Abstract: A method for manufacturing a semiconductor device in which probes and the layout of the electrode pads of a test element group (TEG) are associated is provided. As a semiconductor device is miniaturized, a scribe area on a wafer also tends to decrease. Accordingly, it is necessary to reduce the size of a TEG arranged in the scribe area, and efficiently arrange an electrode pad for probe contact. Thus, it is necessary to associate the probes and the layout of the electrode pad. According to the method, a layout of a TEG electrode pad corresponding to a plurality of probes arranged in a fan shape or probes manufactured by Micro Electro Mechanical Systems (MEMS) technology is provided.

Abstract: An autonomous, decentralized fast breeder reactor includes a single reactor main vessel which houses a plurality of small-size reactor subsystems each having a small-scale fast breeder reactor core, and a plurality steam generator subsystems. These subsystems function in an autonomous manner and are caused to undergo a heat transfer with one another by a coolant circulating naturally through the interior of the main vessel, thereby constructing a cooperatively operating system. Steam generated by the steam generators is introduced to a turbine system and utilized in generating electricity. The condensate from the turbines is cooled by a heat accumulating pool, and the heat is utilized in a separate system. The entire system is installed underground and use is made of the difference in elevation. Use also is made of solid bedrock to construct a housing facility for the reactor.