Patents by Inventor Aaron D. Rhodes

Aaron D. Rhodes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for stabilizing filaments in a chemical vapor deposition reactor
    Patent number: 10513438
    Abstract: A method is provided for stabilizing filaments in a chemical vapor deposition (CVD) reactor. The method includes providing the pair of filaments, and connecting the pair of filaments with at least one stabilizer. The stabilizer may include an electronically insulating material.
    Type: Grant
    Filed: June 5, 2017
    Date of Patent: December 24, 2019
    Assignee: OCI COMPANY LTD.
    Inventors: Wenjun Qin, Chad Fero, Aaron D. Rhodes, Jeffrey C. Gum
  • Reactor filament assembly with enhanced misalignment tolerance
    Patent number: 10450649
    Abstract: A tubular filament assembly for a CVD silicon deposition reactor is disclosed that provides consistent, low resistance connections to vertical tubular filaments by forming slidable connections between upper and/or lower ends of the tubular filaments and shaped elements cooperative with the bridge and/or the support chucks, so that the connections are insensitive at least to small variations in tilt angle of the vertical filaments and/or the horizontal bridge. The shaped elements can be incorporated into or separate and cooperative with the bridge and/or the chucks. Various embodiments are described.
    Type: Grant
    Filed: January 29, 2014
    Date of Patent: October 22, 2019
    Assignee: GTAT Corporation
    Inventors: Aaron D Rhodes, Keith H Ballenger
  • Methods and Systems for Stabilizing Filaments in a Chemical Vapor Deposition Reactor
    Publication number: 20170320746
    Abstract: In various embodiments, systems, methods, and apparatus are provided for stabilizing filaments in a chemical vapor deposition (CVD) reactor system. A system includes a base plate having a plurality of electrical connections, a pair of filaments extending from the base plate, and a stabilizer connecting the pair of filaments. Each filament is in electrical contact with, and defines a conductive path between, the two electrical connections. A method of stabilizing the filaments includes providing the pair of filaments, and connecting the pair of filaments with at least one stabilizer. The stabilizer may include an electrically insulating material.
    Type: Application
    Filed: June 5, 2017
    Publication date: November 9, 2017
    Inventors: Wenjun Qin, Chad Fero, Aaron D. Rhodes, Jeffrey C. Gum
  • REACTOR FILAMENT ASSEMBLY WITH ENHANCED MISALIGNMENT TOLERANCE
    Publication number: 20150211111
    Abstract: A tubular filament assembly for a CVD silicon deposition reactor is disclosed that provides consistent, low resistance connections to vertical tubular filaments by forming slidable connections between upper and/or lower ends of the tubular filaments and shaped elements cooperative with the bridge and/or the support chucks, so that the connections are insensitive at least to small variations in tilt angle of the vertical filaments and/or the horizontal bridge. The shaped elements can be incorporated into or separate and cooperative with the bridge and/or the chucks. Various embodiments are described.
    Type: Application
    Filed: January 29, 2014
    Publication date: July 30, 2015
    Applicant: GTAT CORPORATION
    Inventors: Aaron D. Rhodes, Keith H. Ballenger