Patents by Inventor Akihiro Narita

Akihiro Narita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8440941
    Abstract: Provided is a heat treatment apparatus in which a large-sized substrate can be rapidly heated and rapidly cooled with high uniformity, and a heat treatment method using the heat treatment apparatus. The heat treatment apparatus includes: a first chamber of which one side is opened; a second chamber of which one side is opened; a device for moving the first and the second chambers; a heating device; a gas introduction port; a gas exhaust port; and a jig for longitudinally fixing a substrate, in which the substrate is rapidly heated while the first and the second chambers are connected, and rapidly cooled by separating the chambers to move the substrate away from a heat storage portion of the heating device or the like. Further, the heat treatment method includes the heat treatment apparatus, and a method for manufacturing a semiconductor device using an oxide semiconductor is included.
    Type: Grant
    Filed: September 23, 2010
    Date of Patent: May 14, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Akihiro Narita, Hideto Ohnuma, Tomoaki Moriwaka, Shunpei Yamazaki
  • Publication number: 20110070692
    Abstract: Provided is a heat treatment apparatus in which a large-sized substrate can be rapidly heated and rapidly cooled with high uniformity, and a heat treatment method using the heat treatment apparatus. The heat treatment apparatus includes: a first chamber of which one side is opened; a second chamber of which one side is opened; a device for moving the first and the second chambers; a heating device; a gas introduction port; a gas exhaust port; and a jig for longitudinally fixing a substrate, in which the substrate is rapidly heated while the first and the second chambers are connected, and rapidly cooled by separating the chambers to move the substrate away from a heat storage portion of the heating device or the like. Further, the heat treatment method includes the heat treatment apparatus, and a method for manufacturing a semiconductor device using an oxide semiconductor is included.
    Type: Application
    Filed: September 23, 2010
    Publication date: March 24, 2011
    Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    Inventors: Akihiro Narita, Hideto Ohnuma, Tomoaki Moriwaka, Shunpei Yamazaki
  • Patent number: 6475022
    Abstract: A new structure of a communication apparatus allowing cables to be arranged, extra space to be eliminated, and allowing easy operation, is disclosed. A body housing has a flat and cylindrical shape and is provided with connectors at the bottom thereof. The body housing stably stands upright on a stand with the bottom portion thereof being accommodated in the stand. Cables connected to the connectors run through a cable restraint provided in the back side of the stand. The center portion of a front surface of the body housing 100 is slightly recessed allowing easy operation. Also, plural heat-dissipating openings are arranged longitudinally along the both side walls of the body housing.
    Type: Grant
    Filed: March 22, 2001
    Date of Patent: November 5, 2002
    Assignee: Allied Telesis Kabushiki Kaisha
    Inventors: Hiroyuki Tomino, Akihiro Narita
  • Publication number: 20020064992
    Abstract: A new structure of a communication apparatus allowing cables to be arranged, extra space to be eliminated, and allowing easy operation, is disclosed. A body housing has a flat and cylindrical shape and is provided with connectors at the bottom thereof. The body housing stably stands upright on a stand with the bottom portion thereof being accommodated in the stand. Cables connected to the connectors run through a cable restraint provided in the back side of the stand. The center portion of a front surface of the body housing 100 is slightly recessed allowing easy operation. Also, plural heat-dissipating openings are arranged longitudinally along the both side walls of the body housing.
    Type: Application
    Filed: March 22, 2001
    Publication date: May 30, 2002
    Inventors: Hiroyuki Tomino, Akihiro Narita
  • Patent number: D471540
    Type: Grant
    Filed: March 21, 2001
    Date of Patent: March 11, 2003
    Assignee: Allied Telesis Kabushiki Kaisha
    Inventors: Hiroyuki Tomino, Akihiro Narita