Patents by Inventor Aaron Zuo

Aaron Zuo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Systems and methods for reducing alteration of a specimen during analysis for charged particle based and other measurement systems
    Patent number: 7394067
    Abstract: Systems and methods for reducing alteration of a specimen during by charged particle based and other measurements systems are provided. One system configured to reduce alteration of a specimen during analysis includes a vacuum chamber in which the specimen is disposed during the analysis and an element disposed within the vacuum chamber. A surface of the element is cooled such that molecules in the vacuum chamber are adsorbed onto the surface and cannot cause alteration of a characteristic of the specimen during the analysis. One system configured to analyze a specimen includes an analysis subsystem configured to analyze the specimen while the specimen is disposed in a vacuum chamber and an element disposed within the vacuum chamber. A surface of the element is cooled such that molecules in the vacuum chamber are adsorbed onto the surface and cannot cause alteration of a characteristic of the specimen during the analysis.
    Type: Grant
    Filed: July 20, 2005
    Date of Patent: July 1, 2008
    Assignee: KLA-Tencor Technologies Corp.
    Inventors: David Soltz, Paul Wieczorek, Aaron Zuo, Gabor Toth