Patents by Inventor Akihiro Miyauchi

Akihiro Miyauchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8158048
    Abstract: A mold for forming a resin pattern using nanoimprint lithography according to the present invention comprises a main mold including a fine pattern of a protrusion and a depression intended to be transferred, and a spacer for forming a space between the protrusion of the fine pattern of the main mold and a transferred object during a transfer of the fine pattern, in which the spacer has a vent passage capable of flowing gas therethrough and has an elasticity against a pressing force during the transfer.
    Type: Grant
    Filed: August 30, 2007
    Date of Patent: April 17, 2012
    Assignee: Hitachi Industrial Equipment Systems Co., Ltd.
    Inventors: Kenya Ohashi, Masahiko Ogino, Akihiro Miyauchi
  • Patent number: 8147234
    Abstract: An imprint apparatus for forming fine structure lithography comprises: a belt-like mold having a fine structure for imprint lithography formed on a surface of the belt-like mold; a cylindrical pressurizing mechanism including a pair of opposed rolls for pressurizing the belt-like mold against the surface of the imprinting object; and a supporting member for supporting the imprinting object at a position between the rolls of the cylindrical pressurizing mechanism. The belt-like mold, the imprinting object and the supporting member are configured to move to the cylindrical pressurizing mechanism in a mutually non-contact state, and then at the position between the rolls, be pressurized by the cylindrical pressurizing mechanism in a state where the imprinting object is positioned between the belt-like mold and the supporting member.
    Type: Grant
    Filed: December 24, 2008
    Date of Patent: April 3, 2012
    Assignee: Hitachi Industrial Equipment Systems Co., Ltd.
    Inventors: Masahiko Ogino, Mitsuru Hasegawa, Akihiro Miyauchi
  • Publication number: 20120074615
    Abstract: There is provided an imprint device for transferring a fine pattern to a material to form a patterned material. The device comprises a stamper having the fine pattern thereon, and a pressure distribution mechanism. The stamper is pressed against the material, and the pressure distribution mechanism provides a nonuniform pressure distribution in a patterned region of the patterned material, while the stamper is in contact with the material. There are provided an imprint device and a microstructure transfer method, by which it is possible to sufficiently spread a resin or other material for forming a pattern layer between a stamper and a patterned material with a lower pressure so as not to damage the stamper or the patterned material, and to form a pattern formation layer having the uniform thickness on the patterned material.
    Type: Application
    Filed: December 6, 2011
    Publication date: March 29, 2012
    Inventors: Takashi Ando, Susumu Komoriya, Masahiko Ogino, Akihiro Miyauchi
  • Publication number: 20120067507
    Abstract: The fine pattern mold that includes a roll, a buffer tube with inner peripheral surface is in contact with an outer peripheral surface of the roll, and a stamper tube in which its inner peripheral surface is in contact with an outer peripheral surface of the buffer tube and a fine concave/convex pattern is formed on its outer peripheral surface, wherein the buffer tube has a larger coefficient of linear expansion and a smaller elastic modulus than those of the stamper tube.
    Type: Application
    Filed: November 30, 2011
    Publication date: March 22, 2012
    Inventors: Masahiko OGINO, Mitsuru Hasegawa, Kenya Ohashi, Akihiro Miyauchi, Hitoshi Suzuki, Toshio Haba, Haruo Akahoshi
  • Patent number: 8133418
    Abstract: In order to allow for aligning a relative position between a transferred object and a stamper with high accuracy without providing an alignment pattern in the transferred object, there are provided: a pattern transfer method, including: when adjusting the relative position between the stamper and the transferred object, a step of detecting at least two or more edge positions of the transferred object and calculating an arbitrary point from the detected edge positions; a step of detecting a position of the stamper from an edge of the stamper or an alignment mark formed in the stamper; and a step of adjusting the relative position between the transferred object and the stamper from the arbitrary point and the position of the stamper; and an imprint device using the same.
    Type: Grant
    Filed: August 3, 2007
    Date of Patent: March 13, 2012
    Assignee: Hitachi, Ltd.
    Inventors: Takashi Ando, Susumu Komoriya, Masahiko Ogino, Akihiro Miyauchi
  • Patent number: 8109752
    Abstract: An imprinting stamper which can transfer a microscopic pattern to a medium bearing a convex area or local projection, with high accuracy. A convexo-concave pattern is formed on a surface of the imprinting stamper. It includes a pattern layer having the convexo-concave pattern; and a stamper backside layer arranged on a backside of the pattern layer. Young's modulus of the pattern layer is 500 MPa to 10 GPa; and Young's modulus of the stamper backside layer is smaller than Young's modulus of the pattern layer.
    Type: Grant
    Filed: June 26, 2008
    Date of Patent: February 7, 2012
    Assignee: Hitachi Industrial Equipment Systems Co., Ltd.
    Inventors: Kenya Ohashi, Masahiko Ogino, Akihiro Miyauchi
  • Patent number: 8109751
    Abstract: There is provided an imprint device for transferring a fine pattern to a material to form a patterned material. The device comprises a stamper having the fine pattern thereon, and a pressure distribution mechanism. The stamper is pressed against the material, and the pressure distribution mechanism provides a nonuniform pressure distribution in a patterned region of the patterned material, while the stamper is in contact with the material. There are provided an imprint device and a microstructure transfer method, by which it is possible to sufficiently spread a resin or other material for forming a pattern layer between a stamper and a patterned material with a lower pressure so as not to damage the stamper or the patterned material, and to form a pattern formation layer having the uniform thickness on the patterned material.
    Type: Grant
    Filed: July 6, 2007
    Date of Patent: February 7, 2012
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Takashi Ando, Susumu Komoriya, Masahiko Ogino, Akihiro Miyauchi
  • Publication number: 20120027884
    Abstract: The present invention provides a nano-imprinting resin stamper including a micro structure layer on a transmissive support basal material, the micro structure layer being formed of a polymer of a resin composition that contains a silsesquioxane derivative as a major constituent having a plurality of polymerizable functional groups, another polymerizable resin component having a plurality of polymerizable functional groups and different from the silsesquioxane derivative, and a photopolymerizable initiator, in which the content percentage of the photopolymerizable initiator is equal to or more than 0.3 mass % and equal to or less than 3 mass % relative to a total mass of the silsesquioxane derivative and the polymerizable resin component, and the micro structure layer permits equal to or more than 80% of light to pass therethrough at a wavelength of 365 nm.
    Type: Application
    Filed: July 29, 2011
    Publication date: February 2, 2012
    Inventors: Satoshi ISHII, Masahiko Ogino, Noritake Shizawa, Kyoichi Mori, Akihiro Miyauchi
  • Publication number: 20120029110
    Abstract: A photopolymerizable resin composition for transferring a microstructure, which allows a thinner and uniform thin film to be formed, a transfer accuracy of extremely smaller microfine pattern to be excellent, and a curing time of the thin film to be shortened, is provided. The photopolymerizable resin composition for transferring a microstructure comprises the following component (A), component (B), component (C), component (D) and component (E) at the rate described below: (A) a 6 to 15-functional acrylate; in 0.5 to 10 mass % (B) an acrylate with a weight-average molecular weight (Mw) of 1000 to 10000; in 0.5 to 10 mass % (C) an acrylate having a benzene ring; in 0.5 to 10 mass % (D) a reactive diluent; in 80 to 98 mass % (E) a photopolymerization initiator; in 0.1 to 5 mass %.
    Type: Application
    Filed: July 29, 2011
    Publication date: February 2, 2012
    Inventors: Ryuta WASHIYA, Masahiko Ogino, Noritake Shizawa, Kyoichi Mori, Akihiro Miyauchi
  • Patent number: 8096802
    Abstract: A nanoimprint stamper can simultaneously conform to two types of anomaly in the shape of a transfer substrate, for example warpage and surface protrusions (including foreign objects) that differ greatly in the wavelength of variation. The nanoimprint stamper is capable of performing transfer with a smaller number of defects and in a uniform way. The nanoimprint stamper includes a light-transmitting rigid substrate, a light-transmitting resilient plate, a light-trarsmitting and flexible rigid stamper base, a light-transmitting stamper buffer layer, and a light-transmitting patterned stamp layer. The stamper buffer layer has a lower Young's modulus than the patterned stamp layer.
    Type: Grant
    Filed: August 3, 2009
    Date of Patent: January 17, 2012
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Kyoichi Mori, Noritake Shizawa, Susumu Komoriya, Akihiro Miyauchi, Takashi Ando, Tetsuhiro Hatogai
  • Patent number: 8083515
    Abstract: The fine pattern mold comprises: that includes a roll, a buffer tube with inner peripheral surface is in contact with an outer peripheral surface of the roll, and a stamper tube in which its inner peripheral surface is in contact with an outer peripheral surface of the buffer tube and a fine concave/convex pattern is formed on its outer peripheral surface, wherein the buffer tube has a larger coefficient of linear expansion and a smaller elastic modulus than those of the stamper tube.
    Type: Grant
    Filed: May 30, 2008
    Date of Patent: December 27, 2011
    Assignee: Hitachi Industrial Equipment Systems, Co., Ltd.
    Inventors: Masahiko Ogino, Mitsuru Hasegawa, Kenya Ohashi, Akihiro Miyauchi, Hitoshi Suzuki, Toshio Haba, Haruo Akahoshi
  • Publication number: 20110305787
    Abstract: A stamper is used for the transfer of microscopic structures, the stamper including a base and a microscopic structure layer on a surface thereof, in which the microscopic structure layer has a surface layer including a polymer derived from a resin composition containing a polymerization initiator and a silsesquioxane derivative having two or more polymerizable functional groups, the microscopic structure layer has a modulus of elasticity of less than 2.0 GPa and has a thickness of 4 times or more the height of a microscopic structure formed on the surface of the microscopic structure layer.
    Type: Application
    Filed: June 10, 2011
    Publication date: December 15, 2011
    Inventors: Satoshi ISHII, Masahiko Ogino, Noritake Shizawa, Kyoichi Mori, Akihiro Miyauchi, Naoaki Yamashita, Toshimitsu Shiraishi, Takashi Tarumitsu
  • Patent number: 8073706
    Abstract: An examination reserve system receipts a reserve request for an examination using a medical imaging apparatus. The examination reserve system receives information concerning a failure from the medical imaging apparatus. When a failure occurs in the medical imaging apparatus, the system lists receipted examination reserve requests.
    Type: Grant
    Filed: January 23, 2003
    Date of Patent: December 6, 2011
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Takuzo Takayama, Yoichi Takada, Akihiro Miyauchi, Mariko Shibata
  • Patent number: 8021141
    Abstract: An imprint apparatus has a head unit with a fine structure. The head unit includes a fine imprint pattern layer including fine concavities and convexities, a resin layer on a face of the fine imprint pattern layer opposite to a face where the concavities and convexities are formed, a first pressurizing base member on a face of the resin layer opposite to a face contacting the fine imprint pattern layer, and a second pressurizing base member on a face of the first pressurizing base member opposite to a face contacting the resin layer. The resin layer has a modulus of elasticity smaller than that of the fine imprint pattern layer, and the first pressurizing base member has a modulus of elasticity smaller than that of the resin layer. A light source or a heat source may be further provided. The head unit may be light permeable. A replacement layer may be further provided for replacement.
    Type: Grant
    Filed: October 21, 2009
    Date of Patent: September 20, 2011
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Miho Sasaki, Masahiko Ogino, Akihiro Miyauchi, Noritake Shizawa, Kyoichi Mori
  • Publication number: 20110171431
    Abstract: Provided is a fine structure which allows the formation of a highly accurate metallic replica mold. The structure is resistant to breakage even in the presence of foreign particles or bumps and causes a smaller transfer failure region even when applied to an undulating object to be transferred. Also provided is a stamper for imprinting, which conforms to local bumps of a substrate to be transferred, causes, if any, a smaller pattern transfer failure region, and has satisfactory durability. The fine structure includes a supporting member; and a pattern layer having a fine asperity pattern formed on a surface thereof. The pattern layer is made from a resin through curing of a resin composition containing a cationic-polymerization catalyst and two or more organic components having different functional groups, and the supporting member and the pattern layer each transmit light having a wavelength of 365 nm or longer.
    Type: Application
    Filed: June 18, 2009
    Publication date: July 14, 2011
    Inventors: Masahiko Ogino, Takashi Ando, Miho Sasaki, Akihiro Miyauchi
  • Patent number: 7970623
    Abstract: A method of managing at least one maintenance work on a medical equipment installed in a medical facility, starts by collecting condition information of the medical equipment. The method continues by determining the maintenance work on the medical equipment based on the collected condition information, and making it possible to provide a maintenance staff with information of the determined maintenance work.
    Type: Grant
    Filed: September 22, 2004
    Date of Patent: June 28, 2011
    Assignees: Kabushiki Kaisha Toshiba, Toshiba Medical Systems Corporation
    Inventors: Akihiro Miyauchi, Yoichi Takada, Takuzo Takayama
  • Publication number: 20110135814
    Abstract: A functioning substrate with a group of columnar micro pillars characterized in that a first matrix of organic polymer and a group of columnar micro pillars of organic polymer extending from this matrix are provided. This group of columnar micro pillars has an equivalent diameter of 10 nm through 500 ?m and a height of 50 nm through 5000 ?m; and the ratio (H/D) of the equivalent diameter (D) to the height (H) of the group of columnar micro pillars is 4 or more.
    Type: Application
    Filed: February 16, 2011
    Publication date: June 9, 2011
    Inventors: Akihiro MIYAUCHI, Kosuke Kuwabara, Masahiko Ogino, Hiroshi Yoshida, Takashi Ando
  • Patent number: 7888111
    Abstract: An object of the present invention is to provide a cell culture vessel which is simple in structure and easy to handle, and is capable of preventing damage to the cells when separated, promoting transport of nutrients and excretion of effete matter, and elevating the culturing efficiency improving effect by the structural features. In order to attain the above object, there is provided a cell culture vessel including a culture section provided with a plurality of projections having an equivalent diameter smaller than the cells to be cultured and the culture section side walls enclosing the culture section, wherein the distance between an arbitrary position on the culture section/side wall boundary line and the nearest projection is smaller than the diameter of the cells to be cultured. The effect of the projections in the vessel given to the cultured cells is enhanced.
    Type: Grant
    Filed: November 9, 2009
    Date of Patent: February 15, 2011
    Assignee: Hitachi, Ltd.
    Inventors: Kosuke Kuwabara, Akihiro Miyauchi, Norihito Kuno
  • Publication number: 20100310773
    Abstract: A fine metal structure having its surface furnished with microprojections of high strength, high precision and large aspect ratio; and a process for producing the fine metal structure free of defects. There is provided a fine metal structure having its surface furnished with microprojections, characterized in that the microprojections have a minimum thickness or minimum diameter ranging from 10 nanometers to 10 micrometers and that the ratio between minimum thickness or minimum diameter (D) of microprojections and height of microprojections (H), H/D, is greater than 1.
    Type: Application
    Filed: August 20, 2010
    Publication date: December 9, 2010
    Inventors: Hiroshi Yoshida, Haruo Akahoshi, Akihiro Miyauchi, Masahiko Ogino
  • Publication number: 20100270712
    Abstract: An object of the present invention is to provide a micropattern transfer method and a micropattern transfer device in which the small amount of resin is applied to a substrate, and the nonuniformity in thickness is prevented to arise on the obtained pattern forming layer. In order to achieve the above object, the present invention provides a micropattern transfer method in which a micropattern is transferred to a resin by pressing a stamper having the micropattern onto the resin applied to a substrate, including the steps of: applying the resin to a surface of the substrate discretely in order to obtain a plurality of resin islands so that a center portion of each of the resin islands forms a planar thin-film, and a peripheral portion of the resin island rises higher than the center portion.
    Type: Application
    Filed: April 22, 2010
    Publication date: October 28, 2010
    Inventors: Satoshi ISHII, Masahiko Ogino, Noritake Shizawa, Kyoichi Mori, Akihiro Miyauchi