Abstract: A measurement apparatus includes an optical combining unit configured to optically combine light from a first light source and light from a second light source, a forming unit configured to form pattern light using light from the first light source, a projection optical system configured to project the optically combined light onto an object, an imaging unit configured to image the object on which the pattern light is projected to capture a first image and to image the object illuminated with light from the second light source via the projection optical system to capture a second image, and a processing unit configured to correct the first image using the second image and to obtain information on a shape of the object based on the corrected first image.

Abstract: A measuring apparatus includes an optical system including a wavelength dividing element that divides light from an object simultaneously illuminated by first and second illumination units into a light component of a first wavelength and a light component of a second wavelength. A first imaging element receives a pattern light of the first wavelength reflected by the object, which is light transmitted through the wavelength dividing element but never reflected by the wavelength dividing element, thereby obtaining a first image representing a three-dimensional shape of the object. A second imaging element receives the light of the second wavelength reflected by the object, which is light reflected by the wavelength dividing element, thereby obtaining a second image representing an edge of the object.

Abstract: A measuring apparatus includes an optical system including a wavelength dividing element that divides light from an object simultaneously illuminated by first and second illumination units into a light component of a first wavelength and a light component of a second wavelength. A first imaging element receives a pattern light of the first wavelength reflected by the object, which is light transmitted through the wavelength dividing element but never reflected by the wavelength dividing element, thereby obtaining a first image representing a three-dimensional shape of the object. A second imaging element receives the light of the second wavelength reflected by the object, which is light reflected by the wavelength dividing element, thereby obtaining a second image representing an edge of the object.

Abstract: A measurement apparatus includes an optical combining unit configured to optically combine light from a first light source and light from a second light source, a forming unit configured to form pattern light using light from the first light source, a projection optical system configured to project the optically combined light onto an object, an imaging unit configured to image the object on which the pattern light is projected to capture a first image and to image the object illuminated with light from the second light source via the projection optical system to capture a second image, and a processing unit configured to correct the first image using the second image and to obtain information on a shape of the object based on the corrected first image.

Abstract: An image measuring method for imaging an object to be measured having a horizontal plurality of planes, on which the object to be measured is mounted and calculating a shape of the object to be measured based on the image of the object to be measured is provided that includes measuring a height of the object to be measured at a plurality of positions of the plurality of planes on the object to be measured; calculating positions of the plurality of planes based on the height measured in the measuring; aligning the focus position with each of the plurality of planes calculated in the calculating and imaging of the object to be measured; and calculating the shape of the object to be measured based on the image of the object to be measured imaged in the imaging.

Abstract: A measuring apparatus for measuring a position or a shape of a surface to be inspected includes a multi-wavelength interferometer and a control unit. The multi-wavelength interferometer includes an optical system that causes light to be inspected, which enters the surface to be inspected and is reflected by the surface to be inspected, and reference light to interfere with each other, a spectroscopic unit that divides interference light between the light to be inspected and the reference light into each wavelength, and a detector that detects the interference light and is provided for each divided interference light and an optical member that can adjust a position of a light guide portion that guides light from the spectroscopic unit to the detector. The control unit controls the optical member by using information related to inclination of the surface to be inspected to adjust the position of the light guide portion.

Abstract: The present invention provides a measuring apparatus which measures a shape of an object to be measured, comprising an emitting unit configured to emit pattern light, an optical system configured to irradiate the object with the pattern light emitted from the emitting unit, a deflection unit configured to deflect light emitted from the optical system, an image sensing unit configured to sense an image of the object irradiated with the pattern light, and a processing unit configured to determine the shape of the object based on the image of the object sensed by the image sensing unit, wherein the deflection unit includes a deflection element, wherein the measuring apparatus irradiates the object with light deflected by the deflection element, and a direction deflected by the deflection element differs depending on a polarization state of incident light in the deflection element.

Abstract: The present invention provides a measuring apparatus which measures a shape of an object to be measured, comprising an emitting unit configured to emit pattern light, an optical system configured to irradiate the object with the pattern light emitted from the emitting unit, a deflection unit configured to deflect light emitted from the optical system, an image sensing unit configured to sense an image of the object irradiated with the pattern light, and a processing unit configured to determine the shape of the object based on the image of the object sensed by the image sensing unit, wherein the deflection unit includes a deflection element, wherein the measuring apparatus irradiates the object with light deflected by the deflection element, and a direction deflected by the deflection element differs depending on a polarization state of incident light in the deflection element.

Abstract: Provided is a measuring apparatus that includes a heterodyne interferometer; a first detector configured to detect interference light between reference light and light to be detected, and output a measured signal; a second detector configured to detect interference light between the first and the second light, and output a reference signal; an oscillator configured to generate a standard signal having a frequency corresponding to a frequency shift amount; a first synchronization detector configured to perform synchronous detection of the measured signal and the standard signal; a second synchronization detector configured to perform synchronous detection of the reference signal and the standard signal; a first processing unit that determines a phase difference between the measured signal and the reference signal based on the outputs of the first synchronization detector and the second synchronization detector; and a second processing unit that determines the position of the object based on the phase differenc

Abstract: A measurement apparatus includes a processor configured to obtain a phase corresponding to an optical path length between the target surface and the reference surface based upon the a signal of interference light, to correct an error of the phase, and to calculate an absolute distance between the target surface and the reference surface based upon the phase in which the error has been corrected. The processor corrects the error of the phase by calculating a common phase error contained in a first measured phase calculated for the first reference wavelength and a second measured phase calculated for the second reference wavelength, and by subtracting the common phase error from the first measured phase and the second measured phase.

Abstract: The present invention provides an interferometer that measures a distance between a reference object and a measurement object, the interferometer including a light splitting element configured to split light from a light source into two light beams and cause one of the light beams to enter the reference object and the other light beam to enter the measurement object, a detection unit configured to detect interference light between light reflected by the reference object and light reflected by the measurement object and output a signal of the interference light, and a processing unit configured to perform processing for obtaining the distance.