Abstract: A membrane structure (10) includes: a substrate being a Si substrate or an SOI substrate; a buffer film containing ZrO2 and formed on the substrate; and a piezoelectric film (11) formed on the buffer film, a polarization direction in the piezoelectric film (11) being preferentially oriented parallel to the substrate.

Abstract: A piezoelectric film integrated device includes a substrate; an electrode provided on the substrate; a first piezoelectric element that is provided on the electrode and includes a first monocrystalline piezoelectric film and a first electrode film superimposed on the first monocrystalline piezoelectric film; and a second piezoelectric element that is provided on the first piezoelectric element and includes a second monocrystalline piezoelectric film and a second electrode film superimposed on the second monocrystalline piezoelectric film.

Abstract: A piezoelectric film integrated device include a substrate; a first electrode provided on the substrate; a second electrode provided on the substrate; a first monocrystalline piezoelectric film provided on the first electrode; a second monocrystalline piezoelectric film provided on the second electrode and having a crystal structure different from a crystal structure of the first monocrystalline piezoelectric film; a third electrode provided on the first monocrystalline piezoelectric film; and a fourth electrode provided on the second monocrystalline piezoelectric film.

Abstract: A film structure comprises a substrate and a buffer film formed on the substrate. The substrate is a 36° to 48° rotated Y-cut Si substrate, or the substrate is a SOI substrate including a base substance made of the 36° to 48° rotated Y-cut Si substrate, an insulating layer on the base substance, and a SOI layer made of a Si film on the insulating layer, and a mirror index of a crystal plane of an upper surface of the SOI layer is equal to a mirror index of a crystal plane of an upper surface of the base substance. The buffer film includes ZrO2 epitaxially grown on the substrate.

Abstract: A vibrator includes a vibrating part including a pair of vibrating plates and a piezoelectric material provided between the pair of vibrating plates, a supporting part including a pair of supporting plates and an interplate portion provided between the pair of supporting plates, and a wire provided in the vibrating part and the supporting part, wherein the wire is exposed from the supporting part.

Abstract: A piezoelectric driving device includes a vibrating portion including a piezoelectric element for driving and a piezoelectric element for detection and vibrating by driving of the piezoelectric element for driving, a drive circuit that generates a drive signal for driving the piezoelectric element for driving, and a detection circuit that detects vibration of the vibrating portion based on a detection signal output from the piezoelectric element for detection with the vibration of the vibrating portion, wherein the piezoelectric element for detection is placed in an area containing a center of the vibrating portion.

Abstract: According to the present invention, a piezoelectric film having a single crystal structure is able to be formed, from various piezoelectric materials, on a film structure of the present invention. A film structure according to the present invention includes: a substrate; a buffer film which is formed on the substrate and has a tetragonal crystal structure containing zirconia; a metal film containing a platinum group element, which is formed on the buffer film by means of epitaxial growth; and a film containing Sr(Ti1?x, Rux)O3 (wherein 0?x?1), which is formed on the metal film by means of epitaxial growth.

Abstract: A thermoelectric module includes a substrate, an electrode provided on a first surface of the substrate, a thermoelectric element, and a first diffusion prevention layer disposed between the electrode and the thermoelectric element. The first diffusion prevention layer includes a first material having a lower ionization tendency than that of hydrogen.

Abstract: A piezoelectric drive device includes a vibrating part, and a control unit that controls vibration of the vibrating part, wherein the vibrating part includes a piezoelectric material having a first surface and a second surface in a front-back relation, a drive electrode having a first electrode arranged at the first surface and a second electrode arranged at the second surface, and vibrating the piezoelectric material when a drive signal from the control unit is input to the second electrode, and a detection electrode having a third electrode arranged at the first surface and a fourth electrode arranged at the second surface, and outputting a detection signal according to the vibration of the piezoelectric material to the control unit via the fourth electrode, and the first electrode and the third electrode are separated on the first surface, and the second electrode and the fourth electrode are separated on the second surface.

Abstract: A piezoelectric actuator includes a vibration portion, a support portion that is integrally configured with the vibration portion and supports the vibration portion, and a piezoelectric element that is disposed on the vibration portion. The piezoelectric element includes a piezoelectric film including columnar crystal grains extending in a thickness direction. When a thickness of the piezoelectric film is referred to as T [?m] and an average diameter of the crystal grains in the width direction is referred to as D [?m], T/D is within a range of 10 to 100. The thickness T of the piezoelectric film is larger than or equal to 2 ?m. A standard deviation of diameters of the crystal grains in the width direction is less than or equal to 1.8 ?m.

Abstract: A piezoelectric driving device includes a first substrate having cleavability, and a piezoelectric element placed above the first substrate, wherein a cleavage direction of the first substrate and a direction in which a shear force is applied do not coincide in a plan view of the first substrate. Further, an angle formed by the cleavage direction of the first substrate and the direction in which the shear force is applied is equal to or larger than 20° in the plan view of the first substrate. Furthermore, the first substrate contains silicon single crystal.

Abstract: A piezoelectric driving device includes a substrate, a first insulating film disposed on the substrate, a piezoelectric element for driving disposed on the first insulating film and configured to vibrate the substrate, a piezoelectric element for detection configured to detect the vibration of the substrate, a wire for driving electrically connected to the piezoelectric element for driving, a wire for detection electrically connected to the piezoelectric element for detection, and a lower layer wire disposed between the first insulating film and the substrate and set to fixed potential. At least one of the wire for driving and the wire for detection overlaps at least a part of the lower layer wire.

Abstract: A piezoelectric drive device includes: a vibrating body having a first surface and a second surface provided with a recessed portion; and a piezoelectric element provided on the first surface. The recessed portion and the piezoelectric element have an overlap region when viewed in a normal direction of the second surface.

Abstract: An encoder scale includes a tabular base material and an optical pattern provided above one surface of the base material, a first region and a second region being disposed side by side above the optical pattern. The first region includes a resin layer disposed above the base material and including photosensitive resin and a metal film disposed above the resin layer and formed of a metal material. The surface of the first region is configured mainly by a first surface having a normal line in the thickness direction of the base material. The surface of the second region is configured mainly by a second surface inclined with respect to the first surface.

Abstract: An encoder scale includes a plate-shaped base mount and an optical pattern that is provided on one surface of the base mount and has alternately arranged first regions and second regions. The first regions are each primarily formed of a first surface a normal to which extends in the thickness direction of the base mount, and the second regions are each primarily formed of a second surface that inclines with respect to the first surface.

Abstract: A piezoelectric drive device includes a vibrating part, and a control unit that controls vibration of the vibrating part, wherein the vibrating part includes a piezoelectric material having a first surface and a second surface in a front-back relation, a drive electrode having a first electrode arranged at the first surface and a second electrode arranged at the second surface, and vibrating the piezoelectric material when a drive signal from the control unit is input to the second electrode, and a detection electrode having a third electrode arranged at the first surface and a fourth electrode arranged at the second surface, and outputting a detection signal according to the vibration of the piezoelectric material to the control unit via the fourth electrode, and the first electrode and the third electrode are separated on the first surface, and the second electrode and the fourth electrode are separated on the second surface.

Abstract: A piezoelectric driving device includes a vibrating portion including a piezoelectric element for driving and a piezoelectric element for detection and vibrating by driving of the piezoelectric element for driving, a drive circuit that generates a drive signal for driving the piezoelectric element for driving, and a detection circuit that detects vibration of the vibrating portion based on a detection signal output from the piezoelectric element for detection with the vibration of the vibrating portion, wherein the piezoelectric element for detection is placed in an area containing a center of the vibrating portion.

Abstract: A piezoelectric driving device includes a first substrate having cleavability, and a piezoelectric element placed above the first substrate, wherein a cleavage direction of the first substrate and a direction in which a shear force is applied do not coincide in a plan view of the first substrate. Further, an angle formed by the cleavage direction of the first substrate and the direction in which the shear force is applied is equal to or larger than 20° in the plan view of the first substrate. Furthermore, the first substrate contains silicon single crystal.

Abstract: An optical scale includes a tabular base material and an optical pattern provided above a principal plane of the base material and including a first region where a resin layer including photosensitive resin is formed and a second region where the resin layer is not formed. The optical pattern includes a pigment.

Abstract: An encoder scale includes a tabular base material and an optical pattern provided above one surface of the base material, a first region and a second region being disposed side by side above the optical pattern. The first region includes a resin layer disposed above the base material and including photosensitive resin and a metal film disposed above the resin layer and formed of a metal material. The surface of the first region is configured mainly by a first surface having a normal line in the thickness direction of the base material. The surface of the second region is configured mainly by a second surface inclined with respect to the first surface.