Abstract: An etalon is provided with a fixed substrate and a movable substrate opposed to the fixed substrate. The fixed substrate is provided with a first bonding surface to be bonded to the movable substrate via a bonding film and a first electrode surface on which a part of the first electrode is formed. The movable substrate is provided with a second bonding surface to be bonded to the first bonding surface via the bonding film and a second electrode surface on which a part of the second electrode is formed. In the state in which the fixed substrate and the movable substrate are bonded to each other with the bonding film, the first electrode formed on the first electrode surface and the second electrode formed on the second electrode surface have contact with each other.

Abstract: A spectroscopic camera is provided with a pair of reflecting films, and a wavelength variable interference filter including an electrostatic actuator which can change a size of the gap between the pair of reflecting films, an imaging unit which includes a plurality of pixels which is disposed in a two-dimensional array structure, and receives the light transmitted to the wavelength variable interference filter, and a received-light wavelength acquiring unit which acquires a central wavelength of the light which is incident on the pixel with respect to each of the pixels in the imaging unit, in which the received-light wavelength acquiring unit acquires the central wavelength based on an incidence angle in a position where the light which is received in each of the pixels is incident to the pair of reflecting films.

Abstract: An optical filter includes a first substrate, a second substrate that is opposed to the first substrate, a first reflecting section that is disposed between the first substrate and the second substrate, a second reflecting section that is disposed between the first reflection section and the second substrate, a first gap existing between the first reflecting section and the second reflecting section, a first electrode that is disposed between the first substrate and the second substrate, a second electrode that is disposed between the first electrode and the second substrate, a second gap existing between the first electrode and the second electrode, and a third electrode that is disposed between the first substrate and the second electrode. The second gap is larger than the first gap.

Abstract: An optical module includes a variable wavelength interference filter that has a pair of reflection films facing one another, and that emits light with a wavelength according to the gap dimensions of the pair of reflection films; an incident side optical system as a negative power lens group that guides an incident luminous flux to the variable wavelength interference filter; and a light guiding optical system as a positive power lens group on which a luminous flux passing through the variable wavelength interference filter is incident, in which the incident side optical system guides the incident luminous flux to the variable wavelength interference filter as a luminous flux in which the principal ray is parallel with respect to the optical axis (central optical axis) orthogonal to the pair of reflection films and that is scattered with respect to the principal ray, and the light guiding optical system makes the luminous flux scattered with respect to the principal ray a parallel luminous flux.

Abstract: A tunable interference filter comprising a first substrate, a second substrate facing the first substrate, a first reflection film formed on the first substrate, a second reflection film formed on the second substrate, the second reflection film facing the first reflection film by interposing a gap, and a gap adjustable-part that adjusts the gap, wherein the second substrate has a first surface and a second surface opposed to the first surface, wherein the second substrate includes a first groove on the first surface, and wherein the second substrate includes a second groove on the second surface, the second groove facing the first groove.

Abstract: A tunable interference filter includes: first and second opposed substrates; a first reflection film provided on a first reflection film fixing surface of the first substrate; a second reflection film provided on a second reflection film fixing surface of the second substrate and separated from the first reflection film by a gap; and a first electrode provided on a first electrode surface of the first substrate facing the second substrate, wherein the first electrode surface is spaced apart from the second substrate by a different distance than the first reflection film fixing surface, and a layered part in which the first reflection film and the first electrode are stacked is provided on the first electrode surface, the layered part being spaced apart from the second substrate by a larger distance than the first reflection film fixing surface.

Abstract: An optical filter includes a first substrate, a second substrate that is opposed to the first substrate, a first reflecting section that is disposed between the first substrate and the second substrate, a second reflecting section that is disposed between the first reflection section and the second substrate, a first gap existing between the first reflecting section and the second reflecting section, a first electrode that is disposed between the first substrate and the second substrate, a second electrode that is disposed between the first electrode and the second substrate, a second gap existing between the first electrode and the second electrode, and a third electrode that is disposed between the first substrate and the second electrode. The second gap is larger than the first gap.

Abstract: A wavelength-tunable interference filter comprising a first substrate, a second substrate facing the first substrate, a first reflective film provided on the first substrate, a second reflective film provided on the second substrate, the second reflective film facing the first reflective film, a first electrode provided on the first substrate, and a second electrode provided on the second substrate, the second electrode facing the first electrode, wherein the first electrode includes a first electrode layer and a second electrode layer, the first electrode layer has a first in-plane internal stress which is compressive, and the second electrode layer has a second in-plane internal stress which is tensile.

Abstract: A spectrometer includes: a wavelength-variable interference filter that can change a wavelength of selected light and disperses light from a measurement target; an imaging unit that receives light components with a plurality of wavelengths which are dispersed by the wavelength-variable interference filter and acquires a plurality of spectral images; a positional deviation amount detection unit that selects a standard image from the plurality of spectral images acquired by the imaging unit and detects a positional deviation amount of a pixel position which receives light from a predetermined position of the measurement target between the standard image and at least one of the spectral images other than the standard image; and a position correction unit that positions the spectral images other than the standard image on the basis of the detected positional deviation amount.

Abstract: An optical filter includes: a first substrate; a second substrate opposed to the first substrate; a first reflecting film provided to the first substrate; a second reflecting film provided to the second substrate and opposed to the first reflecting film; a first electrode provided to the first substrate in a peripheral area of the first reflecting film; a second electrode provided to the first substrate in a peripheral area of the first electrode; a third electrode provided to the second substrate and opposed to the first electrode; and a fourth electrode provided to the second substrate and opposed to the second electrode.

Abstract: A spectrometry system includes an imaging apparatus that includes an imaging element which captures an image, and a spectroscopic module that includes a wavelength variable interference filter and an attachment unit which holds the wavelength variable interference filter, is provided to be attachable to and detachable from the imaging apparatus, and can dispose the wavelength variable interference filter on an optical path of incident light to the imaging element during attachment to the imaging apparatus.

Abstract: A tunable interference filter includes: first and second opposed substrates; a first reflection film provided on a first reflection film fixing surface of the first substrate; a second reflection film provided on a second reflection film fixing surface of the second substrate and separated from the first reflection film by a gap; and a first electrode provided on a first electrode surface of the first substrate facing the second substrate, wherein the first electrode surface is spaced apart from the second substrate by a different distance than the first reflection film fixing surface, and a layered part in which the first reflection film and the first electrode are stacked is provided on the first electrode surface, the layered part being spaced apart from the second substrate by a larger distance than the first reflection film fixing surface.

Abstract: A wavelength variable interference filter includes a plurality of filter units each of which includes a pair of reflecting films facing each other and a gap changing unit changing an interval between the pair of reflecting films. The plurality of filter units are two-dimensionally disposed with respect to an arrangement surface parallel to a reflecting surface of the reflecting film, and reflecting films of other filter units disposed at locations different from those on a first virtual straight line, intersecting a predetermined direction (first direction) along the arrangement surface, are disposed so as to overlap a portion of the reflecting films on the first virtual straight line without gaps therebetween between two reflecting films adjacent with a predetermined interval therebetween along the first virtual straight line, when seen from the predetermined direction (first direction).

Abstract: A spectroscopic measurement apparatus includes a wavelength tunable interference filter that selects light of a predetermined wavelength from incident light, allows the selected light to exit, and is capable of changing the wavelength of the light that is allowed to exit, a light dividing element that divides the exiting light having exited out of the wavelength tunable interference filter into a plurality of light fluxes, and a first light receiving device and a second light receiving device that are provided in correspondence with the plurality of divided light fluxes divided by the light dividing element and have sensitivities different from each other.

Abstract: An optical filter includes: a first substrate; a second substrate opposed to the first substrate; a first reflecting film provided to the first substrate; a second reflecting film provided to the second substrate and opposed to the first reflecting film; a first electrode provided to the first substrate in a peripheral area of the first reflecting film; a second electrode provided to the first substrate in a peripheral area of the first electrode; a third electrode provided to the second substrate and opposed to the first electrode; and a fourth electrode provided to the second substrate and opposed to the second electrode.

Abstract: A variable wavelength interference filter includes a stationary substrate, a stationary reflecting film disposed on the entire surface of the stationary substrate opposed to a movable substrate, and formed of a multilayer film, a movable reflecting film opposed to the stationary reflecting film, and a first mirror electrode disposed on the stationary reflecting film.

Abstract: An actuator drive system includes electrostatic actuators and a voltage controller that applies drive voltages to the electrostatic actuators, and the voltage controller includes a digital control device that splits an 8-bit drive variable corresponding to an overall displacement amount provided by the electrostatic actuators into 4-bit individual drive variables, a first DAC that produces a first drive voltage signal based on a first individual drive variable, and a second DAC that produces a second drive voltage signal based on a second individual drive variable.

Abstract: A variable wavelength interference filter includes a stationary reflecting film formed of a plurality of layers, an outermost layer of which is a stationary conductive layer, and a movable reflecting film, the stationary reflecting film includes a first region opposed to the movable reflecting film and a second region continuing from an outer circumferential edge of the first region to an outside of the first region, and a part of the stationary conductive layer in the second region is a terminal section to which wiring connection can be performed.

Abstract: An optical filter includes a first substrate, a second substrate that is opposed to the first substrate, a first reflecting section that is disposed between the first substrate and the second substrate, a second reflecting section that is disposed between the first reflection section and the second substrate, a first gap existing between the first reflecting section and the second reflecting section, a first electrode that is disposed between the first substrate and the second substrate, a second electrode that is disposed between the first electrode and the second substrate, a second gap existing between the first electrode and the second electrode, and a third electrode that is disposed between the first substrate and the second electrode. The second gap is larger than the first gap.

Abstract: A variable wavelength interference filter includes: a first reflective film disposed on a face of a first substrate facing a second substrate; a second reflective film disposed on a face of the second substrate facing the first substrate and the first reflective film; a first electrode disposed on the face of the first substrate; and a second electrode disposed on the face of the second substrate. The second substrate includes a movable portion on which the second reflective film is disposed and a connection maintaining portion maintaining the movable portion to be movable in a substrate thickness direction, the connection maintaining portion circumscribes the movable portion and is thinner than the movable portion, and the second electrode is disposed on a portion of the second substrate that is thicker than the connection maintaining portion.