Abstract: Techniques for quantifying accuracy of a prediction model that has been trained on a data set parameterized by multiple features are provided. The model performs in accordance with a theoretical performance manifold over an intractable input space in connection with the features. A determination is made as to which of the features are strongly correlated with performance of the model. Based on the features determined to be strongly correlated with performance of the model, parameterized sub-models are created such that, in aggregate, they approximate the intractable input space. Prototype exemplars are generated for each of the created sub-models, with the prototype exemplars for each created sub-model being objects to which the model can be applied to result in a match with the respective sub-model. The accuracy of the model is quantified using the generated prototype exemplars. A recommendation engine is provided for when there are particular areas of interest.

Abstract: Techniques for recommending a prediction model from among a number of different prediction models are provided. Each of these prediction models has been trained based on a respective training data set, and each performs in accordance with a respective theoretical performance manifold. An indication of a region definable in relation to the theoretical performance manifolds of the different prediction models is received as input. For each of the different prediction models, the indication of the region is linked to features parameterizing the respective performance manifold; and one or more portions of the respective performance manifold is/are identified based on the features determined by the linking, the portion(s) having a volume and a shape that collectively denote an expected performance of the respective model for the input. The expected performance of the prediction models for the input is compared. Based on the comparison, one or more of the models is/are suggested.

Abstract: Techniques for quantifying accuracy of a prediction model that has been trained on a data set parameterized by multiple features are provided. The model performs in accordance with a theoretical performance manifold over an intractable input space in connection with the features. A determination is made as to which of the features are strongly correlated with performance of the model. Based on the features determined to be strongly correlated with performance of the model, parameterized sub-models are created such that, in aggregate, they approximate the intractable input space. Prototype exemplars are generated for each of the created sub-models, with the prototype exemplars for each created sub-model being objects to which the model can be applied to result in a match with the respective sub-model. The accuracy of the model is quantified using the generated prototype exemplars. A recommendation engine is provided for when there are particular areas of interest.

Abstract: Techniques for recommending a prediction model from among a number of different prediction models are provided. Each of these prediction models has been trained based on a respective training data set, and each performs in accordance with a respective theoretical performance manifold. An indication of a region definable in relation to the theoretical performance manifolds of the different prediction models is received as input. For each of the different prediction models, the indication of the region is linked to features parameterizing the respective performance manifold; and one or more portions of the respective performance manifold is/are identified based on the features determined by the linking, the portion(s) having a volume and a shape that collectively denote an expected performance of the respective model for the input. The expected performance of the prediction models for the input is compared. Based on the comparison, one or more of the models is/are suggested.

Abstract: Techniques for recommending a prediction model from among a number of different prediction models are provided. Each of these prediction models has been trained based on a respective training data set, and each performs in accordance with a respective theoretical performance manifold. An indication of a region definable in relation to the theoretical performance manifolds of the different prediction models is received as input. For each of the different prediction models, the indication of the region is linked to features parameterizing the respective performance manifold; and one or more portions of the respective performance manifold is/are identified based on the features determined by the linking, the portion(s) having a volume and a shape that collectively denote an expected performance of the respective model for the input. The expected performance of the prediction models for the input is compared. Based on the comparison, one or more of the models is/are suggested.

Abstract: Techniques for quantifying accuracy of a prediction model that has been trained on a data set parameterized by multiple features are provided. The model performs in accordance with a theoretical performance manifold over an intractable input space in connection with the features. A determination is made as to which of the features are strongly correlated with performance of the model. Based on the features determined to be strongly correlated with performance of the model, parameterized sub-models are created such that, in aggregate, they approximate the intractable input space. Prototype exemplars are generated for each of the created sub-models, with the prototype exemplars for each created sub-model being objects to which the model can be applied to result in a match with the respective sub-model. The accuracy of the model is quantified using the generated prototype exemplars. A recommendation engine is provided for when there are particular areas of interest.

Abstract: A plasma etch processing chamber configured to clean a bevel edge of a substrate is provided. The chamber includes a bottom edge electrode and a top edge electrode defined over the bottom edge electrode. The top edge electrode and the bottom edge electrode are configured to generate a cleaning plasma to clean the bevel edge of the substrate. The chamber includes a gas feed defined through a top surface of the processing chamber. The gas feed introduces a processing gas for striking the cleaning plasma at a location in the processing chamber that is between an axis of the substrate and the top edge electrode. A pump out port is defined through the top surface of the chamber and the pump out port located along a center axis of the substrate. A method for cleaning a bevel edge of a substrate is also provided.

Abstract: Embodiments of this invention regulate temperature inside an analytical instrument housing using a heat exchanger disposed adjacent an opening in the housing. Coolant is transferred to the heat exchanger to allow the heat exchanger to regulate a temperature of air drawn into the housing and over a temperature sensitive component. In certain embodiments, the coolant is also transferred to other structures and/or components in the instrument to regulate the temperatures of those structures and/or components.