Thus, methods of the invention are electropolishing methods, which in some cases include mechanical polishing elements.Type: GrantFiled: September 28, 2001Date of Patent: March 23, 2004Assignee: Novellus Systems, Inc.Inventors: Steven T. Mayer, Robert J. Contolini, Eliot K. Broadbent, John S. Drewery
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Patent number: 6709563Abstract: There is provided a copper-plating liquid free from an alkali metal and a cyanide which, when used in plating of a substrate having an outer seed layer and fine recesses of a high aspect ratio, can reinforce the thin portion of the seed layer and can embed copper completely into the depth of the fine recesses. The plating liquid contains divalent copper ions and a completing agent, and an optional pH adjusting agent.Type: GrantFiled: June 29, 2001Date of Patent: March 23, 2004Assignee: Ebara CorporationInventors: Mizuki Nagai, Shuichi Okuyama, Ryoichi Kimizuka, Takeshi Kobayashi