Patents by Inventor Alan David Dorundo

Alan David Dorundo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for storing interferometric images of scanned defects and for subsequent static analysis of such defects
    Patent number: 5710631
    Abstract: An interferometer is used to locate and examine defects in a test surface of a test specimen. Defects are first located as the test surface is driven past the objective of the interferometer at a constant speed, with a darkfield interferogram being examined as it flows across a row of CCD elements. During this process, the location of each defect is stored. Next, the test specimen is sequentially moved into the locations at which static measurements are made using an area array of CCD elements. During these measurements, the phase angle relationship of the interferometer is varied so that heights of surface segments may be calculated. If some to these segments are located more than a quarter wave length of the interferometer light source from the surface at which the darkfield is established, a process is used to perform height corrections for segments within transition boundaries.
    Type: Grant
    Filed: January 27, 1997
    Date of Patent: January 20, 1998
    Assignee: International Business Machines Corporation
    Inventors: Akram Aref Bou-Ghannam, Alan David Dorundo, Michael Gerard Lisanke, Huizong Lu, Lanphuong Thi Pena, Ali Reza Taheri, Samuel Sheung-Lok So, Kenneth Wayne Watts, Darell Smith Whitaker