Abstract: An optical sensor including a MEMS structure, and a grating coupled resonating structure positioned adjacent to the MEMS structure, the grating coupled resonating structure comprising an interrogating grating coupler configured to direct light towards the MEMS structure. The interrogating grating coupler is two dimensional, and the interrogating grating coupler and the MEMS structure form an optical resonant cavity.

Abstract: A system for performing atomic force measurements including: a sensor including: a beam having a first side and a second side, the beam including a tip positioned on a surface of the first side for interacting with a sample; and a grating structure positioned adjacent the second side of the beam, the grating structure including an interrogating grating coupler configured to direct light towards the beam; a light source optically coupled to an input of the sensor for inputting light; and an analyser coupled to an output of the sensor; wherein the beam and the interrogating grating coupler form a resonant cavity, a movement of the beam modulates the light source and the analyser determines a deflection of the beam according to the modulated light.

Abstract: An apparatus for detecting a deflection of a beam, the apparatus comprising a beam having a first side and a second side; and a grating structure positioned adjacent the second side of the beam, the grating structure including an interrogating grating coupler configured to direct light towards the beam; wherein the beam and the interrogating grating coupler form a resonant cavity, and light input to the resonant cavity is modulated according to the deflection of the beam.

Abstract: An optical sensor including a MEMS structure, and a grating coupled resonating structure positioned adjacent to the MEMS structure, the grating coupled resonating structure comprising an interrogating grating coupler configured to direct light towards the MEMS structure. The interrogating grating coupler is two dimensional, and the interrogating grating coupler and the MEMS structure form an optical resonant cavity.

Abstract: An apparatus for detecting a deflection of a beam, the apparatus comprising a beam having a first side and a second side; and a grating structure positioned adjacent the second side of the beam, the grating structure including an interrogating grating coupler configured to direct light towards the beam; wherein the beam and the interrogating grating coupler form a resonant cavity, and light input to the resonant cavity is modulated according to the deflection of the beam.

Abstract: An apparatus for detecting a presence of one or more analytes in a sample. The apparatus comprises a cantilever (205) and a grating coupled resonating structure (210). The cantilever (205) comprises an analyte selective coating that is selective to the one or more analytes. The grating coupled resonating structure (210) is positioned adjacent to the cantilever (205). The first grating coupled resonating structure comprises a first interrogating grating coupler (220) which together with the cantilever forms an optical resonant cavity.

Abstract: An apparatus for detecting a presence of one or more analytes in a sample. The apparatus comprises a cantilever (205) and a grating coupled resonating structure (210). The cantilever (205) comprises an analyte selective coating that is selective to the one or more analytes. The grating coupled resonating structure (210) is positioned adjacent to the cantilever (205). The first grating coupled resonating structure comprises a first interrogating grating coupler (220) which together with the cantilever forms an optical resonant cavity.

Abstract: An apparatus for detecting a presence of one or more analytes in a sample. A plurality of optical cantilevered waveguides (200a, 200b) are optically coupled to an optical circuit between an input and an output of the circuit. Each of the optical cantilevered waveguides (200a, 200b) have an analyte selective coating, at least two of the waveguides having different analyte selective coatings. A detection module (304) analyses the output of the circuit to detect the presence of analytes in the sample.