Abstract: An electronic component enclosed in a protective packaging, the protective packaging comprises a gel material and an electrically conductive filler material. The electrically conductive filler material is mixed into the gel material for formulating a package filler. The package filler is configured to form a protective layer over the electronic component for attenuating at least part of an electromagnetic wave input to the electronic component according to input wave strength.

Abstract: The interior of a vacuum chamber is maintained at a specified pressure by introducing a specified gas into the vacuum chamber having a plasma trap provided therein. Simultaneously, therewith, evacuation of the chamber is performed by a pump as an evacuating device, and a high-frequency power of 100 MHz is supplied to a counter electrode by counter-electrode use high-frequency power supply. Thus, uniform plasma is generated within the vacuum chamber, where plasma processing such as etching, deposition, and surface reforming can be carried out uniformly with a substrate placed on a substrate electrode.

Abstract: A sheet-shaped heat pipe including working fluid, a partition plate having a vapor flow path which is formed by a concave portion provided in a spacer and through which vapor of the working fluid passes and a fluid flow path provided on an inner surface of the concave portion through which the working fluid passes, a container with an opening portion, which includes the working fluid and the partition plate inside thereof, and a sealed portion for hermetically sealing the opening portion of the container. Since container has a laminated structure of at least a metal film and a resin film, it realizes a sheet-shaped heat pipe with high flexibility and little deterioration of a sealing performance.

Abstract: A sheet type fluid circulating apparatus includes: a fluid path having a closed structure provided in an inner space of a stacked flexible sheet; fluid filled in the fluid path; a fluid transport unit provided in at least a part of the fluid path of the flexible sheet to circulate the fluid in the fluid path; and a control ciruit unit for controlling the fluid transport unit. A flexible compact light-weight sheet type fluid circulating apparatus can be provided, and a circuit board or a specimen in a biomedical process can be individually and optimally cooled.

Abstract: The interior of a vacuum chamber is maintained at a specified pressure by introducing a specified gas into the vacuum chamber having a plasma trap provided therein. Simultaneously, therewith, evacuation of the chamber is performed by a pump as an evacuating device, and a high-frequency power of 100 MHz is supplied to a counter electrode by counter-electrode use high-frequency power supply. Thus, uniform plasma is generated within the vacuum chamber, where plasma processing such as etching, deposition, and surface reforming can be carried out uniformly with a substrate placed on a substrate electrode.

Abstract: The interior of a vacuum chamber is maintained at a specified pressure by introducing a specified gas into the vacuum chamber having a plasma trap provided therein. Simultaneously, therewith, evacuation of the chamber is performed by a pump as an evacuating device, and a high-frequency power of 100 MHz is supplied to a counter electrode by counter electrode use high-frequency power supply. Thus, uniform plasma is generated within the vacuum chamber, where plasma processing such as etching, deposition, and surface reforming can be carried out uniformly with a substrate placed on a substrate electrode.

Abstract: An apparatus for producing panned tones comprises tone generator for generating a plurality of tone signals, the tone generator including a plurality of channels each for generating one of the plurality of tone signals. The plurality of tone signals generated by the tone generator are grouped into a plurality of groups. A pan setting device is provided for setting, for each of the plurality of groups, a manner of how the respective groups are pan-controlled. A pan effecting device is provided for automatically pan controlling said each of the plurality of groups based on respective settings of the pan setting device so that tone panning effects are produced according to each of the plurality of groups. The pan setting device sets characteristic for each of the plurality of groups to move a location of a formed sound image periodically when the plurality of groups of tone signals is output.