Abstract: A microelectromechanical system (MEMS) device for sensing a magnetic field comprising: a base; a cantilever attached to the base structure at a first end and movable at a second end, the second end oscillating at a predetermined frequency upon application of a current; a magnetic sensor attached to the movable second end; at least one flux concentrator mounted on the base adapted to transfer magnetic flux to the sensor; whereby when the current is applied, the oscillation of the cantilever causes the sensor to oscillate between the lines of flux transferred from the at least one flux concentrator resulting in the shift of the frequency of the sensed magnetic field to the predetermined frequency. The invention further comprises a method of making the MEMS device.

Abstract: A system for modulating a magnetic field sensor device comprising: a base; a magnetic sensor comprising a plurality of magnetic components; at least one coil for creating a magnetic field around the magnetic sensor; the at least one coil adapted to be connected to an alternating current source that passes through the coil to modulate the magnetic field at the magnetic sensor and drive at least one of the magnetic components of the magnetic sensor into and out of its region of increased magnetic response while shifting the frequency of the magnetic field that is sensed by the magnetic sensors a higher frequency to thereby minimize 1/f-type noise, where f is the frequency of operation of the magnetic sensor. The method comprises forming at least one coil around the magnetic sensor; connecting the coil to an alternating current power source; and modulating the current from the power source.

Abstract: A magnetic field sensing device comprising at least one magnetic sensor attached to a base structure, rotating member; and at least one flux concentrator mounted on the rotating member; whereby as the rotating member turns, the at least one flux concentrator shields the magnetic sensor so as to modulate the output of the at least one magnetic sensor. A second embodiment comprises a rotating member that rotates about an axis with at least one flux concentrator positioned thereon having a longitudinal axis in the radial direction of the rotating member; and at least one vector-type magnetic sensor fixedly mounted in the near proximity to the axis of the rotating member such that the magnetic field detected is modulated due to the rotation of the rotating member. Optionally, at least one fixed flux concentrator may be positioned along the periphery of the rotating member so as to increase magnetic flux input.

Abstract: A magnetic field sensing device comprising at least one magnetic sensor attached to a base structure, rotating member; and at least one flux concentrator mounted on the rotating member; whereby as the rotating member turns, the at least one flux concentrator shields the magnetic sensor so as to modulate the output of the at least one magnetic sensor. A second embodiment comprises a rotating member that rotates about an axis with at least one flux concentrator positioned thereon having a longitudinal axis in the radial direction of the rotating member; and at least one vector-type magnetic sensor fixedly mounted in the near proximity to the axis of the rotating member such that the magnetic field detected is modulated due to the rotation of the rotating member. Optionally, at least one fixed flux concentrator may be positioned along the periphery of the rotating member so as to increase magnetic flux input.