Patents by Inventor Alan M. Todd

Alan M. Todd has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for producing terahertz radiation
    Patent number: 7473914
    Abstract: An apparatus for producing an annular electron beam comprises a cathode for generating electrons, a cavity having an annular shape and operable to receive the electrons, an energy input coupled to the cavity, where the energy input is operable to supply Radio Frequency (RF) energy at the cavity and an energy output coupled to the cavity and operable to receive accelerated electrons from the cavity and operable to output the accelerated electrons as an annular electron beam.
    Type: Grant
    Filed: July 21, 2005
    Date of Patent: January 6, 2009
    Assignee: Advanced Energy Systems, Inc.
    Inventors: Alan M. Todd, Hans Peter Bluem, Robert Henry Jackson, Jr.
  • Method and apparatus for producing extreme ultra-violet light for use in photolithography
    Patent number: 6133577
    Abstract: A method and apparatus for producing extreme ultra-violet light comprising a nozzle for flowing a gas at a supersonic velocity, a source for directing a radiated energy beam into the flowing gas to stimulate emission of extreme ultra-violet light therefrom, and a diffuser for capturing a substantial portion of the gas so as to mitigate contamination caused thereby. The extreme ultra-violet light so produced is suitable for use in photolithography for integrated circuit fabrication and the like.
    Type: Grant
    Filed: February 4, 1997
    Date of Patent: October 17, 2000
    Assignee: Advanced Energy Systems, Inc.
    Inventors: Robert M. Gutowski, Vincent Calia, Alan M. Todd