Abstract: An imaging head 100 includes a laser projector 110, an LED projector 120, a light receiving lens 132, a light receiver 131, and a processor 200. The laser projector 110 emits measurement light to a workpiece W. The LED projector 120 emits uniform observation light to the workpiece W. The light receiving lens 132 converges reflected light of the measurement light and reflected light of the observation light that are reflected back from the workpiece W. The light receiver 131 has a light receiving surface composed of multiple light receiving elements that are two-dimensionally arranged. The laser projector 110, the light receiver 131, and the light receiving lens 132 are arranged so that a plane containing the light receiving surface and a plane containing the principal plane of the light receiving lens 132 will satisfy the Scheimpflug condition relative to a light projection axis of the laser projector 110.

Abstract: An imaging head 100 includes a laser projector 110, an LED projector 120, a light receiving lens 132, a light receiver 131, and a processor 200. The laser projector 110 emits measurement light to a workpiece W. The LED projector 120 emits uniform observation light to the workpiece W. The light receiving lens 132 converges reflected light of the measurement light and reflected light of the observation light that are reflected back from the workpiece W. The light receiver 131 has a light receiving surface composed of multiple light receiving elements that are two-dimensionally arranged. The laser projector 110, the light receiver 131, and the light receiving lens 132 are arranged so that a plane containing the light receiving surface and a plane containing the principal plane of the light receiving lens 132 will satisfy the Scheimpflug condition relative to a light projection axis of the laser projector 110.

Abstract: A light source irradiates the measuring object with slit light having a width in an X direction. An image sensor receives reflected light from the measuring object, has a plurality of pixels two-dimensionally arranged in a U direction corresponding to the X direction and a V direction corresponding to a Z direction, and outputs a light receiving amount of the reflected light. A detecting unit detects a position of a pixel in the V direction. A generating unit generates a profile of the X-Z cross section from each position of the plurality of pixel rows in the U direction and the peak position in the V direction. A resolution in the V direction of the image sensor is lower than a resolution in the U direction of the image sensor.

Abstract: A light source irradiates the measuring object with slit light having a width in an X direction. An image sensor receives reflected light from the measuring object, has a plurality of pixels two-dimensionally arranged in a U direction corresponding to the X direction and a V direction corresponding to a Z direction, and outputs a light receiving amount of the reflected light. A detecting unit detects a position of a pixel in the V direction. A generating unit generates a profile of the X-Z cross section from each position of the plurality of pixel rows in the U direction and the peak position in the V direction. A resolution in the V direction of the image sensor is lower than a resolution in the U direction of the image sensor.