Abstract: A mark comprising at least one set of calibration periodic structures and at least two sets of test periodic structures, both types of which are positioned along an axis. The mark is used to measure the relative position between two layers of a device. Each set of test periodic structures has its periodic structures formed within first and second sections. The periodic structures of the first and second sections are each formed on one of the two layers of the device, respectively. The first and second sections of each test set is positioned proximate to the second and first sections of the next test set, respectively. This mark allows two beams which scan the mark to travel over both a test section formed on one layer of the device and a test section formed on the other of the two layers. Scanning multiple test sets provides multiple registration error values which are then averaged to obtain an average registration error value.
Abstract: An inspection apparatus, system and method for inspecting parts during a manufacturing process. The apparatus comprises a conveyor line for moving a part during a manufacturing process and a plurality of sensors and cameras mounted on stationary supports around the conveyor line. The conveyor line may be a part of or adjacent to the production line. The sensors measure a characteristic of a first part and produce an inspection output, and can be reconfigured for inspection of at least one different characteristic of a second part or for re-inspection of the first part at a different stage of the manufacturing process. The apparatus may include a computer system that receives the sensor inspection outputs and produces operator-accessible information. The apparatus may include means for identification of the parts. Alternatively, the parts may be stationary and the supports on which the sensors are mounted may be moving relative to the parts.
Type:
Grant
Filed:
May 31, 2001
Date of Patent:
May 20, 2003
Assignee:
The Regents of the University of Michigan
Abstract: An apparatus and method employing a plurality of light emitting devices which each can get light through a respective optical fiber toward a respective fluid sample of a plurality of fluid samples in a time-staggered manner. Light is generated in each of the fluid samples at different times consistent with the times at which light is irradiate onto the sample. A single detector is used to detect the lights emitted from the plurality of samples at these different times. A plurality of bifurcated optical cable are coupled to the light emitting devices and single light detecting device, and the integrated end of each bifurcated cable acts as the light emitting port and light detecting port.
Type:
Grant
Filed:
September 15, 1997
Date of Patent:
March 28, 2000
Assignee:
Becton Dickinson and Company
Inventors:
Jeffrey P. Andrews, Christian V. O'Keefe, Brian G. Scrivens, Willard C. Pope, Timothy Hansen, Frank L. Failing
Abstract: A method and structure for analysis of the size and/or distribution of low-density particles by centrifugal sedimentation in a centrifuge chamber containing a fluid where the particles to be tested are delivered to the bottom of the centrifuge chamber and allowed to float upwards in the higher density fluid within the centrifuge chamber to be analyzed.