Abstract: A plasma generator in which the variation of the impedance in the cavity before and after plasma is ignited is less and hardly affected by the shape of the cavity, and the ignitability of the plasma is improved and a method of generating plasma using the plasma generator are provided. The plasma generator comprises a nonconductive gas flow pipe (1) for introducing a gas (9) for generating plasma and discharging it into the atmosphere and a conductive antenna pipe (2) surrounding the gas flow pipe. A microwave (7) is applied to the antenna pipe to change the gas in the gas flow pipe into plasma. The plasma generator is characterized in that a slit (3) with a predetermined length is formed in the antenna pipe (2) along the axial direction of the gas flow pipe. Preferably, the plasma generator is characterized in that the length of the slit is an integral multiple of the half-wave length of the applied microwave.

Abstract: An object of the invention is to provide a plasma generating device and method for generating plasma through electrodeless discharge within a long tubule and carrying out a plasma process on the inside of the long tubule. The plasma generating device has a container 1 for containing a long tubule 9, the internal pressure of which can be adjusted, a magnetic field applying means 8 for applying a magnetic field in at least part of the long tubule, and a microwave supplying means 2 for emitting microwaves into the container, and is characterized in that plasma is generated within the long tubule by emitting microwaves into the container in such a state that a magnetic field is applied in at least part of the long tubule.

Abstract: It is intended to provide a sterilizer, which aim is at efficiently sterilizing a subject such as a container by using active oxygen generated with the use of plasma, and a sterilization method using the same. In particular, it is intended to develop a technique for stably generating active oxygen with the use of plasma and thus provide a sterilizer, which enables, if necessary, stable plasma formation and active oxygen generation in the atmosphere and can inhibit thermal damages caused by the plasma on a subject to be sterilized, and a sterilization method using the same.

Abstract: A plasma generator in which the variation of the impedance in the cavity before and after plasma is ignited is less and hardly affected by the shape of the cavity, and the ignitability of the plasma is improved and a method of generating plasma using the plasma generator are provided. The plasma generator comprises a nonconductive gas flow pipe (1) for introducing a gas (9) for generating plasma and discharging it into the atmosphere and a conductive antenna pipe (2) surrounding the gas flow pipe. A microwave (7) is applied to the antenna pipe to change the gas in the gas flow pipe into plasma. The plasma generator is characterized in that a slit (3) with a predetermined length is formed in the antenna pipe (2) along the axial direction of the gas flow pipe. Preferably, the plasma generator is characterized in that the length of the slit is an integral multiple of the half-wave length of the applied microwave.