Abstract: MEMS based sensors, particularly capacitive sensors, potentially can address critical considerations for users including accuracy, repeatability, long-term stability, ease of calibration, resistance to chemical and physical contaminants, size, packaging, and cost effectiveness. Accordingly, it would be beneficial to exploit MEMS processes that allow for manufacturability and integration of resonator elements into cavities within the MEMS sensor that are at low pressure allowing high quality factor resonators and absolute pressure sensors to be implemented. Embodiments of the invention provide capacitive sensors and MEMS elements that can be implemented directly above silicon CMOS electronics.

Abstract: Chemical sensors today are deployed in massive volumes across multiple industries and yet at the same time they are subject to substantial research and development effort to establish new, faster, lower cost, more accurate, more sensitive chemical sensors. Such sensors and sensor arrays are being exploited across chemistry, biology, clinical biology, environmental science in civilian and military markets. Amongst the many sensor methodologies are xerogel substrates with two moieties, a receptor for molecular recognition of the analyte and a luminophore for signaling the recognition event. In order to fulfill the requirements for low cost there is a requirement for electronic excitation/read circuits that can support architectures with optical source—N sensors—X filters—M detectors, where M?N and X=N|M.

Abstract: Silicon-based capacitive accelerometers are relatively simple to fabricate and offer low cost, small size, low power, low noise and provide high sensitivity, good DC response, low drift, and low temperature sensitivity. However, tri-axial accelerometers, as opposed to using multiple discrete accelerometers, require very low cross-axis sensitivity and close sensitivities across the three directions. It would be beneficial to provide a design methodology for such tri-axial accelerometers which is compatible with commercial MEMS manufacturing processes in order to remove requirements for device specific processing, non-standard processing, etc. Accordingly, tri-axial accelerometers with low cross axis sensitivity have been established exploiting decoupled frames in conjunction with axis specific spring designs.

Abstract: Chemical sensors today are deployed in massive volumes across multiple industries and yet at the same time they are subject to substantial research and development effort to establish new, faster, lower cost, more accurate, more sensitive chemical sensors. Such sensors and sensor arrays are being exploited across chemistry, biology, clinical biology, environmental science in civilian and military markets. Amongst the many sensor methodologies are xerogel substrates with two moieties, a receptor for molecular recognition of the analyte and a luminophore for signaling the recognition event. In order to fulfill the requirements for low cost there is a requirement for electronic excitation/read circuits that can support architectures with optical source—N sensors—X filters—M detectors, where M?N and X=N|M.

Abstract: MEMS based sensors, particularly capacitive sensors, potentially can address critical considerations for users including accuracy, repeatability, long-term stability, ease of calibration, resistance to chemical and physical contaminants, size, packaging, and cost effectiveness. Accordingly, it would be beneficial to exploit MEMS processes that allow for manufacturability and integration of resonator elements into cavities within the MEMS sensor that are at low pressure allowing high quality factor resonators and absolute pressure sensors to be implemented. Embodiments of the invention provide capacitive sensors and MEMS elements that can be implemented directly above silicon CMOS electronics.