Patents by Inventor Abbin Antony

Abbin Antony has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • HIGH SELECTIVITY, LOW STRESS, AND LOW HYDROGEN CARBON HARDMASKS IN LOW-PRESSURE CONDITIONS WITH WIDE GAP ELECTRODE SPACING
    Publication number: 20240030028
    Abstract: Provided herein are methods and related apparatus for depositing an ashable hard mask (AHM) on a substrate by providing a wide gap electrode spacing in low-pressure conditions. A wide gap electrode may facilitate control of parasitic plasmas in low-pressure conditions, thereby enabling formation of high selectivity, low stress, and low-hydrogen AHMs. The AHM may then be used to etch features into underlying layers of the substrate.
    Type: Application
    Filed: December 13, 2021
    Publication date: January 25, 2024
    Inventors: Abbin Antony, Xin Meng, Xinyi Chen, Sreeram Sonti, Kapu Sirish Reddy