Abstract: A substrate processing apparatus includes a processing chamber and a gas supply line, wherein a natural oxide film removing gas including a first gas activated by a second gas activated by a plasma discharge is supplied to the processing chamber through the gas supply line to remove a natural oxide film on a wafer, and wherein the first gas and the second gas are supplied to the gas supply line along a first direction and a second direction and an angle between the first and the second direction ranges from about 90° to 180°.

Abstract: A suction-holding device including: a base disk body having a hollow cavity section in its undersurface, a suction disk disposed beneath the base disk body so as to cover the hollow cavity section, and an operating rod which is disposed vertically on an embedded plate installed in the top portion of the suction disk and to which an operating handle is connected so that the operating handle is pivotally moved up and down and so that the suction disk is suction-held to and released from a surface of an object by way of raising and lowering the operating handle; and the suction disk being provided on its suction-holding surface with an annular sponge plate body.

Abstract: A tile cutter including a base stand, a protruding rib disposed on the base stand, bridge-like guide rails installed above the protruding rib, an operating lever sliding on the guide rails while being guided by the guide rails, and a rotary blade and a pressing member installed on the base portion of the operating lever, wherein the pressing member is comprised of a pair of pressing plates with a hollow space in between, the pressing plates are connected to each other by a C-shaped connecting element, the pressing member is supported on the base portion of the operating lever near a blade supporting shaft for the rotary blade so that the pressing member is free to swing upward and downward, and part of the base portion of the operating lever and the rotary blade enter the hollow space when the pressing member takes a hanging attitude.

Abstract: A tile cutter including a base stand, a protruding rib disposed on the base stand, bridge-like guide rails installed above the protruding rib, an operating lever sliding on the guide rails while being guided by the guide rails, and a rotary blade and a pressing member installed on the base portion of the operating lever, wherein the pressing member is comprised of a pair of pressing plates with a hollow space in between, the pressing plates are connected to each other by a C-shaped connecting element, the pressing member is supported on the base portion of the operating lever near a blade supporting shaft for the rotary blade so that the pressing member is free to swing upward and downward, and part of the base portion of the operating lever and the rotary blade enter the hollow space when the pressing member takes a hanging attitude.

Abstract: A suction-holding device including: a base disk body having a hollow cavity section in its undersurface, a suction disk disposed beneath the base disk body so as to cover the hollow cavity section, and an operating rod which is disposed vertically on an embedded plate installed in the top portion of the suction disk and to which an operating handle is connected so that the operating handle is pivotally moved up and down and so that the suction disk is suction-held to and released from a surface of an object by way of raising and lowering the operating handle; and the suction disk being provided on its suction-holding surface with an annular sponge plate body.

Abstract: A rotary blade for a tile cutter that includes an operating lever movable by being guided by guide rails on a base plate of the tile cutter. The rotary blade is installed on a base section of the operating lever so as to form a cut in a surface of a tile before the tile is pressed and split. The rotary blade includes a bearing assembly, an annular cutting blade and fastening rings; and the cutting blade is disposed on the outer surface of the bearing assembly, and the fastening rings are mounted on the outer surface of the bearing assembly so as to sandwich the rotary blade from both sides to hold it on the bearing assembly. The central hole of each fastening ring is tapered with a smaller diameter on the outer side of the fastening ring and a larger diameter on the inner side.

Abstract: A substrate processing apparatus includes a processing chamber and a gas supply line, wherein a natural oxide film removing gas including a first gas activated by a second gas activated by a plasma discharge is supplied to the processing chamber through the gas supply line to remove a natural oxide film on a wafer, and wherein the first gas and the second gas are supplied to the gas supply line along a first direction and a second direction and an angle between the first and the second direction ranges from about 90° to 180°.

Abstract: A rotary blade assembly used in a tile cutter made of cylindrical inner and outer races, a plurality of metal balls installed between the inner and outer races, a pair of covers covering the inner and outer races so as to assemble the two races into a single unit, and a ring-shaped blade fixed in a groove on the outer surface of the outer race. The blade assembly is easily mounted on a pivotal sliding lever of a tile cutter and no axial nor radial play occurs during the cutting since the blade of the blade assembly can rotate smoothly via the metal balls so that it travels smoothly on the tile surface to make a sharp cut in the tile.

Abstract: This disclosure relates to a tile cutter including a generally horizontal base plate, a linear ridge fixed to the base plate, and at least one guide rail extending above and in parallel with the ridge. A slider is slidable on the rail. A manipulating lever including a main portion and an end portion is provided, the end portion having front and rear ends respectively away from and adjacent the main portion. The rear end is supported pivotably on the top of the slider on a first axis extending in parallel to the base plate and perpendicularly to the rail. A lower link is supported rotatably on the bottom of the slider on a second axis extending in parallel to the first axis. An intermediate link interconnects the front end of the lever end portion and one end of the lower link, the other end of which carries a cutting blade and press plates.