Abstract: Apparatus and method for substrate processing are described herein. More specifically, the apparatus and method are directed towards apparatus and method for performing a field guided post exposure bake operation on a semiconductor substrate. The apparatus is a processing module (100) and includes an upper portion (102) with an electrode (400) and a base portion (104) which is configured to support a substrate (500) on a substrate support surface (159). The upper portion (102) and the base portion (104) are actuated toward and away from one another using one or more arms (112) and form a process volume (404). The process volume (404) is filled with a process fluid and the processing module (100) is rotated about an axis (A). An electric field is applied to the substrate (500) by the electrode (400) before the process fluid is drained from the process volume (404).

Abstract: An adapter tool device for transmitting rotary energy by means of special internal driving end splines to create and cut gripping channels in threaded and unthreaded cylindrical objects adapted to fit drive end shapes of rotary power sources and transfer torque from reversible and non-reversible variable speed rotary torque power sources such as impact wrenches, impact drivers and hand wrenches for in-line coincident centerlines as well as for non-coincident angularly disposed centerlines whereby rotary power is transferred to tighten or loosen cylindrical fastening components such as bolts, screws, combination nut-bolts, threaded components, non-threaded cylindrical components and the like.

Abstract: An adapter device for transmitting rotary energy by means of various drive end portions adapted to fit openings of torque drive tools such as socket wrenches and the like and transfer torque from a rotary torque power source such as a reversible variable speed electric drill for in-line coincident centerlines as well as for non-coincident angularly disposed centerlines such as in a universal joint coupling type action, whereby rotary energy is transmitted to tighten or loosen fastening components such as bolts, nuts, screws, threaded components and the like.