Abstract: A method for manufacturing a semiconductor device in which probes and the layout of the electrode pads of a test element group (TEG) are associated is provided. As a semiconductor device is miniaturized, a scribe area on a wafer also tends to decrease. Accordingly, it is necessary to reduce the size of a TEG arranged in the scribe area, and efficiently arrange an electrode pad for probe contact. Thus, it is necessary to associate the probes and the layout of the electrode pad. According to the method, a layout of a TEG electrode pad corresponding to a plurality of probes arranged in a fan shape or probes manufactured by Micro Electro Mechanical Systems (MEMS) technology is provided.

Abstract: A modulation error is detected every symbol data to generate a trigger signal. The present invention focuses that there are limited patterns of shifts from one symbol data to the next one of the digital modulation signal. Measured values of amplitude, phase and/or frequency of symbol data are latched and then values at the next symbol timing are predicted from the latched measured values using said feature. The predicted and measured values are compared at the following symbol timing. If the difference (error) is over an acceptable range, a trigger signal is provided which allows acquiring a modulation error by symbol data.

Abstract: A signal analyzer provides frequency domain data at different time and frequency resolution. First type frequency domain data is derived from time domain data of a signal under test by first type frames and displayed as a spectrogram. A selecting box is displayed on the spectrogram for selecting the first type frames. The signal analyzer produces second type frequency domain data by treating the time domain data corresponding to the first type frequency domain data included in the selected first type frames with the selecting box as one frame by FFT calculation. The resultant second type frequency domain data are displayed as a spectrum that has different time and frequency resolution from the spectrogram.

Abstract: A first frequency analysis range and a second frequency analysis range narrower than the first one are set with an operation panel 34, etc. A first signal path 171 produces first time domain data of a frequency converted signal under test by a first data production rate depending on the first frequency analysis range. A second signal path 172 produces second time domain data of frequency converted signal under test by a second data production rate depending on the second frequency analysis range and slower than the first data production rate. A CPU receives the first and second time domain data in parallel and produces first and second frequency domain data by FFT wherein frequency shift amounts in the frequency conversions in the first and second signal paths are different depending on the difference between the center frequencies of the first and second frequency analysis ranges.

Abstract: A modulation error is detected every symbol data to generate a trigger signal. The present invention focuses that there are limited patterns of shifts from one symbol data to the next one of the digital modulation signal. Measured values of amplitude, phase and/or frequency of symbol data are latched and then values at the next symbol timing are predicted from the latched measured values using said feature. The predicted and measured values are compared at the following symbol timing. If the difference (error) is over an acceptable range, a trigger signal is provided which allows acquiring a modulation error by symbol data.

Abstract: A rectangle marker on a display of a signal analyzer simultaneously designates time and frequency intervals of data from a signal under test for analysis. The data of the signal under test is displayed as a graph having time and frequency axes. Sub-graphs show data designated by the rectangle marker as processed in the time domain, frequency domain and modulation domain. The resulting display provides an overview of the signal under test and simultaneously provides displays of measurements and analyzes for a designated portion of the data.

Abstract: A signal analyzer provides frequency domain data at different time and frequency resolution. First type frequency domain data is derived from time domain data of a signal under test by first type frames and displayed as a spectrogram. A selecting box is displayed on the spectrogram for selecting the first type frames. The signal analyzer produces second type frequency domain data by treating the time domain data corresponding to the first type frequency domain data included in the selected first type frames with the selecting box as one frame by FFT calculation. The resultant second type frequency domain data are displayed as a spectrum that has different time and frequency resolution from the spectrogram.

Abstract: While combining AD converters that one is wide band but narrow dynamic range and the other is narrow band but wide dynamic range, it allows settings to provide a common intermediate frequency signal to the AD converters. A first BPF 50 provides a first AD converter 54 with the output signal obtained by getting an intermediate frequency signal Sif through a first band in the second Nyquist zone of the first AD converter 54. A second BPF 52 provides a second AD converter 56 with the output signal obtained by getting the intermediate frequency signal Sif through a second band in the third Nyquist zone of the second AD converter 56. At this time, the second band is set in the center portion of the second Nyquist zone band, and the first band is set in the center portion of the band of the intermediate frequency signal.

Abstract: A signal analyzer repetitively memorizes waveform data of a signal under test to detect peaks P1-P6 of the waveform data. Waveform widths of the waveform data at a mask reference level, or a predetermined level down from the respective peaks, are evaluated as mask reference widths and then masks of the respective peaks are set using the mask reference level and mask reference widths. Hence the masks are automatically set, so a user can easily obtain time domain data and/or frequency domain data including characterizing portions in the signal under test.

Abstract: To produce data of an initial analysis range and a range zooming a part of it while updating them in parallel. [Means for resolution] A first frequency analysis range and a second frequency analysis range that is narrower than the first one are set with an operation panel 34, etc. A first signal path 171 produces first time domain data of a frequency converted signal under test according to a first data production rate that is set depending on the first frequency analysis range. A second signal path 172 produces second time domain data of frequency converted signal under test according to a second data production rate that is set depending on the second frequency analysis range and is slower than the first data production rate.

Abstract: A plurality of RF signals are generated with the RF signals synchronized with each other with high accuracy. Transmission data of the multiple channels are modulated, the modulated data of the channels are added to produce composite data and the composite data is stored in a data storage device. In the modulation process, the carrier frequencies are different from each other. The composite data comprises the data of the channels modulated in the frequency division multiplexing manner. The composite data is converted into an analog composite signal by a D/A converter and this analog signal is upconverted to an RF frequency by a frequency conversion circuit. A signal separation circuit produces two channel signals from the RF frequency signal. A signal output circuit generates the output signals having desired frequencies and signal levels.

Abstract: Time variation of phase noise characteristics is displayed for measurement. A peak power of a signal under test is detected to define the frequency as a reference frequency. An offset frequency from the reference frequency is repetitively changed and each time the phase noise power is integrated for a predetermined frequency width to evaluate an integration value. The integration values are divided by the predetermined frequency width. The divided values are further divided by the peak power to evaluate noise power ratios relative to the peak power. Then, relationship between the offset frequencies, noise characteristic values and time is displayed in a graph that shows the time variation of the phase noise characteristics.

Abstract: A data processing method is provided to enable a calculation based signal analyzer, such as an FFT based spectrum analyzer, to produce results corresponding to a swept spectrum analyzer employing a video bandwidth (VBW) filter. Once a spectrum is produced the frequency axis is replace by a corresponding time axis, so that a time domain filter, such as a video bandwidth (VBW) filter can be applied. The filter characteristics are applied by performing an FFT to produce frequency domain data, multiplying by the frequency response to produce a filtered version, performing an inverse FFT and replacing the time axis with the original frequency axis to produce a filtered version of the display spectrum data.

Abstract: While combining AD converters that one is wide band but narrow dynamic range and the other is narrow band but wide dynamic range, it allows settings to provide a common intermediate frequency signal to the AD converters. A first BPF 50 provides a first AD converter 54 with the output signal obtained by getting an intermediate frequency signal Sif through a first band in the second Nyquist zone of the first AD converter 54. A second BPF 52 provides a second AD converter 56 with the output signal obtained by getting the intermediate frequency signal Sif through a second band in the third Nyquist zone of the second AD converter 56. At this time, the second band is set in the center portion of the second Nyquist zone band, and the first band is set in the center portion of the band of the intermediate frequency signal.

Abstract: An up-converter 124 frequency-up-converts an analog signal Sm. A down-converter 121 frequency-down-converts analog signal Sm. A signal selection block 125 selects one of the frequency-up-converted signal Sfu and frequency-down-converted signal Sfd. The signal Se selected by the signal selection block 125 is provided to the primary winding of a transformer 127. A signal induced in the secondary winding of the transformer 127 is provided to an A/D converter 128 to produce a digital signal Dm. For example, if the analog signal Sm has DC or a low frequency close to DC, the signal Sfu is selected as the signal Se. If the analog signal Sm does no have DC nor a low frequency close to DC, the signal Sfd is selected as the signal Se.

Abstract: A wideband signal analyzer has a plurality of frequency conversion paths for simultaneously processing different contiguous frequency bands of an input signal. Each frequency conversion path provides time domain data for input to a digital signal processor. The digital signal processor interpolates each group of time domain data to produce interpolated time domain data having a number of data points that satisfies a Nyquist condition for a combined bandwidth of the frequency conversion paths. A calibration signal set to a border frequency between a pair of frequency conversion channels is used to calibrate the gains and phase differences between the frequency conversion paths so that the digital signal processor identifies corresponding time domain data between the interpolated time domain data groups. A suite of frequency domain data is calculated by the digital signal processor from the interpolated time domain data groups and stored for subsequent display.

Abstract: An up-converter 124 frequency-up-converts an analog signal Sm. A down-converter 121 frequency-down-converts analog signal Sm. A signal selection block 125 selects one of the frequency-up-converted signal Sfu and frequency-down-converted signal Sfd. The signal Se selected by the signal selection block 125 is provided to the primary winding of a transformer 127. A signal induced in the secondary winding of the transformer 127 is provided to an A/D converter 128 to produce a digital signal Dm. For example, if the analog signal Sm has DC or a low frequency close to DC, the signal Sfu is selected as the signal Se. If the analog signal Sm does no have DC nor a low frequency close to DC, the signal Sfd is selected as the signal Se.

Abstract: A plurality of RF signals are generated with the RF signals synchronized with each other with high accuracy. Transmission data of the multiple channels are modulated, the modulated data of the channels are added to produce composite data and the composite data is stored in a data storage device. In the modulation process, the carrier frequencies are different from each other. The composite data comprises the data of the channels modulated in the frequency division multiplexing manner. The composite data is converted into an analog composite signal by a D/A converter and this analog signal is upconverted to an RF frequency by a frequency conversion circuit. A signal separation circuit produces two channel signals from the RF frequency signal. A signal output circuit generates the output signals having desired frequencies and signal levels.

Abstract: A signal analyzer repetitively memorizes waveform data of a signal under test to detect peaks P1-P6 of the waveform data. Waveform widths of the waveform data at a mask reference level, or a predetermined level down from the respective peaks, are evaluated as mask reference widths and then masks of the respective peaks are set using the mask reference level and mask reference widths. Hence the masks are automatically set, so a user can easily obtain time domain data and/or frequency domain data including characterizing portions in the signal under test.

Abstract: A frequency down converter that maintains accuracy even if the frequency pass band is wide uses a reference frequency band within the frequency pass band, the reference frequency band being resistant to degradation by aging or temperature variation. The ideal characteristics of the reference frequency band are previously stored. The frequency down converter has a calibration signal source that inputs a calibration signal to the frequency down converter to measure the characteristics of the reference frequency band and to store differences from the ideal characteristics. The calibration signal is input to obtain the characteristic data of other frequency bands within the frequency pass band, and the characteristic data are revised by the above differences. Then compensation coefficients to compensate the revised characteristic data into the ideal characteristics are calculated.