Patents by Inventor Akniobu Teramoto

Akniobu Teramoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Internal pressure controller of chamber and internal pressure subject-to-control type chamber
    Patent number: 7798167
    Abstract: A gas supply facility includes a plurality of pressure type flow controllers connected in parallel, and a first controller to control operation of the plurality of pressure type flow controllers so as to supply a desired gas exhausted by a vacuum pump to a chamber while controlling its flow rate, one of the pressure type flow controllers operates as a second controller to control the gas flow rate range up to 10% of the maximum flow rate supplied to the chamber, while the remaining pressure type flow controllers are made to be ones that control the rest of the gas flow rate range. Furthermore, pressure inside the chamber is controlled by installing a pressure detector in the chamber, inputting the value detected by the detector to the controller, and by adjusting a control signal to the pressure type flow controllers.
    Type: Grant
    Filed: April 6, 2006
    Date of Patent: September 21, 2010
    Assignees: Fujikin Incorporated
    Inventors: Tadahiro Ohmi, Akniobu Teramoto, Tomio Uno, Ryousuke Dohi, Kouji Nishino, Osamu Nakamura, Atsushi Matsumoto, Masaaki Nagase, Nobukazu Ikeda