Abstract: A resonator element includes a base portion and a pair of vibrating arms that are provided integrally with the base portion, are aligned in an X-axis direction, and extend in a Y-axis direction from the base portion. Each of the vibrating arms includes an arm portion and a wide hammerhead that is located on the free end side of the arm portion and has a greater length in the X-axis direction than the arm portion. Assuming that the length of the vibrating arm in the Y-axis direction is L and the length of the hammerhead in the Y-axis direction is H, the relationship of 1.2%<H/L<30.0% is satisfied. Assuming that the length of the arm portion in the X-axis direction is W1 and the length of the hammerhead in the X-axis direction is W2, the relationship of 1.5?W2/W1?10.0 is satisfied.

Abstract: A resonator includes a resonator device, a package on which the resonator device is mounted, and conductive adhesives which fix the resonator device to the package. A width of the base portion of the resonator device is set as W1, a width of a linkage portion is set as W2, a Young's modulus of the conductive adhesives is set as E, a relationship of ?1.3 GPa?log E??0.7 GPa is satisfied, and a relationship of 0.1?W2/W1?0.7 is satisfied.

Abstract: A resonation element includes a basal portion, resonating arms extending out in a Y-axis direction from the basal portion, and a vibration substrate, formed of single crystal silicon, in which a Z-axis direction is set to a thickness direction, and is configured such that the resonating arms are flexurally vibrated in an XY in-plane direction. In addition, when resonation frequencies of the resonating arms are set to F [kHz], widths of the resonating arms are set to W [?m], and lengths of the resonating arms are set to L [?m], at least one expression of the following Expression (1) and the following Expression (2) is satisfied. W<10A×Log(F)+B??(1) where, A is ?5.006×10?1, and B is 2.451, and L<10C×log(F)+D??(2) where, C is ?7.507×10?1, and D is 4.268.

Abstract: A resonator element has a base part, vibrating arms having first principal surfaces and second principal surfaces in front-rear relationships with each other and extending from the base part, and side surfaces connected to the first principal surfaces and the second principal surfaces on ends of the vibrating arms, and the side surfaces are slopes having tilts with respect to perpendicular lines of the first principal surfaces or the second principal surfaces and provided from the first principal surfaces to the second principal surfaces, and crystal faces.

Abstract: A method for manufacturing a resonator element includes: an outer shape forming step of etching a substrate to form, in a plan view, a base portion, a pair of vibrating arms extending from the base portion in a first direction, a frame portion surrounding the base portion and the vibrating arms, and a coupling portion coupling the base portion with the frame portion; and a singulation step of cutting the coupling portion to singulate the resonator element. In the outer shape forming step, the coupling portion is formed so as to extend, in the plan view, from only one edge side of the base portion in a direction along a second direction orthogonal to the first direction and be connected with the frame portion.

Abstract: In a resonator element, when a width of each of arm portions of vibrating arms along an X-axis direction is set to W1, a width of each of two portions with a groove interposed therebetween, along the X-axis direction, in a principal surface of the vibrating arm is set to W3, and 2×W3/W1 is set to ?, the relation of 14.2%<?<100% is satisfied.

Abstract: A resonator element satisfies, when a shortest distance between a first end portion and a second end portion of a base is Wb [m], an effective width of the base in a Y axis direction is We [m], and a Q value of the resonator element is Q, the following expressions (A) and (B). Q={(?·Cp)/(c·?2·?)}×[{1+(2·?·Cp·We2·f/(?·k))2}/(2·?·Cp·We2·f/(?·k))]??(A) 0.81?Wb/We?1.

Abstract: A resonator element includes a quartz crystal resonator blank provided with a base portion, vibrating arms extending from one end side of the base portion, a connecting portion which is disposed on the other end side of the base portion, and a coupling portion, located between the base portion and the connecting portion, which couples the base portion to the connecting portion. When a thickness of the quartz crystal resonator blank is set to T, a width of the base portion is set to W1, and a width of the coupling portion is set to W2, a relation of 110 ?m?T?210 ?m is satisfied, and a relation of 0.469?W2/W1?0.871 is satisfied.

Abstract: A MEMS vibrator includes an insulating portion, a first electrode provided on one surface of the insulating portion, a fixed portion, and a function portion, a second electrode provided so that at least a portion thereof overlaps the first electrode at a distance therefrom. The second electrode comes into contact with the function portion and extends from the fixed portion.

Abstract: A resonator element includes a base portion and a pair of vibrating arms that are provided integrally with the base portion, are aligned in an X-axis direction, and extend in a Y-axis direction from the base portion. Each of the vibrating arms includes an arm portion and a wide hammerhead that is located on the free end side of the arm portion and has a greater length in the X-axis direction than the arm portion. Assuming that the length of the vibrating arm in the Y-axis direction is L and the length of the hammerhead in the Y-axis direction is H, the relationship of 1.2%<H/L<30.0% is satisfied. Assuming that the length of the arm portion in the X-axis direction is W1 and the length of the hammerhead in the X-axis direction is W2, the relationship of 1.5?W2/W1?10.0 is satisfied.

Abstract: A resonator element includes: at least one resonating arm extending, wherein the resonating arm has a mechanical resonance frequency which is higher than a thermal relaxation frequency thereof, the resonating arm has a groove portion, the groove portion includes a bottom portion, a first side surface that extends along the longitudinal direction of the resonating arm and comes into contact with the opened principal surface and the bottom portion, and a second side surface that faces the first side surface with the bottom portion disposed therebetween and comes into contact with the opened principal surface and the bottom portion, and the groove portion has a non-electrode region which extends from a part of the first side surface close to the bottom portion to a part of the second side surface close to the bottom portion and in which no electrode is provided.

Abstract: A resonator element includes a base section, a pair of vibrating arms projecting from the base section in a +Y-axis direction, and arranged in an X-axis direction intersecting with the Y-axis direction with a distance in a plan view, and a support arm disposed between the pair of vibrating arms and projecting from the base section in the +Y-axis direction. The base section includes a first shrunk-width portion disposed on an opposite side to the side on which the support arm projects taking the center of the base section as a boundary, and within a range of the distance, and having a length in the X-axis direction gradually decreasing with a distance from the support arm in a plan view.

Abstract: A resonator element includes a base portion which includes one end portion and the other end portion opposing the one end portion in a plan view, and a pair of vibrating arms which extend along a first direction from the one end portion of the base portion. The base portion includes a reduced width portion in which a width is gradually decreased along a second direction intersecting the first direction toward a direction side which is separated from the base portion along the first direction, in at least one of the one end portion and the other end portion, and a fixing portion is provided between the one end portion and the other end portion of the base portion.

Abstract: A resonation element includes a basal portion, resonating arms extending out in a Y-axis direction from the basal portion, and a vibration substrate, formed of single crystal silicon, in which a Z-axis direction is set to a thickness direction, and is configured such that the resonating arms are flexurally vibrated in an XY in-plane direction. In addition, when resonation frequencies of the resonating arms are set to F [kHz], widths of the resonating arms are set to W [?m], and lengths of the resonating arms are set to L [?m], at least one expression of the following Expression (1) and the following Expression (2) is satisfied. W<10A×Log (F)+B??(1) where, A is ?5.006×10?1, and B is 2.451, and L<10C×Log (F)+D??(2) where, C is ?7.507×10?1, and D is 4.268.

Abstract: A quartz crystal resonator element includes: a base portion and a pair of vibrating arms which extend from a first end portion of the base portion along a Y-axis direction. The base portion includes a second end portion provided on the opposite side to a first end portion in the Y-axis direction. The base portion is provided with a protrusion in at least one of a third end portion and a fourth end portion which respectively connect both ends of the first end portion and both ends of the second end portion.

Abstract: A resonator element includes a base portion, and a vibrating arm which extends from the base portion and on which a weight portion is provided, and the weight portion includes a first weight portion which is disposed on one main surface of a distal end portion of the vibrating arm, and a second weight portion which is disposed on the distal end side with respect to the first weight portion and has a thickness smaller than that of the first weight portion. The vibrating arm transmits an energy beam, and a laser incidence area where incidence of the energy beam to the inside of the vibrating arm is allowed, is disposed in a position of the other main surface on the opposite side of the vibrating arm overlapped with the second weight portion.

Abstract: A resonator element includes a quartz crystal substrate having a base, a pair of vibration arms extending from the base, and a support arm located between the vibration arms and extending from the base in the direction in which the vibration arms extend. Each of the vibration arms has an arm portion and a hammer head provided at the front end of the arm portion. The arm portion has a pair of principal surfaces and a groove that has a bottom and opens through each of the principal surfaces. In the invention, the width of each of bank-shaped portions of each of the principal surfaces that are disposed side by side on opposite sides of the groove along the width direction of the vibration arm perpendicular to the longitudinal direction thereof is set at 6 ?m or smaller.

Abstract: A resonator element includes: at least one resonating arm which performs flexural vibration; a base portion connected to an end of the resonating arm; and a tapered portion which is axisymmetrical with respect to a centerline which bisects the width of the resonating arm, and which has a width increasing toward a portion of the tapered portion connected to the base portion from a portion of the tapered portion connected to the resonating arm, wherein assuming that the length and width of the resonating arm are L and W and the length and width of the tapered portion are Lt and Wt, the shape of the tapered portion is controlled to satisfy a taper length occupancy ?=Lt/L and a taper width occupancy ?=2 Wt/W.

Abstract: A resonator element capable of improving impact resistance is provided. A quartz crystal resonator element is a resonator element formed by etching a Z plate which is cut at predetermined angles with respect to the crystal axes of a quartz crystal. The quartz crystal resonator element includes a base, a pair of resonating arms extending from the base in the Y-axis direction, and a positive X-axis notch and a negative X-axis notch formed by notching the base in the X-axis direction. The positive X-axis notch is formed by notching the base from the negative side of the X axis towards the positive side so that the width of the positive X-axis notch increases as it approaches the outer circumference.

Abstract: A resonator element includes: at least one resonating arm which performs flexural vibration; a base portion connected to an end of the resonating arm; and a tapered portion which is axisymmetrical with respect to a centerline which bisects the width of the resonating arm, and which has a width increasing toward a portion of the tapered portion connected to the base portion from a portion of the tapered portion connected to the resonating arm, wherein assuming that the length and width of the resonating arm are L and W and the length and width of the tapered portion are Lt and Wt, the shape of the tapered portion is controlled to satisfy a taper length occupancy ?=Lt/L and a taper width occupancy ?=2 Wt/W.